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1. 发明授权

US6040611A Microelectromechanical device 有权
标题翻译：微机电装置
公开(公告)号：US6040611A
公开(公告)日：2000-03-21
申请号：US150901
申请日：1998-09-10
申请人： Hector J. De Los Santos , Yu-Hua Kao , Arturo L. Caigoy , Eric D. Ditmars
发明人： Hector J. De Los Santos , Yu-Hua Kao , Arturo L. Caigoy , Eric D. Ditmars
IPC分类号： B81B3/00 , H01H59/00 , H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A microelectromechanical (MEM) device includes a substrate and a flexible cantilever beam. The substrate has positioned thereon a first interconnection line separated by a first gap and a second interconnection line separated by a second gap parallel to the first interconnection line. The substrate also has positioned thereon a first and second primary control electrode wherein one of the first and second primary control electrodes is positioned on one side of one of the first and second interconnection lines and the other one is positioned on the other side of the other first and second interconnection lines. The flexible cantilever beam has a top surface and a bottom surface and a beam width slightly larger than the gap widths at the gaps. A flexible anchor is secured to the bottom surface of the beam at a center of the beam and attached to a center of the substrate so as to position the beam orthogonally to the first and second interconnection lines. Secondary control electrodes are secured to the bottom surface of the beam and positioned opposite the primary control electrodes. First and second contact pads are secured to the bottom surface of the beam and positioned opposite the first and second interconnection lines.
摘要翻译：微机电（MEM）装置包括基板和柔性悬臂梁。衬底上定位有由第一间隙隔开的第一互连线和由与第一互连线平行的第二间隙分开的第二互连线。基板还在其上定位有第一和第二主要控制电极，其中第一和第二主要控制电极中的一个位于第一和第二互连线之一的一侧，另一个位于另一个的另一侧第一和第二互连线。柔性悬臂梁具有顶部表面和底部表面以及稍大于间隙处的间隙宽度的梁宽度。柔性锚固件在梁的中心处固定到梁的底表面并且附接到基板的中心，以便将梁垂直定位到第一和第二互连线。二次控制电极固定到梁的底表面并且与主控制电极相对定位。第一和第二接触垫固定到梁的底表面并与第一和第二互连线相对定位。

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