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1. 发明专利

JP2007114435A Scanning optical unit, method of controlling the same, and laser machining apparatus 有权
标题翻译：扫描光学单元，其控制方法和激光加工设备
公开(公告)号：JP2007114435A
公开(公告)日：2007-05-10
申请号：JP2005305034
申请日：2005-10-19
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： NAGANO TSUYOSHI , ARIGA SATORU
IPC分类号： G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning optical unit having a long operating distance, in which collimated light is mechanically and two-dimensionally deflected by a reflecting deflection, and to provide a method of controlling by which the mechanically instable operation of the scanning optical unit is prevented.
SOLUTION: The scanning optical unit is provided with a first deflecting mirror which deflects the angle of a laser beam by reflection in a first face and a second deflecting mirror which deflects the angle of the laser beam deflected with the first deflecting mirror by reflection in a second face which intersects with the first face, and the two deflecting mirrors are rotationally driven with respectively different servomotors. The two mirror faces mechanically and two-dimensionally deflect collimated light beam by reflecting deflection, thus the scanning optical unit having a long operating distance is obtained. A servomotor controlling part turns the rotating shaft of the servomotors in both ways by an angle, 360° for instance, necessary for maintenance during the time when plotting is ceased, and so controls as to spread lubricant existing between the rotating shaft and a bearing part supporting the rotating shaft over the whole periphery of the rotating shaft.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有长的操作距离的扫描光学单元，其中准直光由反射偏转机械地和二维地偏转，并且提供一种控制方法，通过该方法，机械不稳定的操作防止扫描光学单元。解决方案：扫描光学单元设置有第一偏转镜，第一偏转镜通过第一面中的反射偏转激光束的角度，并且第二偏转镜将偏转第一偏转镜偏转的激光束的角度偏转在与第一面相交的第二面中的反射，并且两个偏转镜被分别用不同的伺服电机旋转驱动。这两个镜面通过反射偏转机械地和二维偏转准直光束，从而获得具有较长工作距离的扫描光学单元。伺服电动机控制部件将伺服电动机的旋转轴以两个方式旋转一定角度，例如在绘图停止时维护所需的360°，并且因此控制将存在于旋转轴和轴承部件之间的润滑剂在旋转轴的整个周边上支撑旋转轴。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006330518A Harmonic generator 审中-公开
标题翻译：和谐发电机
公开(公告)号：JP2006330518A
公开(公告)日：2006-12-07
申请号：JP2005156397
申请日：2005-05-27
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： MUKOHARA KATSUHARU , NAGANO TSUYOSHI
IPC分类号： G02F1/37
摘要： PROBLEM TO BE SOLVED: To provide a harmonic generator that can control the output power of laser light without using an optical component such as an attenuator and an absorption filter to attenuate the laser light. SOLUTION: Second harmonic laser light 15 reflected on a glass plate 23 is always monitored by a photodetector 17, while third harmonic laser light 16 reflected on a glass plate 25 is always monitored by a photodetector 18. The temperature of a Peltier element 9 attached to a nonlinear medium 7 and/or a Peltier element 10 attached to a nonlinear medium 8 is adjusted so as to obtain prescribed output power of the second harmonic laser light 15 and of the third harmonic laser light 16 based on the measurement results. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种谐波发生器，其可以在不使用诸如衰减器和吸收滤光器的光学部件来衰减激光的同时控制激光的输出功率。
解决方案：反射在玻璃板23上的二次谐波激光15总是由光电检测器17监测，而在玻璃板25上反射的三次谐波激光16总是由光电检测器18监测。珀耳帖元件的温度调整安装于非线性介质7和/或附着在非线性介质8上的珀耳帖元件10的图9，以便根据测量结果获得二次谐波激光15和三次谐波激光16的规定输出功率。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2006150373A Laser beam machining apparatus and laser beam machining method 审中-公开
标题翻译：激光加工设备和激光束加工方法
公开(公告)号：JP2006150373A
公开(公告)日：2006-06-15
申请号：JP2004341298
申请日：2004-11-25
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： ARIGA SATORU
IPC分类号： B23K26/00 , H01S3/00
