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1. 发明专利

JP2010010650A Device and method of processing substrate 有权
标题翻译：设备和处理基板的方法
公开(公告)号：JP2010010650A
公开(公告)日：2010-01-14
申请号：JP2009000619
申请日：2009-01-06
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： KO YOUNG BAE
IPC分类号： H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a device and method for processing a substrate capable of detecting a step end point.
SOLUTION: A substrate processing device is constituted by a chamber (10) providing an internal space in which a substrate is located, a plasma generation unit for generating plasma in the internal space to perform a step of the substrate, and an end point detection unit for detecting a step end point. The end point detection unit includes a light acceptor for accepting light generated from plasma and an up and down unit that descends and ascends one end of the light acceptor into which light flows.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于处理能够检测步骤终点的基板的装置和方法。解决方案：基板处理装置由提供基板所在的内部空间的室（10）构成，用于在内部空间中产生等离子体以执行基板的台阶的等离子体产生单元，以及端部点检测单元，用于检测步骤终点。端点检测单元包括用于接收从等离子体产生的光的光接收器和向上和向下移动光接收器的一端的上下单元。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2009267356A Substrate processing apparatus and method of opening/closing process space inside substrate processing apparatus 有权
标题翻译：基板加工装置及底板加工装置中开封/封闭工艺空间的方法
公开(公告)号：JP2009267356A
公开(公告)日：2009-11-12
申请号：JP2009000134
申请日：2009-01-05
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： HAN MYUNG WOO
IPC分类号： H01L21/02
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a method of opening/closing a process space inside the substrate processing apparatus that utilizes a simple opening/closing system.
SOLUTION: The substrate processing apparatus includes a lower chamber 61, an upper chamber 62 arranged at the upper part of the lower chamber 61 during a process and which internally forms a process space hermetically sealed from outside in cooperation with the lower chamber 61, guide rails 201, 202 arranged on one side of the lower chamber 61, a movable rail 204 coupled with the guide rails 201, 202 and which moves along the guide rails 201, 202, and opening/closing apparatuses 63, 64 provided on the movable rail 204, linked with the upper chamber 62, and which open/close the upper chamber 62.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种利用简单的开/闭系统的基板处理装置内部的处理空间的打开/关闭的基板处理装置和方法。解决方案：基板处理装置包括下部室61，在下部室61的上部设置的上部室62，并且与下部室61配合，内部形成与外部密封的工艺空间布置在下室61的一侧的导轨201,202，与导轨201,202结合并且沿着导轨201,202以及设置在导轨201,202上的开闭装置63,64移动的活动导轨204。活动导轨204，与上部室62连接，并且打开/关闭上部室62.版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2010135495A Substrate processing apparatus 有权
标题翻译：基板加工设备
公开(公告)号：JP2010135495A
公开(公告)日：2010-06-17
申请号：JP2008308775
申请日：2008-12-03
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： JO CHEOL RAE , PARK JANG-WAN , JEONG WON KI
IPC分类号： H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing apparatus having a reduced footprint by optimizing the position of a gate valve formed at a loadlock chamber and arrangement of a substrate transfer robot by the position.
SOLUTION: The substrate processing apparatus include a first transfer chamber, a first cluster comprising a first loadlock chamber and a first process chamber which are disposed at a side part of the first transfer chamber, a second transfer chamber, a seconod cluster comprising a second loadlock chamber and a second process chamber which are disposed at a side part of the second transfer chamber, a cassette where substrates are stacked, and the substrate transfer robot for exchanging substrates among the first loadlock chamber, second loadlock chamber, and cassette, and the substrate processing apparatus is equipped with a first gate valve and a second gate valve at sides of the first loadlock chamber and second loadlock chamber respectively, those first gate valve and second gate valve are installed opposite each other.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：通过优化形成在负载锁定室的闸阀的位置和通过位置的基板传送机器人的布置来提供具有减小的占地面积的基板处理装置。解决方案：基板处理装置包括第一传送室，包括设置在第一传送室的侧部的第一负载锁定室和第一处理室的第一簇，第二传输室，二次簇，包括设置在第二传送室的侧部的第二负载锁定室和第二处理室，堆叠基板的盒，以及用于在第一负载锁定室，第二负载锁定室和盒中更换基板的基板传送机器人，并且基板处理装置分别在第一负载锁定室和第二负载锁定室的侧面配备有第一闸阀和第二闸阀，那些第一闸阀和第二闸阀彼此相对地安装。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010135448A Sensing unit and substrate processing apparatus having same 有权
标题翻译：传感单元和基板处理装置
公开(公告)号：JP2010135448A
公开(公告)日：2010-06-17
申请号：JP2008308089
申请日：2008-12-03
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： JEONG WON KI
IPC分类号： H01L21/31 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a sensing unit capable of accurately measuring the temperature of an injection plate, and to provide a substrate processing apparatus having the sensing unit.
