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1. 发明授权

US08244500B2 Method of adjusting wafer processing sequence 有权
标题翻译：调整晶圆加工顺序的方法
公开(公告)号：US08244500B2
公开(公告)日：2012-08-14
申请号：US12476559
申请日：2009-06-02
申请人： Yun-Zong Tian , Chun Chi Chen , Yi Feng Lee , Wei Jun Chen , Shih Chang Kao , Yij Chieh Chu , Cheng-Hao Chen
发明人： Yun-Zong Tian , Chun Chi Chen , Yi Feng Lee , Wei Jun Chen , Shih Chang Kao , Yij Chieh Chu , Cheng-Hao Chen
IPC分类号： G06F11/30 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32015 , G05B2219/32016 , G05B2219/32019 , G05B2219/45031 , Y02P90/20
摘要： A method of adjusting wafer process sequence includes steps of collecting production parameters for a plurality of lots; selecting a plurality of key parameters from the production parameters, wherein the key parameters at least includes a processing sequence; defining a formula to obtain an epsilon value; categorizing the lots into groups according to the epsilon value and the minimum point number by using density-based spatial clustering of application with noise (DBSCAN); and adjusting the processing sequences of the lots in the groups. Thereby, the lots with the same process recipe can be continuously or simultaneously sent into a machine, thereby reducing replacement of process recipes or shortening machine idle time.
摘要翻译：调整晶片工艺顺序的方法包括收集多个批次的生产参数的步骤; 从所述生产参数中选择多个关键参数，其中所述关键参数至少包括处理序列; 定义公式以获得ε值; 通过使用基于密度的噪声空间聚类（DBSCAN），根据ε值和最小点数将批次分组成组。并调整组中批次的处理顺序。因此，具有相同处理配方的批次可以连续或同时发送到机器中，从而减少过程配方的更换或缩短机器空闲时间。

2. 发明申请

US20100268501A1 Method for assessing data worth for analyzing yield rate 有权
标题翻译：评估数据价值分析收益率的方法
公开(公告)号：US20100268501A1
公开(公告)日：2010-10-21
申请号：US12458302
申请日：2009-07-08
申请人： Yij Chieh Chu , Chun Chi Chen , Yun-Zong Tian , Shih Chang Kao , Cheng-Hao Chen
发明人： Yij Chieh Chu , Chun Chi Chen , Yun-Zong Tian , Shih Chang Kao , Cheng-Hao Chen
IPC分类号： G06F19/00
CPC分类号： G05B23/0221
摘要： A method for assessing data worth for analyzing yield rate includes: getting measured data with data points that corresponds to control variables of semiconductor manufacturing; transforming the data points into a distance matrix with matrix distances corresponding to differences of the data points under the control variables; expressing sample differences recorded in the distance matrix by two-dimension vectors and calculating similarity degrees of the two-dimension vectors and the distance matrix so as to take loss information as a conversion error value; calculating discriminant ability of the transformed two-dimension data and expressing the discriminant ability by an error rate of discriminant; and taking the conversion error value and the error rate of discriminant as penalty terms and calculating a quality score corresponding to the measured data. Thereby, before analyzing the yield rate of semiconductor manufacturing, analysts can determine whether data includes information affecting the yield rate based on the quality score.
摘要翻译：评估价值分析产出率的数据的方法包括：用与半导体制造控制变量对应的数据点获取测量数据; 将数据点转换成距离矩阵，矩阵距离对应于控制变量下数据点的差; 通过二维向量表示记录在距离矩阵中的样本差异，并计算二维向量和距离矩阵的相似度，以便将损失信息作为转换误差值; 计算变换后的二维数据的判别能力，并用判别式的误差率表示判别能力; 并将判别式的转换误差值和误差率作为惩罚项，并计算与测量数据相对应的质量得分。因此，在分析半导体制造的成品率之前，分析人员可以根据质量得分确定数据是否包括影响产量率的信息。

