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1. 发明专利

JP2002033374A CHUCK FOR PROBE STATION 失效
公开(公告)号：JP2002033374A
公开(公告)日：2002-01-31
申请号：JP2001136081
申请日：2001-05-07
申请人： CASCADE MICROTECH INC
发明人： DANIEL L HARRIS , PETER R MCCANN
IPC分类号： G01R31/26 , G01R1/04 , G01R31/28 , H01L21/00 , H01L21/66 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a compact chuck for a probe station that quickly and accurately carries out angle indexing to a device to be tested. SOLUTION: This chuck 12 is equipped with bases 16 and 56, mounted on the probe station 10, a shaft 52 mounted on the bases, while the shaft can be rotated, and a device-mounting member 50 that is fixed to the shaft, while the member is rotated with the shaft. Essentially regardless of the direction of the shaft to the device-mounting member 50, the device-mounting member has a direction of a plane to the base. An O-ring 76, with a large diameter is provided between the base and the device-mounting member and the device- mounting member, is supported by the O-ring 76 regardless of the verticality of the shaft 52 for maintaining consistent horizontality, thus reducing the length of the shaft, the height and volume of the chuck, and making the probe station compact.

2. 发明专利

JPH0661319A WAFER PROBE STATION PROVIDED WITH AUXILIARY CHUCK 失效
公开(公告)号：JPH0661319A
公开(公告)日：1994-03-04
申请号：JP12142793
申请日：1993-05-24
申请人： CASCADE MICROTECH INC
发明人： WAAREN KEI HAAUTSUDO , POORU EI TAABO , RICHIYAADO ETSUCHI WAANAA
IPC分类号： G01R31/26 , G01R1/067 , H01L21/66 , H01L21/683 , H01L21/68
摘要： PURPOSE: To achieve a continuous test by using an auxiliary chuck that can be interconnected to a wafer chuck removably. CONSTITUTION: A system 120 of auxiliary chucks 92 and 94 is inserted between a stage 83 and the auxiliary chucks 92 and 94, thus performing level adjustment between the upper smoothing surface of the auxiliary chucks 92 and 94 and that of a wafer chuck 80 or the other auxiliary chucks 92 and 94 and hence compensating for the difference in thickness among a wafer, a contact substrate, and a calibration substrate that are placed on a chuck member 20 simultaneously and moving a wafer probe 30 from one to the other easily without any difference in a contact pressure or without any risk of the preceding stage of a probe chip 32 from being damaged owing to a level difference. As a result, a continuous test can be performed.

3. 发明专利

JPH0653293A PROBE STATION 失效
公开(公告)号：JPH0653293A
公开(公告)日：1994-02-25
申请号：JP13596393
申请日：1993-06-07
申请人： CASCADE MICROTECH INC
发明人： RANDEII JIEI SHIYUBINDO , UOOREN KEI HAAUTSUDO , POORU EI TAABO , KENESU AARU SUMISU , RICHIYAADO ETSUCHI WAANAA , PIITAA DEII ANDORIYUUSU
IPC分类号： H01L21/66 , A46D1/00 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/687
摘要： PURPOSE: To obtain a probe station having Kelvin connection and shielding system which is immediately applicable and protective by installing a detachable electric connector assembly on a chuck assembly, having connector elements which are connected, in a pair relation, with first and second chuck assemblies. CONSTITUTION: This probe station is provided with an integrated protective system which facilitates the use of a station for measuring a small current, and integrated Kelvin connection for eliminating voltage loss due to line resistance. The station has a chuck assembly 20 constituted of three chuck assembly elements 80, 81, 83. The first element 80 retains a test equipment. The second element 81 under the first element acts as a protective body for reducing a leakage current. The elements 80, 81 are electrically insulating from each other and from a retaining structure, which is the third element 83 located below.

4. 发明专利

JP2012068256A Probe head with membrane suspended probe 有权
标题翻译：探针头与膜的悬挂探头
公开(公告)号：JP2012068256A
公开(公告)日：2012-04-05
申请号：JP2011241849
申请日：2011-11-04
申请人： Cascade Microtech Inc , カスケードマイクロテックインコーポレイテッドCascade Microtech,Incorporated
发明人： SMITH KENNETH , MICHAEL JOLLY , VICTORIA VAN SHEKEL
IPC分类号： G01R1/073 , G01R31/26 , H01L21/66
CPC分类号： G01R1/0735 , G01R1/07371
摘要： PROBLEM TO BE SOLVED: To use a membrane suspended probe as a component of a probe assembly of a needle type probe head.SOLUTION: The probe head includes: an elastic membrane 170 having a first surface and a second surface formed on the opposite side to the first surface and, when one of the first and second surfaces is distorted, capable of exerting restoring force; a beam 164 having a first end part and a second end part; a probe tip part 168 existing in the vicinity of the one end part of the beam 164 and coming into contact with a device to be inspected; and a membrane suspended probe 104 existing in the vicinity of the second end part of the beam 164 and including a beam contact part exposed from the first surface of the elastic membrane 170. In the probe head, the beam 164 can be moved to deform the second surface of the elastic membrane 170.
摘要翻译：要解决的问题：使用膜悬浮探针作为针型探头的探针组件的部件。解决方案：探头包括：弹性膜170，其具有形成在第一表面的相对侧上的第一表面和第二表面，并且当第一表面和第二表面之一变形时能够施加恢复力; 具有第一端部和第二端部的梁164; 存在于梁164的一个端部附近并与要检查的装置接触的探针尖端部分168; 以及存在于梁164的第二端部附近并且包括从弹性膜170的第一表面露出的梁接触部分的膜悬浮探针104.在探头中，梁164可以移动以使弹性膜170的第二表面。（C）2012，JPO＆INPIT

