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1. 发明专利

ES2046653T3 未知
公开(公告)号：ES2046653T3
公开(公告)日：1994-02-01
申请号：ES90122831
申请日：1990-11-29
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： HEINZ, JOCHEN , KRUG, THOMAS, DR. , RUEBSAM, KLEMENS , KESSLER, HANS
IPC分类号： C23C14/24 , C23C14/26
摘要： A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face. The spring elements themselves are held and guided in an insulating manner with respect to the support bodies 6 or are made of an insulating material, and the conducting wires 7 connected to these supply lines 4 are conductors passed through by a coolant or are configured as cooling tubes 11 or cooling pipes running parallel to the conducting wires and discharging into chambers or channels 12 provided in the supply lines 4.

2. 发明专利

ES2041954T3 未知
公开(公告)号：ES2041954T3
公开(公告)日：1993-12-01
申请号：ES89122628
申请日：1989-12-08
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： KUNKEL, GEORG , KLINGENSTEIN, DIETER , MAHR, HEINZ , FLIEDNER, MICHAEL
IPC分类号： G02B7/02 , B23Q1/54 , C23C14/50 , G02B1/10 , G02C13/00
摘要： An apparatus for holding and turning lenses, particularly for eyeglass lenses to be coated in a high-vacuum vapor deposition or sputtering system. A ring pair carrying the lens to be held is seated on a substrate holder in the process chamber of the high-vacuum system. The substrate holder is a sheet metal part shaped like a half shell, and is rotatable about a vertical axis. A sickle shaped sheet metal blank forms a rake that partially overlaps the substrate holder. The rake is held and guided by a guide ring that is displaceable in the direction of the rotational axis of the substrate holder. The rake is displaceable by a lifting element of a lifting motor secured to the wall of the chamber. The rake includes individual tines having lower edges facing toward the substrate carrier. The tines engage pinions or gear wheels on the individual lens holders. The lens holders are mounted to the substrate via pegs, which allow the lens holders to pivot 180 DEG . The lens holders are pivoted by rotating the substrate holder after the lifting mechanism has lowered the rake, thus permitting engagement between the tines of the rake and the gears or pinions.

3. 发明专利

ES2031964T3 未知
公开(公告)号：ES2031964T3
公开(公告)日：1993-01-01
申请号：ES88112215
申请日：1988-07-28
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： SZCZYRBOWSKI, JOACHIM, DR. , DIETRICH, ANTON, DR. , HARTIG, KLAUS, DR.
IPC分类号： B32B9/00 , B32B7/02 , B60J1/00 , C03C17/36 , G02B5/20

4. 发明专利

ES2030006T3 未知
公开(公告)号：ES2030006T3
公开(公告)日：1992-10-16
申请号：ES87102866
申请日：1987-02-27
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： KIESER, JORG, DR. DIPL.-PHYS. , SELLSCHOPP, MICHAEL, DR. DIPL.-PHYS. , GEISLER, MICHAEL DR. DIPL.-PHYS.
IPC分类号： H01L21/302 , B29C59/14 , C23C14/34 , C23C16/02 , C23F4/00 , H01J37/32 , H01J37/34 , H01L21/3065 , H05H1/46
摘要： Device for the plasma treatment of substrates (7) in a high frequency-excited plasma discharge between two electrodes (3, 8), supplied by a high-frequency source (6). The first electrode is constructed as a hollow anode (3) and the second electrode (8), which carries the substrate (7), is deposited in front of the hollow space (10) of the hollow anode or can be passed by this. Moreover, the hollow anode (3) has an edge (9), which is drawn out in the direction of the second electrode (8) and which, relative to the second electrode, forms a gap s1 all around that does not exceed 10 mm in width. In order to form the electrode so that the gap width is not a critical feature, projections (12) are disposed in the hollow space (10) of the hollow anode (3), said projections increasing the internal surface area (11) of the hollow anode (3). Preferably, these projections (12) are constructed as rib structures, which may also assume a honeycomb form.

