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1. 发明授权

US08086021B2 Appearance inspection apparatus with scanning electron microscope and image data processing method using scanning electron microscope 有权
标题翻译：具有扫描电子显微镜的外观检查装置和使用扫描电子显微镜的图像数据处理方法
公开(公告)号：US08086021B2
公开(公告)日：2011-12-27
申请号：US12367695
申请日：2009-02-09
申请人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
发明人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
IPC分类号： G06K9/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/221 , H01J2237/24495 , H01J2237/2485 , H01J2237/2817
摘要： The present invention provides an appearance inspection apparatus that allows a user to give precedence to either defect detection performance or throughput. The appearance inspection apparatus allows a user to select the frequency of a digital image signal or the ratio of the frequency of the digital image signal to a sampling rate. Further, a user is allowed to select either throughput improvement or S/N improvement to prioritize.
摘要翻译：本发明提供了一种外观检查装置，其允许用户优先考虑缺陷检测性能或吞吐量。外观检查装置允许用户选择数字图像信号的频率或数字图像信号的频率与采样率的比率。此外，允许用户选择吞吐量提高或S / N改善以优先化。

2. 发明授权

US08086022B2 Electron beam inspection system and an image generation method for an electron beam inspection system 失效
标题翻译：电子束检查系统和电子束检查系统的图像生成方法
公开(公告)号：US08086022B2
公开(公告)日：2011-12-27
申请号：US12179272
申请日：2008-07-24
申请人： Hiroshi Miyai , Yusuke Ominami , Yasuhiro Gunji
发明人： Hiroshi Miyai , Yusuke Ominami , Yasuhiro Gunji
IPC分类号： G06K9/00 , G06K9/40 , G01N23/00
CPC分类号： G01N23/225 , H01J37/222 , H01J37/28 , H01J2237/24495 , H01J2237/2487 , H01J2237/2817
摘要： An inspection system uses a scanning electron microscope that detects a high-precision electron beam image, and at the same time removes restrictions for a low sampling rate. A sampled signal is obtained by sampling an analog brightness signal generated by a secondary electron detector at a predetermined sampling rate, and contiguous digital values contained in the sampled signal are added on an N by N digital value basis to generate a digital brightness signal whose frequency is equal to 1/N of the sampling frequency. Each, digital value contained in the digital brightness signal is divided by N to generate a digital signal made of digital values having a number of bits equal to that of the sampled signal and to generate an image signal in which each digital value of the digital signal forms one pixel data.
摘要翻译：检查系统使用检测高精度电子束图像的扫描电子显微镜，同时消除对低采样率的限制。通过以预定的采样率对由二次电子检测器产生的模拟亮度信号进行采样来获得采样信号，并且以N×N数值为基础相加在采样信号中包含的连续数字值，以产生数字亮度信号，其频率等于采样频率的1 / N。将包含在数字亮度信号中的每个数字值除以N，以产生由具有与采样信号的位数相等的位数的数字值构成的数字信号，并产生其中数字信号的每个数字值形成一个像素数据。

3. 发明申请

US20090208092A1 APPERANCE INSPECTION APPARATUS WITH SCANNING ELECTRON MICROSCOPE AND IMAGE DATA PROCESSING METHOD USING SCANNING ELECTRON MICROSCOPE 有权
标题翻译：使用扫描电子显微镜扫描电子显微镜和图像数据处理方法的检查装置
公开(公告)号：US20090208092A1
公开(公告)日：2009-08-20
申请号：US12367695
申请日：2009-02-09
申请人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
发明人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
IPC分类号： G06K9/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/221 , H01J2237/24495 , H01J2237/2485 , H01J2237/2817
摘要： The present invention provides an appearance inspection apparatus that allows a user to give precedence to either defect detection performance or throughput. The appearance inspection apparatus allows a user to select the frequency of a digital image signal or the ratio of the frequency of the digital image signal to a sampling rate. Further, a user is allowed to select either throughput improvement or S/N improvement to prioritize.
摘要翻译：本发明提供了一种外观检查装置，其允许用户优先考虑缺陷检测性能或吞吐量。外观检查装置允许用户选择数字图像信号的频率或数字图像信号的频率与采样率的比率。此外，允许用户选择吞吐量提高或S / N改善以优先化。