SOLUTION: The substrate processing apparatus includes: a chamber providing a process space wherein processes on a substrate are carried out; a support plate which is provided in the chamber and where the substrate is placed; a shower head having a body provided above the support plate and having its bottom made open and the injection plate coupled to the bottom of the body to supply a source gas to above the support plate; and the sensing unit having a sensor having one end brought into contact with an upper surface of the injection plate and an elastic member applying the sensor with elastic force toward the injection plate.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够精确测量注射板的温度的感测单元，并提供具有感测单元的基板处理装置。基板处理装置包括：提供处理空间的室，其中进行基板上的处理; 支撑板，其设置在所述室中并且所述基板被放置; 淋浴头，其具有设置在支撑板上方并且其底部打开的主体，并且注射板联接到主体的底部以将源气体供应到支撑板上方; 并且所述感测单元具有一端与所述注射板的上表面接触的传感器，以及弹性部件，所述弹性部件以弹性力朝向所述注射板施加所述传感器。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2010126342A Substrate chuck and substrate fusion device having the same 审中-公开
标题翻译：具有该基板的基板和基板熔断器件
公开(公告)号：JP2010126342A
公开(公告)日：2010-06-10
申请号：JP2008305812
申请日：2008-12-01
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： HWANG JAE SEOK , HWANGBO SUNG KWON
IPC分类号： B65G49/06 , G02F1/13 , G02F1/1339 , G09F9/00 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a substrate chuck and a substrate fusion device having the same, capable of depositing and removing the substrate at low costs using an adhesive rubber and easily performing maintenance/repairing using the adhesive rubber in a simple structure. SOLUTION: The substrate fusion device includes surface plates (110, 210) stably adhered with the substrates (S1, S2); the adhesive rubber (127) for fixing the substrate stably adhered to the surface plate using an adhesion force; and an adhesion release device for inducing the force in an opposite direction to the adhesion force such that the substrate is removed from the adhesive rubber (127). COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决问题的方案为了提供一种能够以低成本使用粘合橡胶沉积和去除基板的基板卡盘和基板熔合装置，并且以简单的结构容易地进行使用粘合橡胶的维护/修理。解决方案：基板熔接装置包括与基板（S1，S2）稳定粘合的表面板（110,210）。用于使用粘合力将基板固定牢固地固定到表面板上的粘合橡胶（127）以及用于在与粘合力相反的方向上引起力的粘合释放装置，使得基底从粘合橡胶（127）移除。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2010016342A Lift pin module of flat panel display element manufacturing device 审中-公开
标题翻译：平板显示元件制造设备的引脚模块
公开(公告)号：JP2010016342A
公开(公告)日：2010-01-21
申请号：JP2009015001
申请日：2009-01-27
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： YOO HAE YOUNG
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a lift pin module of a flat panel display element manufacturing device. SOLUTION: The lift pin module of the flat display element manufacturing device, which is elevated and lowered by an elevation plate in the flat panel display element manufacturing device to support a substrate, includes a lift pin which is elevated and lowered through a lower wall of a chamber to support the substrate placed in the chamber, an enclosing member which encloses the lift pin, an upper connecting member which connects the lower wall of the chamber to an upper end of the enclosing member, a lower connecting member which connects a lower end of the enclosing member to an upper end of the elevation plate, and an elastic member disposed outside the enclosing member. The elastic member influenced by a process gas is disposed outside the flat plate display element manufacturing device to be prevented from corroding, and further not coated with an anticorrosive film to save the cost, and the lift pin and elastic member are placed in individual spaces to be prevented from being rubbed against each other. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种平板显示元件制造装置的提升销模块。解决方案：平板显示元件制造装置的升降销组件通过平板显示元件制造装置中的升降板升高和降低以支撑基板，包括升降销，其通过一个升降销升高和降低室的下壁以支撑放置在腔室中的基底，封闭提升销的封闭构件，将腔室的下壁连接到封闭构件的上端的上连接构件，连接封闭构件的下端到达升降板的上端，以及设置在封闭构件外部的弹性构件。由处理气体影响的弹性构件设置在平板显示元件制造装置的外侧以防止腐蚀，并且进一步不涂覆防腐蚀膜以节省成本，并且提升销和弹性构件被放置在单独的空间中防止彼此摩擦。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2010016340A Method of sensing substrate, device for processing substrate, and method of processing substrate 审中-公开
标题翻译：传感衬底的方法，用于处理衬底的器件和处理衬底的方法
公开(公告)号：JP2010016340A
公开(公告)日：2010-01-21
申请号：JP2009000618
申请日：2009-01-06
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： KIM GYEONG-HOON , PARK HEE JEONG , LEE CHUNG-SUN
IPC分类号： H01L21/67 , G02F1/13 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a method of sensing a substrate capable of speedy and exact assessment of the state of a substrate. SOLUTION: The method of sensing the substrate is configured to include a step of receiving sensed data on one side of a substrate from a sensor and a step of assessing the state of the substrate from the sensed data. The step of receiving sensed data includes: a step of displacing either one of the substrate and the sensor and providing an optical signal emitted to the one side of the substrate; and a step of receiving the optical signal that has passed through the substrate. Further, the step of assessing the state of the substrate includes a step of comparing the number of pieces of sensed data with the number of receivable pieces of reference data on the one side of the substrate to assess lost data. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种感测能够快速且准确地评估衬底状态的衬底的方法。感测基板的方法被配置为包括从传感器在基板的一侧接收感测数据的步骤，以及从感测数据评估基板的状态的步骤。接收感测数据的步骤包括：移动衬底和传感器中的任一个并提供发射到衬底的一侧的光信号的步骤; 以及接收已经通过基板的光信号的步骤。此外，评估基板的状态的步骤包括将感测数据的数量与基板的一侧上的可接收的参考数据的数量进行比较以评估丢失的数据的步骤。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2009294638A Substrate-attaching device {apparatus for attaching substrates} 有权
标题翻译：基板连接装置{用于连接基板的装置}
公开(公告)号：JP2009294638A
公开(公告)日：2009-12-17
申请号：JP2009015004
申请日：2009-01-27
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： HWANG JAE SEOK
IPC分类号： G02F1/1339 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To provide a substrate-attaching device which easily attaches and detaches a substrate.