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method capable of realizing the consistent machining and suppressing occurrence of defects. SOLUTION: Laser beams 10 emitted from a laser beam oscillator 1 are transmitted to an emission optical unit 6 via optical fibers 2. After the incident laser beams 10 are condensed by a condensing lens 3 in the emission optical unit 6, the laser beams are reflected by a mirror 5, and further condensed by a condensing lens 4, and a work 9 is machined by irradiating laser beams on a machining part of the work 9. The reflected laser beams 11 reflected from the surface of the work 9 are condensed by the condensing lens 4, transmitted through the mirror 5 and detected by a sensor 7. In a laser beam output control unit 8, the quantity of the reflected laser beams during the pre-registered normal machining is compared with the quantity of the reflected laser beams 11 detected by the sensor 7 to adjust the output of the laser beams 10 emitted from the laser beam oscillator 1. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供能够实现一致的加工并抑制缺陷的发生的激光束加工装置和激光束加工方法。解决方案：从激光束振荡器1发射的激光束10通过光纤2传输到发射光学单元6.在入射激光束10被发射光学单元6中的聚光透镜3聚光之后，激光光束被反射镜5反射，并被聚光透镜4进一步冷凝，并且通过在工件9的加工部分上照射激光来加工工件9.从工件9的表面反射的反射激光束11 由聚光透镜4聚光，通过反射镜5透射并由传感器7检测。在激光束输出控制单元8中，将预先登记的正常加工期间的反射激光束的量与反射的数量进行比较激光束11由传感器7检测，以调节从激光束振荡器1发射的激光束10的输出。版权所有：（C）2006，JPO＆NCIPI

4. 发明专利

JP2005057036A Fault detection method of laser diode, semiconductor laser equipment and semiconductor laser excitation solid-state laser equipment 审中-公开
标题翻译：激光二极管，半导体激光器件和半导体激光器激光激光器件的故障检测方法
公开(公告)号：JP2005057036A
公开(公告)日：2005-03-03
申请号：JP2003285769
申请日：2003-08-04
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： ISHIDA HISANORI , MURAYAMA SHINICHI
IPC分类号： H01S3/094 , H01S5/00 , H01S5/40
摘要： PROBLEM TO BE SOLVED: To provide the fault detection method of a laser diode, with which the laser diode that breaks down is located without stopping ejection of a laser beam when the laser diode breaks down at an open mode, and also to provide semiconductor laser equipment and semiconductor laser excitation solid-state laser equipment having the semiconductor laser equipment. SOLUTION: Equipment is provided with the laser diodes 2, bypass diodes 3 which are connected to all the laser diodes 2 in parallel and in a forward direction and have larger voltage characteristics than the laser diodes 2, and a fault detector 5 which detects both end voltages of the laser diodes 2 in which a threshold larger than a total of the forward direction voltages of the laser diodes 2 is set and detects an open mode fault when the voltage exceeds the threshold. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供激光二极管的故障检测方法，当激光二极管以打开模式分解时，激光二极管分解而不停止激光束的喷射而定位，并且还提供具有半导体激光设备的半导体激光设备和半导体激光激光固态激光设备。解决方案：设备配备有激光二极管2，并联和正向连接到所有激光二极管2并且具有比激光二极管2更大的电压特性的旁路二极管3，以及故障检测器5 检测其中设定了大于激光二极管2的正向电压的总和的阈值的激光二极管2的两端电压，并且当电压超过阈值时检测开模故障。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2007109981A Method of correcting defect 审中-公开
标题翻译：纠正缺陷的方法
公开(公告)号：JP2007109981A
公开(公告)日：2007-04-26
申请号：JP2005300945
申请日：2005-10-14
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： KUKIDA RURIKO , TAKAHASHI MASAMI
IPC分类号： H01L21/3205 , G02F1/13 , G09F9/00 , G09F9/30 , H01L21/02 , H01L21/66 , H01L23/52
摘要： PROBLEM TO BE SOLVED: To provide a method of correcting defects capable of shortening working hours and correcting the defects efficiently. SOLUTION: A substrate is arranged in a device (step S1), and alignment is performed (step S2). Defect data are acquired from inspection data (step S3), and a defective section is displayed on a monitor based on the defect data (step S4). The defect is found from the displayed image for determining whether correction is required (step S5), and it is determined whether the correction can be made further when it is determined that the correction is required (step S6). When it is determined that the correction can be made, machining content and machining conditions are set (step S7). When it is determined that the correction cannot be made, the substrate is discarded and the next one is arranged in the device (step S10). The defect, where it is determined that the correction is required, is machined successively (step S8), and it is determined whether the defect is corrected (step S9). COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种校正能够缩短工作时间并有效地校正缺陷的缺陷的方法。解决方案：将衬底布置在器件中（步骤S1），并进行校准（步骤S2）。从检查数据获取缺陷数据（步骤S3），并且基于缺陷数据在监视器上显示缺陷部分（步骤S4）。从显示图像中发现用于确定是否需要校正的缺陷（步骤S5），并且当确定需要校正时，是否可以进一步进行校正（步骤S6）。当确定可以进行校正时，设定加工内容和加工条件（步骤S7）。当确定不能进行校正时，丢弃衬底并将下一个布置在器件中（步骤S10）。连续地加工需要校正的缺陷（步骤S8），并确定是否修正了缺陷（步骤S9）。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2007109980A Method of correcting wiring 审中-公开
