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1. 发明申请

WO2010065131A3 HIGH FREQUENCT DEFLECTION MEASUREMENT OF IR ABSORPTION 审中-公开
公开(公告)号：WO2010065131A3
公开(公告)日：2010-06-10
申请号：PCT/US2009/006388
申请日：2009-12-04
申请人： ANASYS INSTRUMENTS , VODOPYANOV, Konstantin , POLICAR, Clotilde , READING, Mike , DAZZI, A. , KJOLLER, Kevin , PRATER, Craig , GOTTHERD, Doug
发明人： VODOPYANOV, Konstantin , POLICAR, Clotilde , READING, Mike , DAZZI, A. , KJOLLER, Kevin , PRATER, Craig , GOTTHERD, Doug
IPC分类号： G01Q30/02 , G01Q60/32 , G01N21/35 , G01Q60/38
摘要： An AFM 2 based technique has been demonstrated for performing highly localized IR spectroscopy 13 on a sample surface 3. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

2. 发明申请

WO2007133585A3 QUANTITATIVE CALORIMETRY SIGNAL FOR SUB-MICRON SCALE THERMAL ANALYSIS 审中-公开
公开(公告)号：WO2007133585A3
公开(公告)日：2007-11-22
申请号：PCT/US2007/011195
申请日：2007-05-08
申请人： ANASYS INSTRUMENTS , KJOLLER, Kevin , HAMMICHE, Azzedine
发明人： KJOLLER, Kevin , HAMMICHE, Azzedine
IPC分类号： G01N25/48 , G01K17/00 , G01N13/10
摘要： The invention is a system and method for producing highly localized calorimetry data on a sample surface. The system is based on an SPM or other system with a probe (1) and fine positioning capability. A heated probe (2) is used to take a small sample (nano-sample (6)) of a surface, and thereby make calorimetry measurements in a controlled manner.

3. 发明申请

WO2010019256A1 TRANSITION TEMPERATURE MICROSCOPY 审中-公开
标题翻译：过渡温度显微镜
公开(公告)号：WO2010019256A1
公开(公告)日：2010-02-18
申请号：PCT/US2009/004652
申请日：2009-08-13
申请人： ANASYS INSTRUMENTS , KJOLLER, Kevin , SAHAGIAN, Khoren , GOTTHARD, Doug , KURTZ, Anthony , SHETTY, Roshan , PRATER, Craig , READING, Michael
发明人： KJOLLER, Kevin , SAHAGIAN, Khoren , GOTTHARD, Doug , KURTZ, Anthony , SHETTY, Roshan , PRATER, Craig , READING, Michael
IPC分类号： G01Q60/58 , G01Q30/04
CPC分类号： G01Q60/58 , G01Q30/04
摘要： A system and method for automatic analysis of temperature transition data over an area of a sample surface 8. The system relies on the use of a microf abricated probe, 4, which can be rapidly heated and cooled 22 and has a sharp tip 6 to provide high spatial resolution. The system also has fast x- y-z positioners, 18, 20, data collection 29, 30, and algorithms that allow automatic analysis of and visualization 32 of temperature transition data.
摘要翻译：用于自动分析样品表面区域上的温度转变数据的系统和方法8.该系统依赖于使用微型打磨探头4，其可以被快速加热和冷却22并且具有尖锐的尖端6以提供高空间分辨率。该系统还具有快速的x-y-z定位器，18,20，数据采集29,30和允许温度转换数据的自动分析和可视化32的算法。

4. 发明申请

WO2008143817A1 HIGH FREQUENCY DEFLECTION MEASUREMENT OF IR ABSORPTION 审中-公开
标题翻译：红外吸收的高频偏差测量
公开(公告)号：WO2008143817A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/006051
申请日：2008-05-13
申请人： ANASYS INSTRUMENTS , DAZZI, A. , READING, Michael , RUI, Prazeres , KJOLLER, Kevin
发明人： DAZZI, A. , READING, Michael , RUI, Prazeres , KJOLLER, Kevin
IPC分类号： G01J3/30
CPC分类号： G01Q60/38 , G01N21/35 , G01N21/3563 , G01Q30/02 , G01Q60/32
摘要： An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
摘要翻译：已经证明了基于AFM的技术用于在样品表面上进行高度局部化的IR光谱。在商业可行的分析仪器中实施的这种技术将是非常有用的。必须改变实验设置的各个方面，以创建商业版本。本发明解决了许多这些问题，从而产生了一般可用于科学界的分析技术的版本。

