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    • 7. 发明授权
    • Sealed electrode feeding assembly
    • 密封电极进料组件
    • US6018542A
    • 2000-01-25
    • US227489
    • 1999-01-06
    • Douglas N. Berger
    • Douglas N. Berger
    • H05B7/12
    • H05B7/12
    • An apparatus for feeding electrodes into a process chamber is disclosed. The apparatus is designed to maintain the atmosphere within the process chamber as separate from the atmosphere surrounding the process chamber. The apparatus has an air-tight tube having at least two internal sealing mechanisms, an outer sealing mechanism and an inner sealing mechanism, sealing mechanisms separated by an expandable section of the tube; penetration in the tube for the introduction of a purge gas in between the inner and outer sealing mechanisms; and an electrical contact for transmitting electrical power to the electrode.
    • 公开了一种用于将电极馈送到处理室中的装置。 该设备被设计成将处理室内的气氛与处理室周围的气氛分开。 该装置具有至少具有两个内部密封机构的气密管,外部密封机构和内部密封机构,由管的可扩张部分分隔开的密封机构; 在管中渗入以在内密封机构和外密封机构之间引入吹扫气体; 以及用于将电力传输到电极的电接触件。