标题翻译：校正方法
公开(公告)号：JP2007109980A
公开(公告)日：2007-04-26
申请号：JP2005300944
申请日：2005-10-14
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： KUKIDA RURIKO , TAKAHASHI MASAMI
IPC分类号： H01L21/3205 , H01L21/768 , H01L23/52 , H01L23/522
CPC分类号： H01L22/20 , G01N21/95684 , G02F2001/136263 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide a method of correcting wiring capable of shortening working hours, and facilitating automation. SOLUTION: The presence or absence of a defect in a wiring pattern is confirmed by visual observation, image processing, or the like; defect information on the position, coordinates, size, or the like is confirmed, and the type of the defect is determined; when the defect is detected; and a machining method and machining conditions are set according to the type and state of the defect (step S1). Successively, a short-circuiting defect is corrected based on the confirmed defect information and the set machining method and conditions (step S2). Then, a disconnection defect is corrected based on the confirmed defect information and the set machining method and machining conditions (step S3). Then, when the correction machining is completed, it is determined whether the defects have been corrected (step S4). COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种校正能够缩短工作时间并有助于自动化的布线的方法。解决方案：通过目视观察，图像处理等确认布线图案中存在或不存在缺陷; 确认位置，坐标，大小等的缺陷信息，确定缺陷的种类; 当检测到缺陷时; 根据缺陷的种类和状态设定加工方法和加工条件（步骤S1）。接着，基于确认的缺陷信息和设定的加工方法和条件来校正短路缺陷（步骤S2）。然后，基于确认的缺陷信息和设定的加工方法以及加工条件来校正断线缺陷（步骤S3）。然后，当校正加工完成时，确定缺陷是否被校正（步骤S4）。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2006154595A Imaging optical apparatus and laser repair apparatus 有权
标题翻译：成像光学装置和激光修复装置
公开(公告)号：JP2006154595A
公开(公告)日：2006-06-15
申请号：JP2004348205
申请日：2004-12-01
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： ODAJIMA TAKAHIRO
IPC分类号： G02B27/09 , C23C16/48 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To provide an imaging optical apparatus uniformizing intensity distribution of laser light even in using laser light having strong coherence or laser light of short wavelength, and also to provide a laser repair apparatus incorporating the imaging optical apparatus.
SOLUTION: Regarding the laser CVD repair apparatus 1, a beam expander 4, an original quadrangular pyramid type prism 5, a variable slit part 6, an imaging relay lens 7, and an objective lens 8 are arranged in this order along the optical path of the laser light emitted from a laser oscillator 2, and a workpiece 50 is arranged in the focal position of the objective lens 8. The center axis of the prism 5 is aligned with the optical axis of the laser light 21b. A rotary driving motor 9 and a rotating mechanism part 10 are arranged to rotate the prism 5 around its own center axis as a rotating axis.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：即使在使用具有强相干性的激光或具有短波长的激光的激光的情况下，也提供使激光的强度分布均匀化的成像光学装置，并且还提供结合有成像光学装置的激光修复装置。解决方案：关于激光CVD修复装置1，沿着该激光CVD修复装置1的顺序布置扩束器4，原始四边形棱锥型棱镜5，可变狭缝部6，成像中继透镜7和物镜8 从激光振荡器2发射的激光的光路和工件50配置在物镜8的焦点位置。棱镜5的中心轴与激光21b的光轴对准。旋转驱动电动机9和旋转机构部10被设置为使棱镜5围绕其自身的中心轴线旋转，作为旋转轴。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2006153573A Interferometer 有权
标题翻译：干涉
公开(公告)号：JP2006153573A
公开(公告)日：2006-06-15
申请号：JP2004342487
申请日：2004-11-26
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： NAGANO TSUYOSHI
IPC分类号： G01B9/02 , G01J9/02
摘要： PROBLEM TO BE SOLVED: To provide an interferometer capable of measuring wavefronts at one sitting of the whole domain of an object whose wavefront is to be measured. SOLUTION: In this interferometer 1, a polarized beam splitter 2, a Faraday rotator 3, a cubic half mirror 4 and a wavefront modulator 5 are provided, in this order along the route of light 21, before wavefront modulation. A shutter 6 and a reference mirror 7 are also provided, in this order along the optical path of light reflected by the cubic half mirror 4. A tube lens 10, an imaging lens 11 and a camera 12 are also provided, in this order along the optical path of light reflected by the wavefront modulator 5 and reflected by the cubic half mirror 4. The reference mirror 7 is formed, by forming a plurality of grooves having the depth, corresponding to 1/8 of the wavelength of light 21 in air, mutually in parallel on the surface of a metal plate. Hereby, the phase of light, reflected by a projection part on the reference mirror 7, is mutually different by π/2, from the phase of light reflected by a recessed part. