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1. 发明申请

US20060144738A1 Holding tray for substrate, substrate alignment system using the same and method thereof 有权
标题翻译：用于基板的保持托盘，使用其的基板对准系统及其方法
公开(公告)号：US20060144738A1
公开(公告)日：2006-07-06
申请号：US11325575
申请日：2006-01-05
申请人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
发明人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
IPC分类号： B65D85/48
CPC分类号： H01L21/68728 , H01L21/68735 , H01L21/68778 , Y10S414/136 , Y10S414/141 , Y10T29/53265
摘要： Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process. The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame. The holding tray for substrate according to the present invention, the substrate alignment system using the same, and the method thereof are useful to accomplish high-precision alignment and conduct a stable deposition process due to the stable vertical arrangement of the substrate during the deposition process.
摘要翻译：公开了一种保持托盘，使用其的基板对准系统及其方法。更具体地，本发明涉及一种能够实现高精度对准并进行稳定沉积的基板用保持托盘。保持装置包括在基板的至少一侧，以在真空过程中将基板竖直保持并支撑在保持托盘的平坦表面上以保持和支撑基板。根据本发明的保持托盘，使用其的基板对准系统及其方法包括其上形成沉积物的基板，形成为接收基板的框架，形成为接收框架的托盘，并且至少一个保持装置被形成为将基板保持在框架上。根据本发明的基板用保持托盘，使用其的基板对准系统及其方法可用于实现高精度对准并且由于在沉积工艺期间基板的稳定垂直排列而进行稳定的沉积工艺。

2. 发明授权

US08166641B2 Holding tray for substrate, substrate alignment system using the same and method thereof 有权
标题翻译：用于基板的保持托盘，使用其的基板对准系统及其方法
公开(公告)号：US08166641B2
公开(公告)日：2012-05-01
申请号：US11325575
申请日：2006-01-05
申请人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
发明人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
IPC分类号： H01L21/68
CPC分类号： H01L21/68728 , H01L21/68735 , H01L21/68778 , Y10S414/136 , Y10S414/141 , Y10T29/53265
摘要： Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process.The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame.The holding tray for substrate according to the present invention, the substrate alignment system using the same, and the method thereof are useful to accomplish high-precision alignment and conduct a stable deposition process due to the stable vertical arrangement of the substrate during the deposition process.
摘要翻译：公开了一种保持托盘，使用其的基板对准系统及其方法。更具体地，本发明涉及一种能够实现高精度对准并进行稳定沉积的基板用保持托盘。保持装置包括在基板的至少一侧，以在真空过程中将基板竖直保持并支撑在保持托盘的平坦表面上以保持和支撑基板。根据本发明的保持托盘，使用其的基板对准系统及其方法包括其上形成沉积物的基板，形成为接收基板的框架，形成为接收框架的托盘，并且至少一个保持装置被形成为将基板保持在框架上。根据本发明的基板用保持托盘，使用其的基板对准系统及其方法可用于实现高精度对准并且由于在沉积工艺期间基板的稳定垂直排列而进行稳定的沉积工艺。

3. 发明申请

US20060150910A1 Alignment system, vertical tray transporting assembly, and deposition apparatus with the same 审中-公开
标题翻译：校准系统，垂直托盘运输组件和具有相同的沉积设备
公开(公告)号：US20060150910A1
公开(公告)日：2006-07-13
申请号：US11302522
申请日：2005-12-14
申请人： Sang-Jin Han , Kwan-Seop Song , Seok-Heon Jeong , Hee-Cheol Kang
发明人： Sang-Jin Han , Kwan-Seop Song , Seok-Heon Jeong , Hee-Cheol Kang
IPC分类号： C23C16/00
CPC分类号： C23C14/042 , C23C14/50
摘要： An alignment system, a vertical tray transporting assembly and a deposition apparatus having the same allow alignment of high precision, and perform a stable deposition process in a short period of time, minimize the effect of fine particles during transportation, and secure a sufficient uniformity of a mask by fixing and supporting a vertically disposed substrate using a fixing holder member and an auxiliary attaching member in a tray of a vertical in-line deposition alignment system.
摘要翻译：对准系统，垂直托盘传送组件和具有该对准系统的沉积设备允许高精度对准，并且在短时间内执行稳定的沉积处理，使运输期间细颗粒的影响最小化，并确保足够的均匀性通过使用垂直的在线沉积取向系统的托盘中的固定保持器构件和辅助附接构件来固定和支撑垂直布置的基底的掩模。

