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    • 4. 发明申请
    • Coreless Seal and Rolling Bearing
    • 无芯密封和滚动轴承
    • US20090154854A1
    • 2009-06-18
    • US11991408
    • 2006-08-31
    • Hideki AkamatsuKenji Nakagawa
    • Hideki AkamatsuKenji Nakagawa
    • F16C33/76F16J15/32
    • F16C33/7809F16C19/466F16J15/32
    • A coreless seal 11 for being assembled in a shell-type roller bearing provided in a shell-type roller bearing comprises an elastic annular member 12. An outer diameter B of the coreless seal 11 for being assembled in the shell-type roller bearing is a dimension provided by adding interference 2A for an amount of thermal shrinkage to an inner diameter C of a shell-type outer ring. Since the annular member 12 shrinks in a direction shown by an arrow W at low temperature, the outer diameter of the coreless seal 11 for being assembled in the shell-type roller bearing is reduced from B to B′. However, since the outer diameter B is provided with the dimension A obtained by adding interference for an amount of thermal shrinkage, the coreless seal 11 for being assembled in the shell-type roller bearing has interference A′ in its outer diameter B′ even after the shrinkage.
    • 用于装配在壳型滚动轴承中的壳型滚子轴承中的无芯密封件11包括弹性环形构件12.用于组装在壳型滚动轴承中的无芯密封件11的外径B为 通过将壳体型外圈的内径C的热收缩量加上干涉2A来提供尺寸。 由于环状构件12在低温下以箭头W所示的方向收缩,因此组装在壳型滚子轴承中的无芯密封件11的外径从B减小到B'。 然而,由于外径B具有通过对热收缩量加上干涉而获得的尺寸A,所以组装在壳型滚动轴承中的无芯密封件11即使在其外径B'之后也具有干涉A' 收缩。
    • 7. 发明授权
    • Reticle with phase-shifters and a method of fabricating the same
    • 带移相器的标线片及其制造方法
    • US5514498A
    • 1996-05-07
    • US138002
    • 1993-10-19
    • Kenji Nakagawa
    • Kenji Nakagawa
    • G03F1/00G03F1/26G03F1/30G03F1/74G03F9/00
    • G03F1/30G03F1/26G03F1/74
    • A reticle and a method of fabricating the same for projecting a fine pattern on an object surface comprises: a transparent substrate; a first type phase-shifter selectively patterned and deposited on the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter; and a second type phase-shifter selectively patterned and forming a groove in the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter. The reticle may include a patterned shield layer which interrupts transmission of light, and the phase difference of the first and second type phase-shifters is many times selected substantially equal to a half wavelength of light. Another type of a reticle comprises: a transparent substrate; a phase-shifter of a first groove; and another phase-shifter of a second deeper groove formed in the first groove.
    • 掩模版及其制造方法,用于在物体表面上投影精细图案,包括:透明基板; 选择性地图案化并沉积在衬底上的第一类型移相器,其产生通过其中的光与通过其它区域的光之间的相位差,而没有移相器; 以及选择性地图案化并在衬底中形成凹槽的第二类型移相器,其产生穿过其中的光与通过其它区域的光之间的相位差,而没有移相器。 掩模版可以包括中断光的传输的图案化屏蔽层,并且第一和第二类型移相器的相位差被选择为基本上等于半波长的光的许多次。 掩模版的另一种类型包括:透明基板; 第一槽的移相器; 以及形成在第一凹槽中的第二深槽的另一个移相器。
    • 9. 发明授权
    • Reticle with phase-shifters and a method of fabricating the same
    • 带移相器的标线片及其制造方法
    • US5276551A
    • 1994-01-04
    • US716987
    • 1991-06-18
    • Kenji Nakagawa
    • Kenji Nakagawa
    • G03F1/00G03F1/26G03F1/30G03F1/74G02B27/44G02B1/10G02B5/18
    • G03F1/30G03F1/26G03F1/74
    • A reticle and a method of fabricating the samer for projecting a fine pattern on an object surface comprises: a. transparent substrate; a first type phase-shifter selectively patterned and deposited on the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter; and a second type phase-shifter selectively patterned and forming a groove in the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter. The reticle may include a patterned shield layer which interrupts transmission of light, and the phase difference of the first and second type phase-shifters is many times selected substantially equal to a half wavelength of light. Another type of a reticle comprises: a transparent substrate; a phase-shifter of a first groove; and another phase-shifter of a second deeper groove formed in the first groove.
    • 掩模版和制造用于在物体表面上投射精细图案的印模的方法包括:a。 透明基材 选择性地图案化并沉积在衬底上的第一类型移相器,其产生通过其中的光与通过其它区域的光之间的相位差,而没有移相器; 以及选择性地图案化并在衬底中形成凹槽的第二类型移相器,其产生穿过其中的光与通过其它区域的光之间的相位差,而没有移相器。 掩模版可以包括中断光的传输的图案化屏蔽层,并且第一和第二类型移相器的相位差被选择为基本上等于半波长的光的许多次。 掩模版的另一种类型包括:透明基板; 第一槽的移相器; 以及形成在第一凹槽中的第二深槽的另一个移相器。