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1. 发明专利

JPS62290913A CONTROLLER FOR MOBILE TABLE 失效
公开(公告)号：JPS62290913A
公开(公告)日：1987-12-17
申请号：JP13265286
申请日：1986-06-10
申请人： TOSHIBA CORP
发明人： TAKAHASHI YOSHIHIKO , KOBAYASHI NOBORU
IPC分类号： H01L21/30 , G05D3/12 , H01L21/027 , H01L21/67 , H01L21/68
摘要： PURPOSE:To perform fast positioning of a mobile table at a high speed by providing attenuators to both a speed and position control loops which drive the mobile table. CONSTITUTION:A stage 13 has an equi-speed linear motion when the data of the fixed value is received from a CPU 1. A digital attenuator 10 is set within a speed control loop and can give the fine adjustment to the gain of this control loop by the data on the CPU 1. Thus the speed control of the stage 13 is carried out by the data on the CPU 1. A D/A converter 5 has an output of + or -10V, for example, and therefore the CPU 1 sends such data that can has an output of + or -10V. Here a conventional mobile table controller has such a problem where the data on the CPU 1 must to re-made for change of the output of the converter 5 in order to change the maximum speed at the time of speed control. In this example, however, the output of the converter 5 can be easily changed by a digital attenuator 6 with the data received from the CPU 1. In such a speed control way, the stage 13 is moved at a high speed.

2. 发明专利

JPS6268207A VERTICAL TYPE MOVING TABLE DEVICE 失效
公开(公告)号：JPS6268207A
公开(公告)日：1987-03-28
申请号：JP20530385
申请日：1985-09-19
申请人： TOSHIBA CORP
发明人： HIROKAWA TOSHIO , TAKAHASHI YOSHIHIKO
IPC分类号： B23B47/26 , B23Q11/00
摘要： PURPOSE:To enable a moving table to be subjected to high accurate further high speed positioning in a short time, by overlapping a plurality of steel belt to be peripherally wound on the moving table and a counterweight. CONSTITUTION:A moving table 2 is connected to a counterweight 3 by a steel belt 4 from the upper end of the table 2 through a roller 1 while it is also connected to the weight by a steel belt 8 from the bottom end of the table 2 through a roller 7. If the table 2 is lifted by a motor 5, the weight 3 promptly lowers. Since the table 2 is connected to the counterweight 3 by the belts 4, 8 in the top and the bottom, it can be positioned high accurately further in a short time with no vibration.

3. 发明专利

JPH06258045A METHOD AND SYSTEM FOR DETECTING POSITION 失效
公开(公告)号：JPH06258045A
公开(公告)日：1994-09-16
申请号：JP4957993
申请日：1993-03-10
申请人： TOSHIBA CORP
发明人： MATSUKI KAZUTO , TAKAHASHI YOSHIHIKO , MIKAMI TORU
IPC分类号： G01B11/00 , G01B11/24 , G03F9/00 , H01L21/027 , H01L21/66
摘要： PURPOSE:To detect the position of an objective pattern having symmetry accurately from an observed image data of an object by detecting the position of an observed image from the central positions of first set region and second detection region. CONSTITUTION:An alignment mark M is imaged and a luminance distribution data 15K is created from the image data. The data 15K is attained by taking in one line from a line data 15 in X-axis direction and has symmetry. A template region 1 is cut out from the data 15K in the vicinity of one outside edge and turned reversely by 180 deg. about a symmetrical axis being parallel with Y-axis thus creating a template 3. A search area 5 larger than the template 3 is set in the vicinity of the other edge. A mutual correlation coefficient is then determined in the area 5 while scanning the template 3 and a most matched region 3K is searched. In this regard, an end point of the region 1 and an intermediate point of the region 3K starting point represent the central coordinates of a box to be determined.