3. 发明授权

US08265903B2 Method for assessing data worth for analyzing yield rate 有权
标题翻译：评估数据价值分析收益率的方法
公开(公告)号：US08265903B2
公开(公告)日：2012-09-11
申请号：US12458302
申请日：2009-07-08
申请人： Yij Chieh Chu , Chun Chi Chen , Yun-Zong Tian , Shih Chang Kao , Cheng-Hao Chen
发明人： Yij Chieh Chu , Chun Chi Chen , Yun-Zong Tian , Shih Chang Kao , Cheng-Hao Chen
IPC分类号： G06F17/16
CPC分类号： G05B23/0221
摘要： A method for assessing data worth for analyzing yield rate includes: getting measured data with data points that corresponds to control variables of semiconductor manufacturing; transforming the data points into a distance matrix with matrix distances corresponding to differences of the data points under the control variables; expressing sample differences recorded in the distance matrix by two-dimension vectors and calculating similarity degrees of the two-dimension vectors and the distance matrix so as to take loss information as a conversion error value; calculating discriminant ability of the transformed two-dimension data and expressing the discriminant ability by an error rate of discriminant; and taking the conversion error value and the error rate of discriminant as penalty terms and calculating a quality score corresponding to the measured data. Thereby, before analyzing the yield rate of semiconductor manufacturing, analysts can determine whether data includes information affecting the yield rate based on the quality score.
摘要翻译：评估价值分析产出率的数据的方法包括：用与半导体制造控制变量对应的数据点获取测量数据; 将数据点转换成距离矩阵，矩阵距离对应于控制变量下数据点的差; 通过二维向量表示记录在距离矩阵中的样本差异，并计算二维向量和距离矩阵的相似度，以便将损失信息作为转换误差值; 计算变换后的二维数据的判别能力，并用判别式的误差率表示判别能力; 并将判别式的转换误差值和误差率作为惩罚项，并计算与测量数据相对应的质量得分。因此，在分析半导体制造的成品率之前，分析人员可以根据质量得分确定数据是否包括影响产量率的信息。

4. 发明授权

US08332416B2 Specification establishing method for controlling semiconductor process 有权
标题翻译：半导体工艺控制规范建立方法
公开(公告)号：US08332416B2
公开(公告)日：2012-12-11
申请号：US13004236
申请日：2011-01-11
申请人： Cheng-Hao Chen , Yun-Zong Tian , Shih-Chang Kao , Yij Chieh Chu , Wei Jun Chen
发明人： Cheng-Hao Chen , Yun-Zong Tian , Shih-Chang Kao , Yij Chieh Chu , Wei Jun Chen
IPC分类号： G06F7/00 , G06F17/30
CPC分类号： G05B19/41865 , G05B2219/32201 , G05B2219/45031 , H01L22/20 , Y02P90/20 , Y02P90/22
摘要： A specification establishing method for controlling semiconductor process, the steps includes: sampling a plurality of sample groups from a population, each sample group being a non-normal distribution; filtering the sample groups; summarizing the filtered sample groups to form a non-normal distribution diagram; getting a value-at-risk and a median by calculating from the non-normal distribution diagram; getting a critical value by calculating the value-at-risk and the median with a critical formula; getting a plurality of state values by calculating the filtered sample groups with a proportion formula; and getting an index value by calculating the non-normal distribution diagram with the proportion formula. Thus, the state values indicate the states of the sample groups are abnormal or not by comparing the state values to the index value.
摘要翻译：一种用于控制半导体处理的规范建立方法，所述步骤包括：从群体中抽取多个样本组，每个样本组是非正态分布; 过滤样品组; 总结过滤样品组以形成非正态分布图; 通过从非正态分布图计算得到风险价值和中位数; 通过使用关键公式计算风险值和中位数来获得临界值; 通过以比例公式计算过滤的样本组来获得多个状态值; 并用比例公式计算非正态分布图，得到指标值。因此，通过将状态值与指标值进行比较，状态值表示样本组的状态异常。

5. 发明申请

US20110137595A1 YIELD LOSS PREDICTION METHOD AND ASSOCIATED COMPUTER READABLE MEDIUM 审中-公开
标题翻译：损伤预测方法及相关计算机可读介质
公开(公告)号：US20110137595A1
公开(公告)日：2011-06-09
申请号：US12725451
申请日：2010-03-16
申请人： Yij-Chieh Chu , Yun-Zong Tian , Shih-Chang Kao , Wei-Jun Chen , Cheng-Hao Chen
发明人： Yij-Chieh Chu , Yun-Zong Tian , Shih-Chang Kao , Wei-Jun Chen , Cheng-Hao Chen
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32194 , Y02P90/22 , Y02P90/86
摘要： A yield loss prediction method includes: performing a plurality of types of defect inspections upon a plurality of batches of wafers which begin to be processed during different periods to generate defect inspection data, respectively; for a specific batch of wafers different from the plurality of batches of wafers, calculating defect prediction data of at least one type of defect inspection according to the defect inspection data of at least the type of defect inspections; and predicting a yield loss of the specific batch of wafers according to at least the defect prediction data.
摘要翻译：屈服损失预测方法包括：对在多个批次的晶片进行多种类型的缺陷检查，所述多个批次的晶片分别在不同的周期内开始被处理以产生缺陷检查数据; 对于与所述多批晶片不同的特定批次的晶片，根据至少所述缺陷检查类型的缺陷检查数据计算至少一种类型的缺陷检查的缺陷预测数据; 并根据至少缺陷预测数据预测特定批次的晶片的屈服损失。