5. 发明专利

ES2028944T3 未知
公开(公告)号：ES2028944T3
公开(公告)日：1992-07-16
申请号：ES88108768
申请日：1988-06-01
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： ABRAHAM, JEAN-LUC , CHAVAND, JEAN-LUC , JEZIOROWSKI, FREDERIQUE
IPC分类号： F04C28/28 , F04D29/06 , F16N29/04 , F16N39/02 , F04C29/10
摘要： The invention relates to a method for monitoring the amount of oil flowing around the oil circuit of an oil lubricated vacuum pump (1), an oil filter (5) and an oil cooler (7, 8) being fitted in the oil circuit and the oil cooler being constructed as a heat exchanger and having oil and a coolant flowing through it; a precise monitoring of the oil flow and, consequently, a checking of the state of the filter is achieved either by measuring the temperature of the oil flow or the temperature of the coolant flow on the inlet side and the outlet side of the oil cooler (7, 8), comparing the two temperature values with each other and triggering a warning signal when the temperature difference exceeds or drops below a specified value.

6. 发明专利

ES2041955T3 未知
公开(公告)号：ES2041955T3
公开(公告)日：1993-12-01
申请号：ES89122630
申请日：1989-12-08
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： KUNKEL, GEORG , KLINGENSTEIN, DIETER , MAHR, HEINZ , FLIEDNER, MICHAEL
IPC分类号： G02B7/02 , C23C14/50 , G02B1/10 , G02C13/00
摘要： In a lens mounting, especially for spectacle glass lenses (25) to be coated in an apparatus for high-vacuum evaporation or for sputtering, which is essentially constructed as a ring (15), which supports the lens (25) to be held and, for its part, can be connected to a substrate mounting (4) which is held in the process chamber of the high-vacuum apparatus in the vicinity of the coating source, the lens (25) can be inserted between two rings (14, 15) which can be clamped against one another via wire springs (16, 17), the first ring (14) being provided on its outer circumferential surface (22) with ramps (30, 31) which co-operate with the wire springs (16, 17), which are attached to the radially outer circumferential surface (23) of the second ring (15), at least one of the rings (14) having at its radially outer circumferential surface (22) two diametrically opposite pins (18, 19) with which it is supported in corresponding bearing forks (20, 21) of the substrate mounting (4) and in which it can be rotated by approximately 180 DEG .

7. 发明专利

ES2031300T3 未知
公开(公告)号：ES2031300T3
公开(公告)日：1992-12-01
申请号：ES89106780
申请日：1989-04-15
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： FLEISCHMANN, FRANK , KABELITZ, HANS-PETER, DR. , KAISER, WINFRIED
IPC分类号： F04D29/056 , F04D25/06 , F04D29/04 , F04D29/059 , F04D29/62 , F04D29/66
摘要： A radial fan (1) with a motor housing (3) and a rotating unit supported in this housing; the rotating unit comprises a shaft (12), a fan rotor (11) and a motor armature (13); in order to facilitate and make more accurate the assembly, dismantling and in particular balancing of a fan of this type, it is proposed to make the dimensions such that the rotating unit can be removed in its entirety from the motor housing (3). … …

8. 发明申请

WO1996024828A1 TEST GAS LEAKAGE DETECTOR 审中-公开
标题翻译：测试气体泄漏检测
公开(公告)号：WO1996024828A1
公开(公告)日：1996-08-15
申请号：PCT/EP1995005079
申请日：1995-12-21
申请人： LEYBOLD AKTIENGESELLSCHAFT , BÖHM, Thomas , WIDT, Rudi
发明人： LEYBOLD AKTIENGESELLSCHAFT
IPC分类号： G01M03/20
CPC分类号： G01M3/202
摘要： The invention concerns a test gas leakage detector (1) with an inlet (2), a detector (3) in the form of a mass spectrometer, a first friction pump stage (5) which is driven in counter-flow, a second friction pump stage (7), an intermediate connection (6) between the first and second friction pump stages, a pre-vacuum pump (8), a first connection line (13) which can be shut off between the leakage detector inlet (2) and the inlet side (9) of the pre-vacuum pump (8), and with a second line (15) which can be shut off between the leakage detector inlet (2) and the intermediate connection (6). In order to detect leaks without using oil, the pre-vacuum pump (8) is a diaphragm pump. In order to shorten the response time, it is advantageous if the conductance of the connection line (15) between the inlet (2) of the leakage detector (1) and the intermediate inlet (6) is adjustable.
摘要翻译：本发明涉及一种测试气体泄漏检测器（1）具有入口（2），具有设计为质谱仪检测器（3），具有在逆流第一摩擦泵级（5）操作时，与第二摩擦泵级（7），与中间端子（ 6）（第一和第二摩擦泵级之间（与前级泵8）（与第一，可关闭的连接线13）的泄漏检测器的入口2）和所述入口侧（9）之间的前 - 真空泵（8）和具有第二，泄漏检测器的入口（2）和所述中间连接之间可关闭线（15）（6）; 使无油泄漏检测中，提出的是，预真空泵（8）是隔膜泵。为了实现更短的响应时间，这是有利的，关于它的导电性的泄漏检测器（1）的入口（2）和中间入口（6）之间的连接线（15）是可控的。