SOLUTION: The substrate-attaching device is composed of: an upper chamber; a lower chamber which contacts with the upper chamber to form an attachment space; a plate-shaped upper surface plate which is arranged on the lower surface of the upper chamber; a plurality of substrate chucks which are distributively arranged on the lower surface of the upper surface plate and attach the substrate to fix the substrate; and a substrate-separating unit which is arranged adjacent to the substrate chucks and separates the substrate from the substrate chucks. In this case, the individually composed substrate-separating unit thoroughly removes the substrate from the substrate chucks, and consequently the substrate is prevented from being damaged and the arrangement state of the substrate is maintained.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种容易地附着和分离衬底的衬底附着装置。解决方案：基板安装装置包括：上室; 下室，其与所述上室接触以形成附接空间; 布置在上室的下表面上的板状上表面板; 多个基板卡盘，其分布地布置在上表面板的下表面上并附着基板以固定基板; 以及基板分离单元，其布置成与基板卡盘相邻并且将基板与基板卡盘分离。在这种情况下，单独组成的基板分离单元从基板卡盘彻底地移除基板，从而防止基板受损，并且保持基板的布置状态。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2009260241A Cluster device for substrate treatment, and substrate treatment method of cluster device 有权
标题翻译：用于基板处理的集群装置以及集群装置的基板处理方法
公开(公告)号：JP2009260241A
公开(公告)日：2009-11-05
申请号：JP2008305814
申请日：2008-12-01
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： HWANG YOUNG JOO
IPC分类号： H01L21/677
CPC分类号： H01L21/67201 , H01L21/68742 , H01L21/6875
摘要： PROBLEM TO BE SOLVED: To provide a cluster device for substrate treatment having a narrow installation area.
SOLUTION: This cluster device for substrate treatment includes: a load lock chamber supplied with a substrate from the outside to temporarily storing the substrate; a transport chamber in contact with the load lock chamber; a plurality of process chambers having one-side surfaces contacting the transport chamber; a transport robot arranged in the transport chamber, and extracting/storing the substrate from/in the plurality of process chambers and the load lock chamber; and a rotary stage arranged in the load lock chamber and rotatably supporting the substrate.
COPYRIGHT: (C)2010,JPO&INPIT

10. 发明专利

JP2010175584A Substrate bonding apparatus 有权
标题翻译：基板连接装置
公开(公告)号：JP2010175584A
公开(公告)日：2010-08-12
申请号：JP2009015003
申请日：2009-01-27
申请人： Advanced Display Process Engineering Co Ltd , アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド
发明人： SHIM SEOK HEE
IPC分类号： G09F9/00 , G02F1/1339
摘要： PROBLEM TO BE SOLVED: To provide a substrate bonding apparatus configured so as to shorten vacuum exhaust time in an inside space between an upper chamber and a lower chamber when bonding substrates to each other.
SOLUTION: The substrate bonding apparatus includes: the upper chamber; the lower chamber forming a bonding space in contact with the upper chamber; an upper chuck which is arranged under the upper chamber and to which a first substrate is stuck; a lower chuck which is combined with the upper surface of the lower chamber and formed integrally with the lower chamber and to which a second substrate is stuck; a position control means arranged above the upper chamber to control the position of the first substrate; and an exhaust part arranged above the upper chamber to provide vacuum pressure between the bonding space.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种基板接合装置，其构造成在将基板彼此接合时缩短上部室和下部室之间的内部空间中的真空排气时间。解决方案：基板接合装置包括：上室; 所述下室形成与所述上室接触的粘合空间; 上卡盘，其布置在所述上室下方并且第一基板卡其上; 下卡盘，其与下室的上表面组合并与下室一体形成，并且第二基板被卡住; 位置控制装置，其布置在所述上室上方，以控制所述第一基板的位置; 以及设置在上部室上方的排气部，以在接合空间之间提供真空压力。版权所有（C）2010，JPO＆INPIT

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