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    • 5. 发明授权
    • Printed wiring board and semiconductor device and processes to prepare the same
    • 印刷电路板和半导体器件及其制备方法
    • US06709804B2
    • 2004-03-23
    • US10368960
    • 2003-02-19
    • Yusuke TajimaKazuo TakeuchiYasuo ShigemitsuEtsu Takeuchi
    • Yusuke TajimaKazuo TakeuchiYasuo ShigemitsuEtsu Takeuchi
    • G03C173
    • B82Y15/00B82Y30/00G03F7/0387H05K1/023H05K3/4676Y10S430/116Y10S430/121
    • A printed wiring board, a substrate for disposing semiconductor chips and a semiconductor device prepared by coating a substrate with a photosensitive resin composition comprising an oxygen sensitizer and a cis-diene-substituted polyamic acid or polyimide and forming fine patterns by exposure to radiation. Processes for producing a printed wiring board, a substrate for disposing semiconductor chips and a semiconductor device, which comprises coating a substrate with the photosensitive resin composition and forming fine patterns by crosslinking cis-diene by oxidation polycondensation with singlet oxygen generated by exposure of the oxygen sensitizer to radiation. The photosensitive resin composition is of the negative type and exhibits high sensitivity and high resolution. The photosensitive resin composition forms a resin layer having excellent heat resistance.
    • 印刷电路板,用于配置半导体芯片的基板和通过用包含氧敏感剂和顺式二烯取代的聚酰胺酸或聚酰亚胺的感光性树脂组合物涂布基板而制备的半导体装置,并通过暴露于辐射形成精细图案。 用于制造印刷线路板的方法,用于设置半导体芯片的基板和半导体器件,其包括用感光性树脂组合物涂布基材并通过与通过氧气曝光产生的单线态氧化缩聚反应顺式二烯来形成精细图案 敏化剂对辐射。 感光性树脂组合物为负型,显示出高灵敏度,高分辨率。 感光性树脂组合物形成耐热性优异的树脂层。
    • 7. 发明授权
    • System and method of diagnosing particle formation
    • 诊断颗粒形成的系统和方法
    • US06374194B1
    • 2002-04-16
    • US09288667
    • 1999-04-09
    • Kazuo Takeuchi
    • Kazuo Takeuchi
    • G06F1130
    • H01L21/67253C23C14/542C23C16/4401
    • A particle formation diagnosing system monitors the condition of particle formation in each of reaction chambers 1 of a semiconductor device fabricating line on the basis of data provided by a pressure measuring device 2a, a temperature measuring device 2b and a differential mobility analyzer 3 combined with each reaction chamber 1. The operation record recording unit 4a of the computer system 4 records data on the relation between the values of the operation parameters of each reaction chamber 1 and the amount of particles formed in the reaction chamber. Then, the operating condition determining unit 4b determines the optimum values for the operation parameters of the reaction chamber which will reduce the possibility of particle formation to the least possible extent on the basis of the data recorded by the operation record recording unit 4a.
    • 颗粒形成诊断系统基于由压力测量装置2a,温度测量装置2b和差速迁移率分析仪3提供的数据监测半导体装置制造线的每个反应室1中的颗粒形成状况, 计算机系统4的操作记录记录单元4a记录关于每个反应室1的操作参数的值与在反应室中形成的颗粒的量之间的关系的数据。 然后,操作条件确定单元4b确定反应室的操作参数的最佳值,其将基于由操作记录记录单元4a记录的数据以最小程度降低颗粒形成的可能性。