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1. 发明申请

US20080278185A1 ELECTRICAL CONTACT DEVICE AND ITS MANUFACTURING PROCESS 审中-公开
标题翻译：电气接触装置及其制造工艺
公开(公告)号：US20080278185A1
公开(公告)日：2008-11-13
申请号：US11964369
申请日：2007-12-26
申请人： Chih-Chung CHEN
发明人： Chih-Chung CHEN
IPC分类号： G01R1/067 , H01R43/16
CPC分类号： G01R3/00 , G01R1/07342 , H01L2224/48091 , H05K3/4092 , Y10T29/49204 , H01L2924/00014
摘要： A method of making an electrical contact device includes the step of (a) preparing a substrate, (b) forming a dielectric layer on a surface of the substrate and forming a well on the dielectric layer by means of a non-etching technique, (c) forming a first sacrifice layer in the well, (d) forming a second sacrifice layer on the dielectric layer and the first sacrifice layer and defining a probe body contour and forming a probe body metal layer in the probe body contour and then repeating this step once or several times to form a probe structure, and (e) removing the sacrifice layers to obtain the desired electrical contact device having the substrate and the probe structure.
摘要翻译：一种制造电接触器件的方法包括以下步骤：（a）制备衬底，（b）在衬底的表面上形成电介质层并通过非蚀刻技术在电介质层上形成阱（ c）在所述阱中形成第一牺牲层，（d）在所述介电层和所述第一牺牲层上形成第二牺牲层并且限定探针主体轮廓并在所述探针主体轮廓中形成探针主体金属层，然后重复该步骤一次或几次以形成探针结构，和（e）去除牺牲层以获得具有基底和探针结构的所需电接触装置。

2. 发明申请

US20080164900A1 PROBE FOR HIGH FREQUENCY SIGNAL TRANSMISSION AND PROBE CARD USING THE SAME 有权
标题翻译：用于高频信号传输的探头和使用它的探头卡
公开(公告)号：US20080164900A1
公开(公告)日：2008-07-10
申请号：US11970739
申请日：2008-01-08
申请人： Wei-Cheng KU , Chih-Hao Ho , Chia-Tai Chang , Ho-Hui Lin , Chien-Ho Lin
发明人： Wei-Cheng KU , Chih-Hao Ho , Chia-Tai Chang , Ho-Hui Lin , Chien-Ho Lin
IPC分类号： G01R1/067
CPC分类号： G01R1/06772
摘要： A probe for high frequency signal transmission includes a metal pin, and a metal line spacedly arranged on and electrically insulated from the metal pin and electrically connected to grounding potential so as to maintain the characteristic impedance of the probe upon transmitting high frequency signal. The maximum diameter of the probe is substantially equal to or smaller than two times of the diameter of the metal pin. Under this circumstance, a big amount of probes can be installed in a probe card for probing a big amount of electronic devices, so that a wafer-level electronic test can be achieved efficiently and rapidly.
摘要翻译：用于高频信号传输的探针包括金属引脚和间隔布置在金属引脚上并与金属引脚电绝缘的金属线，并且电连接到接地电位，以便在传输高频信号时保持探针的特性阻抗。探头的最大直径基本上等于或小于金属销的直径的两倍。在这种情况下，可以在探针卡中安装大量的探头，用于探测大量电子设备，从而可以高效快速地实现晶圆级电子测试。

3. 发明授权

US07368928B2 Vertical type high frequency probe card 有权
标题翻译：垂直式高频探针卡
公开(公告)号：US07368928B2
公开(公告)日：2008-05-06
申请号：US11511285
申请日：2006-08-29
申请人： Hsin-Hung Lin , Shih-Cheng Wu , Wei-Cheng Ku , Chien-Liang Chen , Ming-Chi Chen , Hendra Sudin
发明人： Hsin-Hung Lin , Shih-Cheng Wu , Wei-Cheng Ku , Chien-Liang Chen , Ming-Chi Chen , Hendra Sudin
IPC分类号： G01R31/02 , G01R31/26
CPC分类号： G01R1/07371 , G01R1/06772
摘要： A vertical-type probe card includes a circuit board, which has signal circuits and grounding circuits arranged in such a manner that each signal circuit is disposed in parallel and adjacent to one grounding circuit and kept a predetermined distance from the grounding circuit, and a probe assembly, which is arranged at the bottom side of the circuit board and has an upper guide plate, a lower guide plate, a conducting layer provided on the lower guide plate, a plurality of signal probes respectively electrically connected to the signal circuits and adjacent to a plurality of compensation probes, and at least one grounding probe electrically connected to the grounding circuits in a manner that the signal, compensation and grounding probes are vertically inserted through the upper and lower guide plates, and the conducting layer is conducted with the compensation probe and the grounding probe while electrically insulated to the signal probe.
摘要翻译：垂直型探针卡包括电路板，其具有信号电路和接地电路，其布置成使得每个信号电路并联并且邻近一个接地电路并且与接地电路保持预定距离，并且探针组件，其布置在电路板的底侧，并具有上引导板，下引导板，设置在下引导板上的导电层，多个信号探头，分别电连接到信号电路并邻近多个补偿探针和至少一个接地探针，以使得信号，补偿和接地探针垂直插入上，下引导板的方式电连接到接地电路，并且导电层通过补偿探针和接地探头，同时与信号探头电绝缘。