5. 发明申请

WO2018080868A1 METHOD AND APPARATUS FOR CHEMICAL IMAGING ATOMIC FORCE MICROSCOPE INFRARED SPECTROSCOPY 审中-公开
标题翻译：用于化学成像原子力显微镜红外光谱学的方法和设备
公开(公告)号：WO2018080868A1
公开(公告)日：2018-05-03
申请号：PCT/US2017/057171
申请日：2017-10-18
申请人： ANASYS INSTRUMENTS
发明人： KJOLLER, Kevin , PRATER, Craig
IPC分类号： G01Q30/02 , G01Q60/32 , G01N21/3563
摘要： Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.
摘要翻译：用于获得空间分辨率低至几纳米的极高灵敏度化学成分图的方法和设备。在一些实施例中，使用三种技术的组合来创建这些化学成分图：（1）用调制到样品中的吸收带的IR辐射照射样品; （2）优化调整到特定目标材料的机械耦合效率; （3）优化调谐到特定目标材料的谐振检测。通过这些步骤的组合，可以获得（1）基于独特的IR吸收的化学成分图; （2）极端短距尖端样品相互作用增强的空间分辨率; 和（3）调谐到特定目标材料的谐振放大。在其他实施例中，可以利用这些步骤中的任何两个并且仍然实现空间分辨率和/或灵敏度的实质性改进。

6. 发明申请

WO2018102470A1 METHOD AND APPARATUS FOR CHEMICAL IMAGING ATOMIC FORCE MICROSCOPE INFRARED SPECTROSCOPY 审中-公开
公开(公告)号：WO2018102470A1
公开(公告)日：2018-06-07
申请号：PCT/US2017/063810
申请日：2017-11-29
申请人： ANASYS INSTRUMENTS CORPORATION
发明人： PRATER, Craig , KJOLLER, Kevin , SHETTY, Roshan
IPC分类号： G01N21/47 , B82Y35/00
摘要： Methods and apparatus for performing spectroscopy from the scale of nanometers to millimeters and imaging techniques including atomic force microscopy, infrared spectroscopy, confocal microscopy, Raman spectroscopy and mass spectrometry. For infrared spectroscopy, a sample is illuminated with infrared light and the resulting sample distortion is read out with either a focused UV/visible light beam and/or AFM tip. The combination of both techniques provides a rapid and large area survey scan with the UV /visible light and a high resolution measurement with the AFM tip. The methods and apparatus also include the ability to analyze light reflected/scattered from the sample via a Raman spectrometer for complementary analysis by Raman spectroscopy.

7. 发明申请

WO2018102467A1 METHOD AND APPARATUS FOR ENHANCED PHOTO-THERMAL IMAGING AND SPECTROSCOPY 审中-公开
公开(公告)号：WO2018102467A1
公开(公告)日：2018-06-07
申请号：PCT/US2017/063807
申请日：2017-11-29
申请人： ANASYS INSTRUMENTS CORPORATION
发明人： PRATER, Craig , KJOLLER, Kevin , SHETTY, Roshan
IPC分类号： G01J3/02 , G01J3/42 , G01N21/65 , G01J3/427 , G01J3/44
摘要： System for performing chemical spectroscopy on samples from the scale of nanometers to millimeters or more with a multifunctional platform combining analytical and imaging techniques including dual beam photo-thermal spectroscopy with confocal microscopy, Raman spectroscopy, fluorescence detection, various vacuum analytical techniques and/or mass spectrometry. In embodiments described herein, the light beams of a dual-beam system are used for heating and sensing.