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在要测量波阵面的物体的整个领域的一个坐标处测量波前的干涉仪。解决方案：在该干涉仪1中，在波前调制之前，沿着光21的路径依次设置偏振分束器2，法拉第旋转器3，立方体半反射镜4和波前调制器5。沿着由立方体半反射镜4反射的光的光路依次设置有快门6和参考反射镜7.此外，依次设置管透镜10，成像透镜11和照相机12 由波前调制器5反射并由立方半反射镜4反射的光的光路。参考反射镜7通过在空气中形成具有对应于光21的波长的1/8的深度的多个凹槽形成在金属板的表面上相互并联。因此，由参考反射镜7上的投影部反射的光的相位与由凹部反射的光的相位相差π/ 2。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2006108134A Solid-state laser oscillator and method of oscillation 审中-公开
标题翻译：固态激光振荡器和振荡方法
公开(公告)号：JP2006108134A
公开(公告)日：2006-04-20
申请号：JP2004288509
申请日：2004-09-30
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： MORITA HIROYUKI
IPC分类号： H01S3/042 , H01S3/06
摘要： PROBLEM TO BE SOLVED: To provide a high-output and high beam-quality solid-state laser oscillator which can reduce stress load on a laser medium while making use of a merit of the disc-type laser medium that high output and high beam quality can be obtained, and which can output stable laser light over a long period of time, and to provide an oscillation method of the same. SOLUTION: A dielectric multilayer high-reflection film 2a which reflects light of the oscillation wavelength is formed on both front and rear surfaces of the disc-type laser medium 2. At the center of the top face of the laser medium, a laser light extraction window consisting of a dielectric multilayer anti-reflection film 2b which suppresses the reflection of the light of the oscillation wavelength is partially formed. On both front and rear surfaces of the laser medium 2, a first and a second heat sink 1 and 3 are so formed as to be thermally in contact with the surfaces. At the center of the second heat sink 3, an opening 3a for outputting laser light is formed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种高输出和高光束质量的固态激光振荡器，其可以降低激光介质上的应力负载，同时利用盘式激光介质的优点，即高输出和可以获得高光束质量，并且可以在长时间内输出稳定的激光，并提供其振荡方法。解决方案：在盘型激光介质2的前表面和后表面上形成反射振荡波长的光的电介质多层高反射膜2a。在激光介质的顶面的中心，部分地形成由抑制振荡波长的光的反射的电介质多层抗反射膜2b构成的激光提取窗口。在激光介质2的前表面和后表面上，第一和第二散热器1和3被形成为与表面热接触。在第二散热器3的中心形成有用于输出激光的开口3a。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005221974A Correction device for defect and method therefor 有权
标题翻译：用于缺陷的校正装置及其方法
公开(公告)号：JP2005221974A
公开(公告)日：2005-08-18
申请号：JP2004032288
申请日：2004-02-09
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： KUKIDA RURIKO , UEDA ATSUSHI
IPC分类号： G02F1/13 , G02F1/1368 , G09F9/00 , H01J9/50 , H01J11/20 , H01J11/22 , H01J11/34
CPC分类号： Y02W30/828
摘要： PROBLEM TO BE SOLVED: To provide a correction device and method of defects of a flat-panel display, capable of improving its productivity and production yield, by improving the unit process time and the quality of the plates, after repair. SOLUTION: CIM information, such as defect information, is inputted to the input 2 from a high order CIM 1. The information of the correction device is also inputted to the input 2 from the database, other than the high order CIM. The operation unit 3 obtains the relative positions between the defects and the kinds of defects, based on the inputted CIM information. Further, it obtains specific items, including the position and the kind of the defects to correct based on it. The output 4 outputs these specific items to the correction device 5 as the data, to correct the target defects. The correction device 5 uses a laser CVD to correct the defects, based on specific items inputted from the output 4. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：修复后，通过提高单元处理时间和板的质量，提供能够提高其生产率和生产率的平板显示器的缺陷的校正装置和方法。解决方案：诸如缺陷信息的CIM信息从高阶CIM1输入到输入2.除了高阶CIM之外，校正装置的信息也从数据库输入到输入2。操作单元3基于输入的CIM信息获得缺陷与缺陷种类之间的相对位置。此外，它获得具体项目，包括基于它的缺陷的位置和种类进行纠正。输出4将这些特定项目作为数据输出到校正装置5，以校正目标缺陷。校正装置5使用激光CVD来根据从输出4输入的特定项目来校正缺陷。（C）2005，JPO和NCIPI

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