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1. 发明申请

US20070047271A1 HIGH-FREQUENCY POWER APPARATUS 有权
标题翻译：高频电源设备
公开(公告)号：US20070047271A1
公开(公告)日：2007-03-01
申请号：US11467229
申请日：2006-08-25
申请人： Hiroyuki KOTANI , Hirotaka TAKEI
发明人： Hiroyuki KOTANI , Hirotaka TAKEI
IPC分类号： H02M1/12
CPC分类号： H02M7/53806
摘要： A high-frequency power apparatus including: an oscillator, outputting an oscillating signal, an output level of the oscillating signal being variable; an amplifier, amplifying the oscillating signal output from the oscillator and outputting high-frequency power; a DC power supply, supplying DC power to the amplifier, an output level of the DC power being variable; a high-frequency power measuring unit, measuring a power value of the high-frequency power at an output terminal of the high-frequency power apparatus and outputting the measured power value as a high-frequency power measured value; a DC power measuring unit, measuring a power value of the DC power supplied to the amplifier and outputting the measured DC power value as a DC power measured value; a first controller, controlling the output level of the oscillating signal to be output from the oscillator such that the high-frequency power measured value is substantially equal to an output power set value; and a second controller, controlling the output level of the DC power to be supplied from the DC power supply to the amplifier such that a calculated value obtained by dividing the high-frequency power measured value by the DC power measured value is substantially equal to a predetermined efficiency set value.
摘要翻译：一种高频电力设备，包括：振荡器，输出振荡信号，所述振荡信号的输出电平是可变的; 放大器，放大从振荡器输出的振荡信号并输出高频功率; 直流电源，向放大器提供直流电力，直流电力的输出电平是可变的; 高频功率测量单元，测量高频电力设备的输出端子处的高频功率的功率值，并输出测量的功率值作为高频功率测量值; 直流功率测量单元，测量提供给放大器的直流电力的功率值，并将所测量的直流功率值输出为直流功率测量值; 第一控制器，控制从振荡器输出的振荡信号的输出电平，使得高频功率测量值基本上等于输出功率设定值; 以及第二控制器，控制从DC电源向放大器提供的DC电力的输出电平，使得通过将高频功率测量值除以DC功率测量值而获得的计算值基本上等于预定效率设定值。

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