6. 发明申请

US20120206126A1 CAPACITIVE COUPLING BASED SENSOR 有权
标题翻译：基于电容耦合的传感器
公开(公告)号：US20120206126A1
公开(公告)日：2012-08-16
申请号：US13072578
申请日：2011-03-25
申请人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
发明人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
IPC分类号： G01R19/00
CPC分类号： H03K17/975 , H03K2217/960775
摘要： A capacitive coupling based sensor is disclosed. In some embodiments, a sensor comprises a transmitter and a receiver that are configured to be capacitively coupled when a coupling condition is satisfied as well as a circuit configured to determine whether a received signal that is received by the receiver matches a transmitted signal that is transmitted by the transmitter.
摘要翻译：公开了一种基于电容耦合的传感器。在一些实施例中，传感器包括发射机和接收机，其被配置为当满足耦合条件时被电容耦合，以及被配置为确定接收机接收的接收信号是否匹配发送的发送信号的电路由发射机。

7. 发明申请

US20080189095A1 METHOD AND TOOL FOR GENERATING SIMULATION CASE FOR IC DEVICE 有权
标题翻译：用于生成IC器件仿真案例的方法和工具
公开(公告)号：US20080189095A1
公开(公告)日：2008-08-07
申请号：US11935138
申请日：2007-11-05
申请人： Cheng-Hao Chen , Jo-Chieh Ma
发明人： Cheng-Hao Chen , Jo-Chieh Ma
IPC分类号： G06F17/50 , G06F17/30
CPC分类号： G06F17/5022 , G01R31/318357
摘要： For generating a simulation case to verify an operation of an IC device, a database including a plurality of device description files, a plurality of pattern files and a plurality of command files is established. Files stored in the database and corresponding to an IC device are collected. The collected files are parsed to find out entries to be edited. Specified entries are edited by a user according to the operation of the IC device. A simulation case or a plurality of simulation cases are generated according to the entries.
摘要翻译：为了生成用于验证IC设备的操作的仿真情况，建立了包括多个设备描述文件，多个模式文件和多个命令文件的数据库。存储在数据库中并对应于IC设备的文件被收集。解析收集的文件以找出要编辑的条目。指定的条目由用户根据IC设备的操作进行编辑。根据条目生成模拟情况或多个模拟情况。

8. 发明授权

US09178512B2 Capacitive coupling based sensor 有权
标题翻译：基于电容耦合的传感器
公开(公告)号：US09178512B2
公开(公告)日：2015-11-03
申请号：US13267853
申请日：2011-10-06
申请人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
发明人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
IPC分类号： G01R19/00 , G01R31/06 , H03K17/975
CPC分类号： H03K17/975 , H03K2217/960775
摘要： A capacitive coupling based sensor is disclosed. In some embodiments, a sensor comprises a transmitter and a receiver that are configured to be capacitively coupled when a coupling condition is satisfied as well as a circuit configured to determine whether a received signal that is received by the receiver matches a transmitted signal that is transmitted by the transmitter.
摘要翻译：公开了一种基于电容耦合的传感器。在一些实施例中，传感器包括发射机和接收机，其被配置为当满足耦合条件时被电容耦合，以及被配置为确定接收机接收的接收信号是否匹配发送的发送信号的电路由发射机。

9. 发明授权

US07949509B2 Method and tool for generating simulation case for IC device 有权
标题翻译：用于生成IC器件仿真案例的方法和工具
公开(公告)号：US07949509B2
公开(公告)日：2011-05-24
申请号：US11935138
申请日：2007-11-05
申请人： Cheng-Hao Chen , Jo-Chieh Ma
发明人： Cheng-Hao Chen , Jo-Chieh Ma
IPC分类号： G06F17/50
CPC分类号： G06F17/5022 , G01R31/318357
摘要： For generating a simulation case to verify an operation of an IC device, a database including a plurality of device description files, a plurality of pattern files and a plurality of command files is established. Files stored in the database and corresponding to an IC device are collected. The collected files are parsed to find out entries to be edited. Specified entries are edited by a user according to the operation of the IC device. A simulation case or a plurality of simulation cases are generated according to the entries.
摘要翻译：为了生成用于验证IC设备的操作的仿真情况，建立了包括多个设备描述文件，多个模式文件和多个命令文件的数据库。存储在数据库中并对应于IC设备的文件被收集。解析收集的文件以找出要编辑的条目。指定的条目由用户根据IC设备的操作进行编辑。根据条目生成模拟情况或多个模拟情况。

10. 发明授权

US08395370B2 Capacitive coupling based sensor 有权
公开(公告)号：US08395370B2
公开(公告)日：2013-03-12
申请号：US13072578
申请日：2011-03-25
申请人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
发明人： Jozef Froniewski , Jay Li , Cheng-Hao Chen , Yinn-Jang Wu
IPC分类号： G01R19/00 , G01R31/06
CPC分类号： H03K17/975 , H03K2217/960775
摘要： A capacitive coupling based sensor is disclosed. In some embodiments, a sensor comprises a transmitter and a receiver that are configured to be capacitively coupled when a coupling condition is satisfied as well as a circuit configured to determine whether a received signal that is received by the receiver matches a transmitted signal that is transmitted by the transmitter.

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