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    • 5. 发明申请
    • LIGHT-ABSORBING ANTIREFLECTIVE LAYERS WITH IMPROVED PERFORMANCE DUE TO REFRACTIVE INDEX OPTIMIZATION
    • 具有改进性能的光吸收抗反射层由于折射率优化
    • WO1997033200A1
    • 1997-09-12
    • PCT/US1997003754
    • 1997-03-06
    • HOECHST CELANESE CORPORATION
    • HOECHST CELANESE CORPORATIONDAMMEL, Ralph, R.NORWOOD, Robert, A.
    • G03F07/09
    • G03F7/091
    • The invention consists of a light-absorbing top antireflective layer which reduces the swing curve amplitude for photoresist materials used in the semiconductor industry. The coating may be water based but is not necessarily so. The advantage of a water-based coating is its ease of use, since it can be applied without intermixing to the softbaked photoresist, and is removed in the development step, so that process complexity is only minimally increased. One problem that has been associated with the existing non-absorbing antireflective coatings is that the optimum swing curve reduction is only achieved at a very low refractive index. The advantages of a dyed coating are: a) that the refractive index of the top coat can additionally be lowered by making use of anomalous dispersion effects if the dye is chosen judiciously, and b) that it is possible to achieve the optimum swing curve reduction at a higher refractive index of the top coat. By a combination of these two effects, the present invention demonstrates a reduction of the swing curve close to the theoretical minimum value, which constitutes a substantial improvement over existing antireflective topcoats.
    • 本发明包括一种吸收性的顶部抗反射层,其减少半导体工业中使用的光致抗蚀剂材料的摆动曲线幅度。 涂层可以是水性的,但不一定如此。 水性涂​​料的优点是其易于使用,因为它可以在不与软烘烤的光致抗蚀剂混合的情况下进行应用,并且在显影步骤中被去除,使得仅仅最小程度地提高了工艺复杂性。 与现有的非吸收性抗反射涂层相关联的一个问题是仅在非常低的折射率下实现最佳摆动曲线减小。 染色涂层的优点是:a)如果染色被明智地选择,则可以通过利用异常色散效应来额外降低顶涂层的折射率,以及b)可以实现最佳摆动曲线减小 在顶涂层的较高折射率下。 通过这两种效果的组合,本发明证明了接近理论最小值的摆动曲线的减小,这相对于现有的抗反射面漆构成了实质的改进。