4. 发明申请

US20060208751A1 Elastic micro probe and method of making same 失效
标题翻译：弹性微型探头及其制作方法
公开(公告)号：US20060208751A1
公开(公告)日：2006-09-21
申请号：US11328315
申请日：2006-01-10
申请人： Chih-Chung Chen
发明人： Chih-Chung Chen
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/06722 , G01R1/06733
摘要： An elastic micro probe includes an electrically conductive and stretchable spring, which has a first end, a second end opposite to the first end, and connection points disposed adjacent to the first end for connection to an external element, an electrically conductive probe body, which has a first end connected to the second end of the spring and a second end vertically upwardly protruding over the first end of the spring, and an electrically conductive tip, which has a bottom side connected to the second end of the probe body such that when the tip is pressed, the probe body is forced to move the second end of the spring, thereby causing the spring to be stretched and elastically deformed.
摘要翻译：弹性微型探头包括导电和可拉伸的弹簧，其具有第一端，与第一端相对的第二端，以及邻近第一端设置用于连接到外部元件的连接点，导电探针体，其中具有连接到弹簧的第二端的第一端和在弹簧的第一端上垂直向上突出的第二端，以及导电末端，其具有连接到探针主体的第二端的底侧，使得当尖端被按压，探针体被迫使弹簧的第二端移动，从而使弹簧伸长并弹性变形。

5. 发明申请

US20040232925A1 INTEGRATED CIRCUIT PROBE CARD 有权
标题翻译：集成电路探头卡
公开(公告)号：US20040232925A1
公开(公告)日：2004-11-25
申请号：US10707507
申请日：2003-12-18
申请人： MJC PROBE INCORPORATION
发明人： Lu Fu-Chin
IPC分类号： G01R031/02
CPC分类号： G01R1/07378
摘要： An integrated circuit probe card comprises a circuit board and a plurality of probes provided with a first pitch between them. The circuit board is constituted by a plurality of laminates and comprises an upper surface and a bottom surface a plurality of testing pads provided on the upper surface with a second pitch between them. Besides, the circuit board can further comprise a plurality of electronic devices provided on the upper surface for processing signals. The plurality of testing pads are connected to the bottom surface by the use of the plurality of conductive wires. The plurality of probes are provided with a first pitch and connected to the conductive wire on the bottom surface of the circuit board, wherein the first pitch is smaller than the second pitch.
摘要翻译：集成电路探针卡包括电路板和在它们之间设置有第一间距的多个探针。电路板由多个层叠体构成，并且包括上表面和底表面，多个测试垫设置在上表面上，在它们之间具有第二间距。此外，电路板还可以包括设置在上表面上用于处理信号的多个电子装置。多个测试焊盘通过使用多根导线连接到底面。多个探针设置有第一间距并连接到电路板的底表面上的导线，其中第一节距小于第二节距。

6. 发明申请

US20090009198A1 PROBING DEVICE 有权
标题翻译：探测器件
公开(公告)号：US20090009198A1
公开(公告)日：2009-01-08
申请号：US12133249
申请日：2008-06-04
申请人： Wei-Cheng Ku , Chih-Hao Ho , Ho-Hui Lin , Te-Chen Feng , Jun-Liang Lai , Jia-Chi Ho , Chih-Chung Chien , Chien-Huei Huang , Ai-Chuan Chang , Horng-Chuan Sun
发明人： Wei-Cheng Ku , Chih-Hao Ho , Ho-Hui Lin , Te-Chen Feng , Jun-Liang Lai , Jia-Chi Ho , Chih-Chung Chien , Chien-Huei Huang , Ai-Chuan Chang , Horng-Chuan Sun
IPC分类号： G01R1/073
CPC分类号： G01R31/2889 , G01R1/06772 , H01L2924/0002 , H01L2924/00
摘要： A probing device includes a rack that has an outer support member supporting a circuit layer and a center support member supporting a probe assembly. When the tester touching down the circuit layer of the probing device from the top side, the outer support member of the rack bears this touchdown stress. When the probes of the probe holder touching down the electronic components of an IC wafer under test, the center support member of the rack bears the reaction force from the IC wafer.
摘要翻译：探测装置包括具有支撑电路层的外部支撑构件的支架和支撑探针组件的中心支撑构件。当测试仪从顶侧触摸探测装置的电路层时，机架的外部支撑构件承受该接地应力。当探针支架的探针接触测试中的IC晶片的电子部件时，支架的中心支撑部件承受来自IC晶片的反作用力。

