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    • 7. 发明专利
    • Two-terminal resistance switching device structure and manufacturing method thereof
    • 两端电阻开关器件结构及其制造方法
    • JP2012023374A
    • 2012-02-02
    • JP2011153349
    • 2011-07-11
    • Crossbar Incクロスバー, インコーポレイテッドCrossbar, Inc.
    • JOE SANG-HYUNHARNER SCOTT BRAD
    • H01L27/105H01L45/00H01L49/00
    • H01L45/085H01L27/2436H01L45/04H01L45/1233H01L45/1253H01L45/1266H01L45/14H01L45/143H01L45/148H01L45/16H01L45/1675
    • PROBLEM TO BE SOLVED: To provide a method for forming a two-terminal device.SOLUTION: A first dielectric material 402 which is overlapped with the surface area of a substrate 302 is formed, a lower wiring material 602 is formed so as to be overlapped with the first dielectric material, and a switching material 902 is piled up so as to be overlapped with the lower wiring material. A first patterning and an etching process are performed to the lower wiring material and the switching material to form a first structure 1102 having an upper surface area and a side area. A second dielectric material 1202 is formed so as to be overlapped with the first structure 1102 having an exposure area of a switching element. An opening area 1402 is formed in a part of the second dielectric material 1202 to expose a part of the upper surface area of the switching element. An upper wiring material 1602 includes a conductive material to be formed so as to be overlapped with the opening area 1402 so that a conductive material can contact the switching element directly. A second etching process is performed to form an upper wiring structure.
    • 要解决的问题:提供一种用于形成双端子装置的方法。 解决方案:形成与衬底302的表面区域重叠的第一电介质材料402,形成下布线材料602以与第一电介质材料重叠,并且堆叠开关材料902 以便与下布线材料重叠。 对下布线材料和开关材料进行第一图案化和蚀刻处理,以形成具有上表面区域和侧面区域的第一结构1102。 第二电介质材料1202形成为与具有开关元件的曝光区域的第一结构1102重叠。 开口区域1402形成在第二电介质材料1202的一部分中以暴露开关元件的上表面区域的一部分。 上布线材料1602包括要形成为与开口区域1402重叠的导电材料,使得导电材料可以直接接触开关元件。 执行第二蚀刻工艺以形成上部布线结构。 版权所有(C)2012,JPO&INPIT