5. 发明专利

JP2010114916A Method for removing obstacle in image in digital imaging system 审中-公开
标题翻译：在数字成像系统中去除图像中的异常的方法
公开(公告)号：JP2010114916A
公开(公告)日：2010-05-20
申请号：JP2009284542
申请日：2009-12-15
申请人： Cascade Microtech Inc , カスケードマイクロテックインコーポレイテッドCascade Microtech,Incorporated
发明人： ABNET CAMERON , FELDKHUN DANIEL LEIBOVICH , MERMELSTEIN MICHAEL STEPHEN
IPC分类号： H04N5/228 , G02B21/00 , G06T3/40
CPC分类号： G06T3/4069 , G02B21/025 , G02B21/18 , G02B21/365 , H04N1/393 , H04N5/23296
摘要： PROBLEM TO BE SOLVED: To provide an improved imaging method and system. SOLUTION: A system and a method for extending a range of digital zoom are provided, wherein an imaging system provides a continuous magnification on a plurality of separated optical paths and a plurality of digital zoom imaging devices. The system and method that also bring an image to the center along with a view field change and remove an undesirable obstacle from a magnified image by means of the mask. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供改进的成像方法和系统。提供了一种用于扩展数字变焦范围的系统和方法，其中成像系统在多个分离的光路和多个数字变焦成像装置上提供连续放大。也可以使视场与图像一起向中心转移的系统和方法，并通过掩模从放大图像中去除不需要的障碍物。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2006177971A Method for inspecting electric device 有权
标题翻译：检查电气设备的方法
公开(公告)号：JP2006177971A
公开(公告)日：2006-07-06
申请号：JP2006005111
申请日：2006-01-12
申请人： Cascade Microtech Inc , カスケードマイクロテックインコーポレイテッドCascade Microtech,Incorporated
发明人： GLEASON K REED , SMITH KENNETH A , BAYNE MIKE
IPC分类号： G01R1/073 , G01R31/26 , G01R1/06 , G01R1/067 , G01R31/02 , G01R31/28 , H01L21/66
CPC分类号： G01R1/06711 , G01R1/07342 , G01R1/0735
摘要： PROBLEM TO BE SOLVED: To surely attain sufficient scrubbing pressure and reliable tilting and returning effect of each contact in a membrane probing assembly.
SOLUTION: The membrane probing assembly 42 includes a membrane assembly 72 having a central region 80 interconnected to a support 54 by an elastomeric layer 98. Flexible traces form data/signal lines 76 to contacts 88 on the central region 80. Each contact 88 comprises a rigid beam 90 and a bump 92 located in off-centered location on the beam 90, which bump 92 includes a contacting portion 93. After initial touchdown of these contacting portions 93, further overtravel of pads 100 causes each beam 90 to independently tilt locally so that different portions of each beam 90 move different distances relative to the support 54 thus driving each contact into lateral scrubbing movement across the pads 100.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：确保在膜探测组件中获得足够的洗涤压力和可靠的倾斜和每个接触的返回效果。解决方案：膜探测组件42包括膜组件72，膜组件72具有通过弹性体层98互连到支撑件54的中心区域80.柔性迹线将数据/信号线76形成到中心区域80上的触点88。 88包括刚性梁90和位于梁90上的偏心位置的凸起92，凸起92包括接触部分93.在这些接触部分93初始接触之后，垫100的进一步超行使每个梁90独立地每个梁90的不同部分相对于支撑件54移动不同的距离，从而将每个接触件驱动穿过垫片100进行横向擦洗运动。版权所有：（C）2006，JPO＆NCIPI

7. 发明专利

JPH03181870A MULTIPORT ERROR MODEL CORRECTION 失效
公开(公告)号：JPH03181870A
公开(公告)日：1991-08-07
申请号：JP32334990
申请日：1990-11-28
申请人： CASCADE MICROTECH INC
发明人： ERITSUKU DABURIYUU SUTORAIDO , ANDORIYU SHII DABITSUDOSON
IPC分类号： G01R27/04 , G01R27/28 , G01R31/00 , G01R35/00
摘要： PURPOSE: To correct the error factor of an error model, which involves N error factors, by reducing a modeled error with new error factor obtained by changing at least one of the error factors of quantity N. CONSTITUTION: A theoretical network analyzer 22 is connected to a device (DUT) 24 to be tested, and an error network 28 for modeling the characteristics of a transmission line and a testing instrument inserted between the DUT 24 and an actual measuring surface 30, probe head and other circuits is put between a desired measuring surface 26 and an analyzer 22. In the error model having the error factors of quantity N, at least one of the error factors of quantity N is changed to obtain a new error factor. By reducing modeled errors with the new error factor, it is possible to correct the error due to the error factor of the error model.