4. 发明专利

JPS59178661A Magnetic recording device 失效
标题翻译：磁记录装置
公开(公告)号：JPS59178661A
公开(公告)日：1984-10-09
申请号：JP5143983
申请日：1983-03-29
申请人： Toshiba Corp
发明人： TAKAHASHI YOSHIHIKO , TAKAHASHI TADASHI
IPC分类号： G11B17/028 , G11B23/00
CPC分类号： G11B17/0282 , G11B23/0028
摘要： PURPOSE:To improve the torque transmissibility and the easiness of alignment of rotation axes by sticking small discs, which have radial ruggedness with rotation axes as centers, to a rotation driving part and a disc-shaped magnetized medium or forming the rotation driving part and the disc-shaped magnetized medium into shapes similar to these small discs as one body. CONSTITUTION:Engaging faces of a rotation driving part 2 and a disc-shaped magnetized medium part 1 have radial ruggedness with a rotation axis of the rotation driving part as the center and are engaged with each other precisely when they are engaged with each other. The rotation axial part of the rotation driving part 2 is formed into a column 2e whose tip is smispherical, and that of the disc-shaped magnetized medium part 1 is formed into a round hole having an inside diameter slightly larger than the diameter of the column 2e, and thus, axes are allowed to coincide with each other more easily. Further, one of the disc-shaped magnetized medium part 1 and the rotation driving part 2 is constituted with a permanent magnet, and the other is constituted with a ferromagnetic material, and they are joined by magnetic attraction to make a mechanism small-sized and light-weight. Thus, the torque transmissibility and the easiness of alignment of rotation axes are improved.
摘要翻译：目的：通过将具有作为中心的旋转轴的径向坚固性的小圆盘粘贴到旋转驱动部和盘状磁化介质上，或者形成旋转驱动部以及将旋转轴盘形磁化介质形成类似于这些小盘作为一体。构成：旋转驱动部件2和盘状磁化介质部件1的接合面具有以旋转驱动部的旋转轴为中心的径向坚固性，并且在彼此接合时彼此精确地接合。旋转驱动部2的旋转轴部形成为尖端为小球状的列2e，盘状磁化介质部1的圆筒形状形成为具有稍大于列直径的内径的圆孔 2e，因此允许轴线更容易地彼此一致。此外，盘状磁化介质部件1和旋转驱动部件2中的一个由永磁体构成，另一个由铁磁材料构成，并且通过磁吸引力接合以制造小尺寸的机构，重量轻。因此，提高了转矩传递性和旋转轴的对准的容易性。

5. 发明专利

JP2011160125A Output synthesizer 审中-公开
标题翻译：输出合成器
公开(公告)号：JP2011160125A
公开(公告)日：2011-08-18
申请号：JP2010019224
申请日：2010-01-29
申请人： Toshiba Corp , 株式会社東芝
发明人： TAKAHASHI YOSHIHIKO
IPC分类号： H03H7/48 , H01F19/06
摘要： PROBLEM TO BE SOLVED: To simply and easily achieve high synthesis efficiency while ensuring the size-reduction with a simple configuration. SOLUTION: A secondary conductor 13 is formed of a metal wire material 131 covered with a fluororesin 132. The metal wire material 131 is wound three times through a plurality of ferrite cores 111 wound with windings 112 respectively, so as to be arranged in a parallel manner. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：简单且容易地实现高合成效率，同时通过简单的配置确保尺寸减小。解决方案：二次导体13由覆盖有氟树脂132的金属线材131形成。金属线材131通过分别缠绕有绕组112的多个铁氧体磁心111缠绕三次，以便布置以平行的方式。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JPH1055950A SPECIMEN SUPPORTING MECHANISM IN ELECTRONIC BEAM ALIGNER 失效
公开(公告)号：JPH1055950A
公开(公告)日：1998-02-24
申请号：JP21250596
申请日：1996-08-12
申请人： TOSHIBA CORP
发明人： MATSUKI KAZUTO , TAWARAYAMA KAZUO , TAKAHASHI YOSHIHIKO , HIRANO RYOICHI
IPC分类号： G03F7/20 , H01L21/027 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To enable a specimen to be supported adding no excessive load to the same while making alignment of the specimen within an electronic beam aligner. SOLUTION: A specimen 12 is inserted into a specimen container 11 provided on a frame 10. In the frame 10, abutted parts 13a-13c are provided on the three positions of the specimen container 11 for making alignment of the specimen 12 in the horizontal direction. Furthermore, three each of clamp mechanisms 14a-14c are provided on the frame 10 wherein the specimen 12 inserted into the specimen container 11 is held from front and back, thereby specimen 12 to be fixed and held as well as the alignment thereof in the vertical direction to be made.

