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    • 6. 发明申请
    • NOVEL POLYIMIDE SILICONE, PHOTOSENSITIVE RESIN COMPOSITION CONTAINING THE NOVEL POLYIMIDE SILICONE, AND METHOD FOR PATTERN FORMATION
    • 新型聚酰亚胺硅氧烷,含有新型聚酰亚胺硅氧烷的感光性树脂组合物,以及形成图案的方法
    • US20100233619A1
    • 2010-09-16
    • US12722068
    • 2010-03-11
    • Shohei TAGAMITakanobu TakedaMichihiro SugoHideto Kato
    • Shohei TAGAMITakanobu TakedaMichihiro SugoHideto Kato
    • G03F7/004C08G77/04G03F7/20
    • C08G77/455C08G73/106C08K5/34922C08L63/00C08L79/08C08L83/10G03F7/0382G03F7/0387
    • A polyimide silicone having in the molecule a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group is provided. The polyimide silicone comprises the unit represented by the formula (1): wherein X is a tetravalent group at least a part of which is a tetravalent organic group represented by the formula (2): wherein R1 is a monovalent hydrocarbon group, R2 is a trivalent group, and n is an integer of 1 to 120 on average; and Y is a divalent organic group at least a part of which is a divalent organic group having a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group represented by the formula (3): wherein R3 and R4 are a hydrogen atom or an alkyl group, and R5 is an alkyl group, an aryl group, or an aralkyl group. R3 and R4, R3 and R5, or R4 and R5 may be bonded to each other to form a ring together with the carbon atom or the carbon atom and the oxygen atom to which they are bonded with the proviso that the R3, R4, and R5 are independently an alkylene group.
    • 提供了在分子中具有一部分或全部氢原子被酸不稳定基团取代的酚羟基的聚酰亚胺硅氧烷。 聚酰亚胺硅氧烷包括由式(1)表示的单元:其中X是四价基团,其中至少一部分是由式(2)表示的四价有机基团:其中R 1是单价烃基,R 2是 三价基​​,平均为n为1〜120的整数。 Y为二价有机基团,其中至少一部分为具有酚羟基的二价有机基团,其中部分或全部氢原子被式(3)表示的酸不稳定基团取代:其中R3和 R4是氢原子或烷基,R5是烷基,芳基或芳烷基。 R 3和R 4,R 3和R 5或R 4和R 5可以彼此键合以与碳原子或碳原子和它们所键合的氧原子一起形成环,条件是R3,R4和 R5独立地是亚烷基。
    • 7. 发明授权
    • Polyimide silicone, photosensitive resin composition containing the novel polyimide silicone, and method for pattern formation
    • 聚酰亚胺硅酮,含有新型聚酰亚胺硅酮的感光性树脂组合物,以及图案形成方法
    • US08263308B2
    • 2012-09-11
    • US12722068
    • 2010-03-11
    • Shohei TagamiTakanobu TakedaMichihiro SugoHideto Kato
    • Shohei TagamiTakanobu TakedaMichihiro SugoHideto Kato
    • G03F7/004G03F7/30C08G69/26C08G77/00
    • C08G77/455C08G73/106C08K5/34922C08L63/00C08L79/08C08L83/10G03F7/0382G03F7/0387
    • A polyimide silicone having in the molecule a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group is provided. The polyimide silicone comprises the unit represented by the formula (1): wherein X is a tetravalent group at least a part of which is a tetravalent organic group represented by the formula (2): wherein R1 is a monovalent hydrocarbon group, R2 is a trivalent group, and n is an integer of 1 to 120 on average; and Y is a divalent organic group at least a part of which is a divalent organic group having a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group represented by the formula (3): wherein R3 and R4 are a hydrogen atom or an alkyl group, and R5 is an alkyl group, an aryl group, or an aralkyl group. R3 and R4, R3 and R5, or R4 and R5 may be bonded to each other to form a ring together with the carbon atom or the carbon atom and the oxygen atom to which they are bonded with the proviso that the R3, R4, and R5 are independently an alkylene group.
    • 提供了在分子中具有一部分或全部氢原子被酸不稳定基团取代的酚羟基的聚酰亚胺硅氧烷。 聚酰亚胺硅氧烷包括由式(1)表示的单元:其中X是四价基团,其中至少一部分是由式(2)表示的四价有机基团:其中R 1是一价烃基,R 2是 三价基​​,平均为n为1〜120的整数。 Y为二价有机基团,其中至少一部分为具有酚羟基的二价有机基团,其中部分或全部氢原子被式(3)表示的酸不稳定基团取代:其中R3和 R4是氢原子或烷基,R5是烷基,芳基或芳烷基。 R 3和R 4,R 3和R 5或R 4和R 5可以彼此键合以与碳原子或碳原子和它们所键合的氧原子一起形成环,条件是R3,R4和 R5独立地是亚烷基。