8. 发明专利

JPH02172303A OVERLAPPING INTERFACE BETWEEN COPLANAR TRANSMISSION LINE PERMITTING LATERAL AND LONGITUDINAL DISALIGNMENT 失效
公开(公告)号：JPH02172303A
公开(公告)日：1990-07-03
申请号：JP27877889
申请日：1989-10-27
申请人： CASCADE MICROTECH INC
发明人： KEI RIIDO GURIISON , KIISU II JIYOONZU , ERITSUKU DABURIYUU SUTORITSUDO
IPC分类号： H01P1/04 , H01P5/02
摘要： PURPOSE: To minimize the variation of impedance by using an overlapped end part of a different shape between respective signal lines/ground lines of transmission lines for interface structure for connecting a pair of shared face transmission lines. CONSTITUTION: In a pair of shared face transmission lines 20, 20a, each end part 24 or 25 of one transmission line 20 has lateral dimensions larger than the dimensions of the end part 24a or 25a of the other transmission line 20a and the end parts 24a, 25a have lateral dimensions remarkably reduced from the remaining parts of respective lines. In the case of overlapping narrow corresponding end part 24a or 25a, respective end parts 24, 25 have excessively conductive materials 21', 23', and when respective transmission lines 21, 21a are unaligned in the lateral direction, the lateral dimensions 26 of the signal line end part and a lateral interval between the signal line end part and a ground line end part are included within the valid limit of non-alignment. Consequently the impedance variation of the interface can be minimized.

9. 发明专利

JPH02132377A CALIBRATION OF MEASURED ELECTRIC VALUE VECTOR CORRECTED 失效
公开(公告)号：JPH02132377A
公开(公告)日：1990-05-21
申请号：JP6402089
申请日：1989-03-17
申请人： CASCADE MICROTECH INC
发明人： ERITSUKU DABURIYUU SUTORITSUDO , KIISU II JIYOONZU
IPC分类号： G01R27/04 , G01R35/00
摘要： PURPOSE: To compensate reactance accurately by measuring the level and phase of each compound reflection factor at each multiple frequency of an impedance reference value. CONSTITUTION: Three primary impedance reference values provided on an impedance reference substance are contacted with a probe chip 20 and the individual reflection factor is measured to determine three initial error coefficients Ed, Er, and Es according to a convention. Then, in addition to the three primary impedance standard values, in this case, a fourth impedance standard value can be an open-circuited or short-circuited stab, a capacitor with a high Q, or an inductance with a high Q. After the initial error coefficients are adjusted by this system and reactance generated by a superposition distance 42 is compensated, the superposition distance is retained during the next measurement by the probe chip 20 of a device during next measurement, thus retaining the same reactance and hence enabling the adjusted error coefficient to compensate reactance applied at the next measurement accurately.

10. 发明专利

JPH0258403A RANCHER FOR CONNECTING COAXIAL TRANSMISSION LINE TO MICROSTRIP TRANSMISSION LINE 失效
公开(公告)号：JPH0258403A
公开(公告)日：1990-02-27
申请号：JP15592189
申请日：1989-06-20
申请人： CASCADE MICROTECH INC
发明人： KIISU II JIYOONZU , UOOREN KEI HAAUTSUDO
IPC分类号： H01P5/02 , H01P5/08
摘要： PURPOSE: To pass a high-frequency signal without power loss by providing an adjustable stopper which positions the top surface of the microstrip transmission line in a changeable state as to the external conductor of the launcher and a tapered contact pin which comes into linear contact with the upper conductor of the microstrip transmission line. CONSTITUTION: The shape of the launcher 10 is so optimized that the tapered pin 42 maintains characteristic impedance along the length of a hole 28, and the launcher is used for the microstrip transmission line 12 which has expected substrate thickness satisfying gap-thickness relation. When the launcher 10 is used for a microstrip transmission line 12 having different substrate thickness, the front end of the tapered pin 42 needs to be moved elastically to outside an optimum position along the axis of the hole 28 so as to obtain the necessary gap-thickness relation. Consequently, the characteristic impedance varies along the length of the hole 28, but total signal reflection is reduced and the adjustable stopper 46 can correct an error in diameter generated between the pin 42 and hole 28 because of manufacture tolerance. Consequently, the launcher 10 can minimize a reflected signal.

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