4. 发明申请

US20120091339A1 CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARGED-PARTICLE BEAMS 审中-公开
标题翻译：充电颗粒显微镜装置和控制带电粒子的方法
公开(公告)号：US20120091339A1
公开(公告)日：2012-04-19
申请号：US13378561
申请日：2010-06-15
申请人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
发明人： Yusuke Ominami , Hiroshi Miyai , Yasuhiro Gunji
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J2237/004 , H01J2237/24564 , H01J2237/24592
摘要： A charged-particle microscope device and a method of controlling charged-particle beams are provided, which are capable of signal detection at the time when the charged state of an observation sample or a defect portion becomes optimum. Charge accumulation-waiting time T from an initial irradiation with an electron beam 21 for enhancing charge accumulation on an observation sample 100 until a next irradiation with the electron beam 21 for sample observation is set depending on the state of the observation sample 100 or a defect portion 112 generated on the observation sample 100. The irradiation with the electron beam 21 for enhancing charge accumulation and the irradiation with the electron beam 21 for sample observation are performed on the observation sample 100 on the basis of the charge accumulation-waiting time T.
摘要翻译：提供带电粒子显微镜装置和控制带电粒子束的方法，其能够在观察样品或缺陷部分的充电状态变为最佳时进行信号检测。根据观察样品100的状态或缺陷来设定用于增强观察样品100上的电荷累积的电子束21的电荷累积等待时间T，直到下一次照射用于样本观察的电子束21为止在观察样本100上产生的电子束21的照射。基于电荷累积等待时间T，对观察样品100进行用于增强电荷积聚的电子束21的照射和用于样本观察的电子束21的照射。

5. 发明申请

US20090026369A1 Electron Beam Inspection System and an Image Generation Method for an Electron Beam Inspection System 失效
标题翻译：电子束检测系统和电子束检测系统的图像生成方法
公开(公告)号：US20090026369A1
公开(公告)日：2009-01-29
申请号：US12179272
申请日：2008-07-24
申请人： Hiroshi MIYAI , Yusuke Ominami , Yasuhiro Gunji
发明人： Hiroshi MIYAI , Yusuke Ominami , Yasuhiro Gunji
IPC分类号： G21K1/00 , G01N23/00
CPC分类号： G01N23/225 , H01J37/222 , H01J37/28 , H01J2237/24495 , H01J2237/2487 , H01J2237/2817
摘要： An object of the present invention is to provide an inspection system using a scanning electron microscope that detects a high-precision electron beam image and at the same time, removes restrictions for a low sampling rate, which presents a problem at this point, of an AD converter element and an inspection method.To achieve the object, an embodiment of the present invention is constructed so that a sampled signal is obtained by sampling an analog brightness signal generated by a secondary electron detector at a predetermined sampling rate, contiguous digital values contained in the sampled signal are added on a N by N digital value basis to generate a digital brightness signal whose frequency is equal to 1/N of the sampling frequency, and each digital value contained in the digital brightness signal is divided by N to generate a digital signal made of digital values having a number of bits equal to that of the sampled signal and to generate an image signal in which each digital value of the digital signal forms one pixel data.
摘要翻译：本发明的目的是提供一种使用扫描电子显微镜检测高精度电子束图像的检查系统，并且同时消除了在这一点上出现问题的低采样率的限制 AD转换器元件和检查方法。为了实现该目的，本发明的一个实施例被构造成使得通过以预定采样率对由二次电子检测器产生的模拟亮度信号进行采样来获得采样信号，将包含在采样信号中的连续数字值加到以N数字值为基础产生频率等于采样频率的1 / N的数字亮度信号，并且将包含在数字亮度信号中的每个数字值除以N，以产生由具有位数等于采样信号的位数，并产生其中数字信号的每个数字值形成一个像素数据的图像信号。