8. 发明申请

WO2007015719A2 PROBE WITH EMBEDDED HEATER FOR NANOSCALE ANALYSIS 审中-公开
标题翻译：具有嵌入式加热器的探针用于纳米分析
公开(公告)号：WO2007015719A2
公开(公告)日：2007-02-08
申请号：PCT/US2006/014514
申请日：2006-04-18
申请人： ANASYS INSTRUMENTS CORPORATION
IPC分类号： G01B5/28
CPC分类号： G01Q60/58 , G01Q70/10 , G01Q70/14
摘要： The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever 1 with a sharp probe tip (2) of a type used in Scanning Probe Microscopes (SPM' s) which further includes an integral resistive heating element (4). The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.
摘要翻译：本发明是适用于微热分析或其他高分辨率热测量和动作的加热热探针。在优选实施例中，探针是具有用于扫描探针显微镜（SPM）中类型的尖锐探针尖端（2）的微制造悬臂1，其还包括整体电阻加热元件（4）。加热元件通过用离子注入工艺掺杂悬臂的区域形成，以形成较低的电阻连接和较高电阻的加热元件。在探针尖端的基部和加热元件或导体之间没有空间重叠。

9. 发明申请

WO2006107991A2 METHOD AND APPARATUS FOR LOCALIZED INFRARED SPECTROSCOPY AND MICRO-TOMOGRAPHY USING A COMBINATION OF THERMAL EXPANSION AND TEMPERATURE CHANGE MEASUREMENTS 审中-公开
标题翻译：使用热膨胀和温度变化测量的组合的本地化红外光谱和微观图谱的方法和装置
公开(公告)号：WO2006107991A2
公开(公告)日：2006-10-12
申请号：PCT/US2006/012537
申请日：2006-04-05
申请人： ANASYS INSTRUMENTS , READING, Michael
发明人： READING, Michael
IPC分类号： G01K1/16
CPC分类号： G01Q60/58 , G01N25/4833 , G01Q30/02
摘要： A method and a system for generating a high spatial resolution multi-dimensional image representing the chemical composition of a sample. Highly localized IR light is used to cause the heating and thermal expansion of the sample. Modulating this IR light will cause diis effect to take place at various depths of the material. The method and system of the present invention are used to generate a chemical profile of the sample using a combination of: (i) measurements of the diermal expansion and temperature change caused by absorbing IR radiation together; and (ii) measurements of die thermal expansion properties and thermal properties (such as diermal diffusivity and conductivity) of sites on the surface of die sample and the material surrounding it.
摘要翻译：一种用于产生表示样品的化学组成的高空间分辨率多维图像的方法和系统。高度局部化的红外光被用于引起样品的加热和热膨胀。调制这种红外光将导致二次效应发生在材料的各种深度。本发明的方法和系统用于使用以下组合来产生样品的化学特性：（i）通过一起吸收IR辐射引起的皮肤膨胀和温度变化的测量; 和（ii）模具样品表面和周围材料的模具热膨胀性能和热性能（如皮肤扩散性和导电性）的测量。

10. 发明公开

EP3176589A1 METHOD AND APPARATUS FOR INFRARED SCATTERING SCANNING NEAR-FIELD OPTICAL MICROSCOPY WITH BACKGROUND SUPPRESSION 审中-公开
标题翻译：维多利亚
公开(公告)号：EP3176589A1
公开(公告)日：2017-06-07
申请号：EP16201259.5
申请日：2016-11-29
申请人： Anasys Instruments
发明人： Yang, Honghua , Prater, Craig
IPC分类号： G01Q20/02 , G01Q60/06
CPC分类号： G01Q30/025 , G01Q20/02 , G01Q60/06
摘要： System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.
摘要翻译：用于测量样品的亚微米区域的光学性质的系统和方法，包括将探针显微镜的探针尖端与样品的区域相互作用，用来自辐射源的光束照射样品，使得光从所述探针 - 样本相互作用区域，使参考光束与所述参考光束具有可调节的光学相位的参考光束相互干扰，所述参考光束具有可调节的光学相位，用检测器测量在基本恒定的参考相位处从探针样本和背景区域散射的光的至少一部分并且构建表示样品的光学特性的信号，其中基本上抑制了来自背景散射光的贡献。

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