7. 发明专利

JPH05240628A 失效
公开(公告)号：JPH05240628A
公开(公告)日：1993-09-17
申请号：JP4420892
申请日：1992-03-02
申请人： TOSHIBA CORP
发明人： TAKAHASHI YOSHIHIKO , TOJO TORU
IPC分类号： G01B9/04 , G01B11/24 , G06T1/00 , H01L21/66 , G06F15/62
摘要： PURPOSE:To obtain a pattern inspecting device which can process a pattern with high resolution in a short inspecting time, can easily and automatically calibrate its reference mirror, and can reproduce a two-dimensional picture by moving the reference mirror. CONSTITUTION:In the title device provided with an interference microscope device for observing patterns composed of an interferometer and microscope, a plurality of kinds of monochromic light rays having difference wavelengths are used for lighting 32 the interference microscope device. In addition, a driving mechanism 41 which moves the reference mirror 35 of the device at least in the direction of its optical axis or tilts the mirror 35 to its optical axis is provided.

8. 发明专利

JPH01185482A MOVING TABLE APPARATUS 失效
公开(公告)号：JPH01185482A
公开(公告)日：1989-07-25
申请号：JP962188
申请日：1988-01-21
申请人： TOSHIBA CORP
发明人： KUDO AKIRA , TAKAHASHI YOSHIHIKO
IPC分类号： G12B5/00 , B23Q1/01 , B23Q1/26 , F16C29/10 , H01L21/02 , H01L21/027 , H01L21/30
摘要： PURPOSE:To implement high accuracy in yawing correction, by providing pushing means, which partially impart arbitrary pushing forces, at both side surfaces of a rail arranged on a base, and adjusting the arranging position of the rail. CONSTITUTION:A moving table 2 is attached on a base 1 so that the table can be moved in a specified direction through a pair of linear guides comprising rails 4, bearings 3 and rollers 9. A plurality of pressure adjusting screws 6 and 8 are attached to the blocks 5 and 7 at an arbitrary interval 1 respectively. Pressures are applied to the side surfaces of each rail 4 from the different directions so as to face each other. Thus, the bending of the rail 4 is adjusted and corrected. Therefore, highly accurate yawing correction can be performed.

9. 发明专利

JPS63133004A POSITION LENGTH MEASURING SYSTEM FOR VERTICAL TYPE X-Y STAGE 失效
公开(公告)号：JPS63133004A
公开(公告)日：1988-06-04
申请号：JP27971086
申请日：1986-11-26
申请人： TOSHIBA CORP
发明人： TAKAHASHI YOSHIHIKO
IPC分类号： G01B11/00 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68
摘要： PURPOSE:To reduce the weight of a mobile section as wafer holding base, by separating a laser oscillator from the wafer holding base. CONSTITUTION:A laser oscillator 19 is fixed on a surface plate 40 other than a wafer holding base 20 (or a base 30) and the wafer holding base 20 is moved independent of the laser oscillator 19. In this case, as a laser light beam 21 from the laser oscillator 19 is so set to travel in the direction Z, the position of an XY stage 11 can be measured free from the movement of the wafer holding base 20. This can reduce the weight of a movable part as wafer holding base significantly.

10. 发明专利

JPS6276644A LONGITUDINAL MOVING TABLE 失效
公开(公告)号：JPS6276644A
公开(公告)日：1987-04-08
申请号：JP21514485
申请日：1985-09-30
申请人： TOSHIBA CORP
发明人： TAKAHASHI YOSHIHIKO , YAMADA NOBORU
IPC分类号： H01L21/30 , B23B47/26 , H01J37/20 , H01J37/305 , H01L21/027 , H01L21/265 , H01L21/67 , H01L21/68
摘要： PURPOSE:To prevent unnecessary heating of a motor and to prevent a thermal effect as a semiconductor manufacturing apparatus when semiconductors are manufactured, by providing a counterweight, which is linked to a longitudinal moving table and balances with the weight of the longitudinal moving table and the weight of lateral moving table. CONSTITUTION:A counterweight 45 is supported by a guide member 51, which is provided on a main body frame 27 so that the weight can be moved up and down freely. The weight of the counterweight 45 is balanced with the total weight of a longitudinal moving table 23, which acts on a moving shaft 29 in the direction of the gravity and the total weight of a lateral moving table 25. The longitudinal moving table 23, which supports the lateral moving table 25, is supported so as to balance with the counterweight 45. The weight of the table 23 is not required to be supported by a longitudinal driving motor 33. A current is conducted to the longitudinal driving motor 33 only when the longitudinal moving table 23 is moved. Thus, the heating of the motor is prevented, and the thermal effect on a wafer 3 can be prevented. The movement of the entire body can be finished in a very short time.

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