9. 发明申请

WO1996019721A1 COUNTERFLOW SNIFTING LEAK INDICATOR 审中-公开
标题翻译：逆流嗅吸测漏
公开(公告)号：WO1996019721A1
公开(公告)日：1996-06-27
申请号：PCT/EP1995003554
申请日：1995-09-09
申请人： LEYBOLD AKTIENGESELLSCHAFT , BÖHM, Thomas
发明人： LEYBOLD AKTIENGESELLSCHAFT
IPC分类号： G01M03/20
CPC分类号： G01M3/205 , G01M3/207
摘要： The invention pertains to a counterflow snifting leak indicator (1) with a mass spectrometer (3) as detector, with a high vacuum pump (4, 13) or high vacuum pump stage (14) through which the test gas travels in counterflow, with a snifter hose (7) connected to the outlet side of the high vacuum pump or high vacuum pump stage, and with a throttle to maintain the pressure difference between the atmospheric pressure in the inlet region (8) of the snifter hose (7) and the pressure in its outlet region (9). To improve sensitivity and reaction time the invention proposes dimensioning at least a segment of the snifter hose (7), preferably the entire snifter hose (7), in such a way that the desired throttling is attained.
摘要翻译：本发明涉及一种逆流嗅探检漏器（1）用质谱仪（3）作为检测器，具有通过在逆流高真空泵，具有连接到高真空泵或高真空泵阶段嗅探器管的出口侧的输入测试气体（4，13）或在高真空泵级（14）流入（7），并与在入口区域中的大气压力之间的压力差（8）的嗅探器管（7），并在其出口区域（9）保持反应器中的压力的; 以提高灵敏度和响应时间中提出，至少所述嗅探管（7）的一部分，最好是整个嗅探管（7）的尺寸，使得期望的节流来实现。

10. 发明申请

WO1995028596A1 VACUUMTIGHT CONNECTION 审中-公开
标题翻译：真空密封连接
公开(公告)号：WO1995028596A1
公开(公告)日：1995-10-26
申请号：PCT/EP1995000188
申请日：1995-01-19
申请人： LEYBOLD AKTIENGESELLSCHAFT , SCHULZ-HAUSMANN, Friedrich , WALTER, Wilhelm , FISCHER, Hans-Rudolf , ENGLÄNDER, Heinrich
发明人： LEYBOLD AKTIENGESELLSCHAFT
IPC分类号： F16L41/08
CPC分类号： F16L23/036 , F16L37/008 , F16L41/08
摘要： The invention relates to a vacuumtight connection between an (inner) channel (3) opening into the surface of the housing (2) of an appliance, pump or the like, the opening (4) of which is fitted with a sealing surface (5), and an (outer) line (6) having a flange (7) with a sealing surface (8) at the end to be connected to the channel (4); in order to make the connection compact and user-friendly, it is proposed that sealing surface (5) on the housing side and surrounding the opening (4) of the channel (3) be in the region of the housing surface and that, for the vacuumtight joint between the flange (7) of the outer line (6) and the housing surface, a securing plate be used which lies on the edge of the flange (7) away from the housing (2) once the connection has been made.
摘要翻译：本发明涉及一种（内部）信道之间的真空密封的连接（3）形成在所述壳体的所述表面（2）的设备中，泵等的通向和嘴（4）用的密封面（5）配备，和一个（外）管（6），其在与所述通道（4）其被接合端部的凸缘（7）的密封表面（8）; 连接到使紧凑且用户友好的，所以建议（3）围绕该密封面（5）是在所述壳体的表面的区域中，并且所述凸缘（7）的外管的真空密封的紧固通道的壳体侧，嘴（4）（6）用于当连接到所述壳体（2）（7）靠在从所述凸缘的边缘背对壳体表面的保持板（10）上。

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