7. 发明申请

US20070176614A1 Probe card 失效
标题翻译：探针卡
公开(公告)号：US20070176614A1
公开(公告)日：2007-08-02
申请号：US11647410
申请日：2006-12-29
申请人： Horng-Kuang Fan
发明人： Horng-Kuang Fan
IPC分类号： G01R31/02
CPC分类号： G01R1/07307
摘要： A probe card mainly includes a circuit board, a probe assembly, an elastic support assembly, a plurality of level maintaining assemblies and a turning secure assembly. The circuit board has pads and spring bores. The probe assembly has a electrical signal transform board and probes on it. The elastic support assembly has a fixed plate, a locking plate and a plurality of springs. The springs are received in the spring bores of the circuit board to urge the electrical signal transform board for absorption of a height difference of the electrical signal transform board when the electrical signal transform board is inclined.
摘要翻译：探针卡主要包括电路板，探针组件，弹性支撑组件，多个水平维持组件和转动固定组件。电路板有焊盘和弹簧孔。探头组件上有一个电信号变换板和探头。弹性支撑组件具有固定板，锁定板和多个弹簧。弹簧被接收在电路板的弹簧孔中，以在电信号变换板倾斜时促使电信号变换板吸收电信号变换板的高度差。

8. 发明申请

US20070045535A1 Electrical contact device of probe card 有权
标题翻译：探针卡电接触器
公开(公告)号：US20070045535A1
公开(公告)日：2007-03-01
申请号：US11505407
申请日：2006-08-17
申请人： Chih-Chung Chen
发明人： Chih-Chung Chen
IPC分类号： G21K7/00
CPC分类号： G01R1/06761 , G01R1/06727 , Y10T29/49155
摘要： An electrical contact device of a probe card includes a base and probes on the base. The base has a top side with a cavity thereon, and the cavity has sidewalls connected to the top side. Anchored portion are provided on the sidewalls of the cavity. Each of the probes has a first end and a second end, wherein the first end is connected to the anchored portion, and the second end is extended toward the cavity respectively.
摘要翻译：探针卡的电接触装置包括底座和底座上的探头。底座具有顶部，其上具有空腔，并且腔体具有连接到顶侧的侧壁。锚固部分设置在空腔的侧壁上。每个探针具有第一端和第二端，其中第一端连接到锚定部分，并且第二端分别朝向空腔延伸。

9. 发明授权

US07053636B2 Probe device for electrical testing an integrated circuit device and probe card using the same 失效
标题翻译：用于电气测试的探针装置，其使用集成电路装置和探针卡
公开(公告)号：US07053636B2
公开(公告)日：2006-05-30
申请号：US10709723
申请日：2004-05-25
申请人： Hendra Sudin
发明人： Hendra Sudin
IPC分类号： G01R31/02
CPC分类号： G01R1/06722 , G01R1/06733 , G01R1/07314
摘要： The present probe device comprises an insulative body, at least one supporter positioned in the insulative body, a probe positioned substantially at the center of the supporter, and a conductive wire positioned in the insulative body and electrically connected to the supporter. The supporter can be a helical spring, which connects to the probe with its inner end and to the insulative body with its outer end. In addition, the supporter may include a plurality of beams, which connects to the probe at one end and to the insulative body at the other end. The beams are positioned in a radial manner with the probe at the center, and the included angle between two adjacent beams is substantially the same. The supporter can further comprise at least one ring connecting the plurality of beams.
摘要翻译：本探针装置包括绝缘体，位于绝缘体中的至少一个支撑体，基本上位于支撑体中心的探针，以及定位在绝缘体中并与支撑体电连接的导线。支撑件可以是螺旋弹簧，其连接到具有其内端的探针和具有其外端的绝缘体。此外，支撑件可以包括多个梁，其在一端连接到探针并且在另一端连接到绝缘体。梁以径向方式定位，探头位于中心，两个相邻梁之间的夹角基本相同。支撑件还可以包括连接多个梁的至少一个环。

10. 发明申请

US20050200375A1 PROBE DEVICE AND PROBE CARD USING THE SAME 失效
标题翻译：探针装置和探针卡
公开(公告)号：US20050200375A1
公开(公告)日：2005-09-15
申请号：US10709723
申请日：2004-05-25
申请人： Hendra Sudin
发明人： Hendra Sudin
IPC分类号： G01R31/00 , G01R31/02
CPC分类号： G01R1/06722 , G01R1/06733 , G01R1/07314
摘要： The present probe device comprises an insulative body, at least one supporter positioned in the insulative body, a probe positioned substantially at the center of the supporter, and a conductive wire positioned in the insulative body and electrically connected to the supporter. The supporter can be a helical spring, which connects to the probe with its inner end and to the insulative body with its outer end. In addition, the supporter may include a plurality of beams, which connects to the probe at one end and to the insulative body at the other end. The beams are positioned in a radial manner with the probe at the center, and the included angle between two adjacent beams is substantially the same. The supporter can further comprise at least one ring connecting the plurality of beams.
摘要翻译：本探针装置包括绝缘体，位于绝缘体中的至少一个支撑体，基本上位于支撑体中心的探针，以及定位在绝缘体中并与支撑体电连接的导线。支撑件可以是螺旋弹簧，其连接到具有其内端的探针和具有其外端的绝缘体。此外，支撑件可以包括多个梁，其在一端连接到探针并且在另一端连接到绝缘体。梁以径向方式定位，探头位于中心，两个相邻梁之间的夹角基本相同。支撑件还可以包括连接多个梁的至少一个环。

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