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    • 1. 发明公开
    • INTRA-CAVITY AND INTER-CAVITY HARMONICS GENERATION IN HIGH POWER LASERS
    • ER UNG ON EN N N N N N N N N N N N N N N N N N N N N N N
    • EP1010221A4
    • 2005-11-30
    • EP98923476
    • 1998-05-14
    • EXCEL QUANTRONIX CORP
    • ZHOU FUZHENGFU QIANGMAIKOWSKI MICHAEL
    • G02F1/37G02F1/35H01S3/109H01S3/10
    • H01S3/109G02F2001/354G02F2001/3542
    • Intra-cavity and/or inter-cavity sub-resonators (10, 20, 22, 50, 52, 32, 54) with dielectric coated mirrors (10, 50, 52, 54) have anti-reflection and high-reflection coatings to attain high efficiency third (32) and higher order harmonics generation of laser radiation. Main-resonators and sub-resonators enhance the fundamental and harmonic oscillation, respectively, which result is high conversion efficiency of third harmonics (32) and higer, such improved lasing efficiency may be implemented in higher power lasers for improved power performance to attain over 8 W of UV output power with a high repetition rate. The use of intra-cavity THG techniques provide high efficiency by using existing high intensities of the input fundamental frequencies available in the intra-cavity region of the laser to avoid damage to components of the laser, such as the laser crystal. The THG utilizes a double-pass and/or multi-pass arrangement, which results in about a 60 % increase in output power compared to a single pass configuration. Also, blocking of UV energy generated in a return pass is performed to eliminate damage by the UV to components in the main cavity.
    • 具有介电涂层镜的腔内和/或腔间次谐振器具有抗反射和高反射涂层,以实现激光辐射的高效率三次谐波和高次谐波产生。 主谐振器和副谐振器分别增强了基波和谐波振荡,导致三次谐波的高转换效率和更高的谐波振荡。 这种改进的激光效率可以在高功率激光器中实现,以改善功率性能,以获得具有高重复率的超过8W的UV输出功率。 腔内THG技术的使用通过使用激光器的腔内区域内可用的输入基频的现有高强度来避免对诸如激光晶体的激光器的部件的损坏而提供高效率。 THG采用双通和/或多通道布置,与单通配置相比,输出功率增加约60%。 此外,执行在返回通道中产生的UV能量的阻挡以消除UV对主腔中的部件的损伤。