6. 发明申请

US20100314542A1 SEMICONDUCTOR DEVICE INSPECTION APPARATUS 失效
标题翻译：半导体器件检测装置
公开(公告)号：US20100314542A1
公开(公告)日：2010-12-16
申请号：US12860363
申请日：2010-08-20
申请人： Yusuke OMINAMI , Yasuhiro Gunji , Yoshiyuki Shichida
发明人： Yusuke OMINAMI , Yasuhiro Gunji , Yoshiyuki Shichida
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： G01R31/307
摘要： A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
摘要翻译：具有噪声减除功能的半导体器件检查装置包括电子枪，用于保持样品的级，用于检测从样品放出的信号的主检测器，以及用于检测从样品产生的噪声的至少一个或多个副检测器，装置，从而可以获得其中从样品或装置中产生的放电引起的噪声从信号中去除的图像。噪声减除函数从主检测器检测到的信号中减去由副检测器检测到的噪声，以消除或降低信号中的噪声。

7. 发明申请

US20080308725A1 SEMICONDUCTOR DEVICE INSPECTION APPARATUS 失效
标题翻译：半导体器件检测装置
公开(公告)号：US20080308725A1
公开(公告)日：2008-12-18
申请号：US12132361
申请日：2008-06-03
申请人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
发明人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
IPC分类号： G01N23/00
CPC分类号： G01R31/307
摘要： A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
摘要翻译：具有噪声减除功能的半导体器件检查装置包括电子枪，用于保持样品的级，用于检测从样品放出的信号的主检测器，以及用于检测从样品产生的噪声的至少一个或多个副检测器，装置，从而可以获得其中从样品或装置中产生的放电引起的噪声从信号中去除的图像。噪声减除函数从主检测器检测到的信号中减去由副检测器检测到的噪声，以消除或降低信号中的噪声。

8. 发明授权

US08242443B2 Semiconductor device inspection apparatus 失效
标题翻译：半导体装置检查装置
公开(公告)号：US08242443B2
公开(公告)日：2012-08-14
申请号：US12860363
申请日：2010-08-20
申请人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
发明人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
IPC分类号： H01J37/26 , H01J37/244
CPC分类号： G01R31/307
摘要： A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
摘要翻译：具有噪声减除功能的半导体器件检查装置包括电子枪，用于保持样品的级，用于检测从样品放出的信号的主检测器，以及用于检测从样品产生的噪声的至少一个或多个副检测器，装置，从而可以获得其中从样品或装置中产生的放电引起的噪声从信号中去除的图像。噪声减除函数从主检测器检测到的信号中减去由副检测器检测到的噪声，以消除或降低信号中的噪声。

9. 发明授权

US07838828B2 Semiconductor device inspection apparatus 失效
标题翻译：半导体装置检查装置
公开(公告)号：US07838828B2
公开(公告)日：2010-11-23
申请号：US12132361
申请日：2008-06-03
申请人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
发明人： Yusuke Ominami , Yasuhiro Gunji , Yoshiyuki Shichida
IPC分类号： H01J37/153 , H01J37/073 , G01N23/00
CPC分类号： G01R31/307
摘要： A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.
摘要翻译：具有噪声减除功能的半导体器件检查装置包括电子枪，用于保持样品的级，用于检测从样品放出的信号的主检测器，以及用于检测从样品产生的噪声的至少一个或多个副检测器，装置，从而可以获得其中从样品或装置中产生的放电引起的噪声从信号中去除的图像。噪声减除函数从主检测器检测到的信号中减去由副检测器检测到的噪声，以消除或降低信号中的噪声。

10. 发明授权

US07999565B2 Inspection apparatus and inspection method using electron beam 有权
标题翻译：使用电子束的检查装置和检查方法
公开(公告)号：US07999565B2
公开(公告)日：2011-08-16
申请号：US12348586
申请日：2009-01-05
申请人： Yasuhiro Gunji , Hiroshi Miyai , Shigeya Tanaka
发明人： Yasuhiro Gunji , Hiroshi Miyai , Shigeya Tanaka
IPC分类号： G01R31/305
CPC分类号： G01N23/203 , G01N23/2251 , G01N2223/3302 , H01J37/265 , H01J37/28 , H01J2237/2817
摘要： A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.
摘要翻译：公开了使用扫描电子显微镜的目视检查装置和方法。在样品上重复扫描电子束，并且由从样品或反射电子产生的二次电子产生检查和参考图像。根据检查图像与参考图像之间的差分图像，确定缺陷。可以改变沿电子束的重复扫描方向产生的图像中的像素数。

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