4. 发明授权

US08845807B2 Linear evaporation source and deposition apparatus having the same 有权
标题翻译：线性蒸发源及其沉积装置
公开(公告)号：US08845807B2
公开(公告)日：2014-09-30
申请号：US12972327
申请日：2010-12-17
申请人： Min-Gyu Seo , Sang-Jin Han , Cheol-Lae Roh , Jae-Hong Ahn
发明人： Min-Gyu Seo , Sang-Jin Han , Cheol-Lae Roh , Jae-Hong Ahn
IPC分类号： C23C14/26 , C23C16/448 , C23C14/24
CPC分类号： C23C16/4485 , C23C14/243 , C23C14/26
摘要： A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate to the crucible, the nozzle section, and the heater.
摘要翻译：公开了一种线性蒸发源及其沉积装置。在一个实施例中，线性蒸发源包括i）坩埚在其一侧开口并被构造成存储沉积材料，以及ii）分隔坩埚内部空间的多个隔板，其中每个隔板具有至少一个在其下部开口。该源还包括i）位于坩埚的开放侧上并包括多个喷嘴的喷嘴部分，ii）被配置为加热坩埚的加热器，以及iii）构造成容纳坩埚，喷嘴部分和加热器。

5. 发明授权

US07465828B2 Method for preparing hydrazodicarbonamide using biuret as starting material 有权
标题翻译：使用缩二脲作为原料制备肼基二酰胺的方法
公开(公告)号：US07465828B2
公开(公告)日：2008-12-16
申请号：US11015853
申请日：2004-12-17
申请人： Chun-Hyuk Lee , Sang-Jin Han
发明人： Chun-Hyuk Lee , Sang-Jin Han
IPC分类号： C07C281/06
CPC分类号： C07C281/06
摘要： The method for preparing hydrazodicarbonamide (HDCA) using biuret as a starting material is disclosed. The method comprises the steps of; obtaining metal monohalobiuret salt by reacting a biuret with a metal hypohalogen compound, or by reacting the biuret with a halogenating agent and a base; and reacting the obtained metal monohalobiuret salt with ammonia, wherein the hydrazodicarbonamide is produced in the presence of a catalyst including bromine or iodine atom and generating bromine or iodine ion during the reaction.
摘要翻译：公开了使用缩二脲作为原料制备肼基二酰胺（HDCA）的方法。该方法包括以下步骤：通过使缩二脲与金属低卤化合物反应，或通过使缩二脲与卤化剂和碱反应获得金属单卤代硼酸盐; 并使所得金属单卤代硼酸盐与氨反应，其中在反应期间在包含溴或碘原子的催化剂存在下产生肼基二酰胺并产生溴或碘离子。

6. 发明授权

US06635785B1 Method for synthesizing hydrazodicarbonamide 有权
标题翻译：肼二酰胺合成方法
公开(公告)号：US06635785B1
公开(公告)日：2003-10-21
申请号：US10169127
申请日：2002-06-27
申请人： Chun-Hyuk Lee , Sang-Jin Han
发明人： Chun-Hyuk Lee , Sang-Jin Han
IPC分类号： C07C2800
CPC分类号： C07C281/06
摘要： A method for synthesizing hydrazodicarbonamide (HDCA) by a reaction of monohalobiuret metal salt having the formula 1 or 2, which is derived from biuret, and ammonia, wherein M is a metal and X is a halogen. The monohalobiuret metal salt is inexpensive and easy to synthesize and thus a great yield of HDCA can be obtained from the monohalobiuret metal salt at low cost.
摘要翻译：通过由缩二脲衍生的具有式1或2的单卤代羰基金属盐与氨的反应合成肼基二酰胺（HDCA）的方法，其中M是金属，X是卤素。单卤代硼烷金属盐廉价且易于合成，因此可以以低成本从单卤代硼烷金属盐获得大量的HDCA。

7. 发明授权

US08557046B2 Deposition source 有权
标题翻译：沉积源
公开(公告)号：US08557046B2
公开(公告)日：2013-10-15
申请号：US12769879
申请日：2010-04-29
申请人： Jong-Woo Lee , Tae-Seung Kim , Chang-Soon Ji , Won-Seok Cho , Hey-Yeon Shim , Yong-Hun Jo , Sang-Jin Han
发明人： Jong-Woo Lee , Tae-Seung Kim , Chang-Soon Ji , Won-Seok Cho , Hey-Yeon Shim , Yong-Hun Jo , Sang-Jin Han
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , F27B17/0016 , F27B17/0075
摘要： A deposition source capable of uniformly producing a deposition film. The deposition source includes a furnace, a first heating unit surrounding the furnace to heat the furnace and a second heating unit spaced-apart from the first heating unit by an interval and surrounding the furnace to heat the furnace, wherein the second heating unit comprises a plurality of separate sub-heating units that surround the furnace.
摘要翻译：能够均匀地产生沉积膜的沉积源。沉积源包括炉子，围绕炉子加热炉子的第一加热单元和与第一加热单元间隔开并且围绕炉子加热炉子的第二加热单元，其中第二加热单元包括围绕炉子的多个单独的次加热单元。

8. 发明申请

US20050107566A1 Method for preparing hydrazodicarbonamide using biuret as starting material 有权
标题翻译：使用缩二脲作为原料制备肼基二酰胺的方法
公开(公告)号：US20050107566A1
公开(公告)日：2005-05-19
申请号：US11015853
申请日：2004-12-17
申请人： Chun-Hyuk Lee , Sang-Jin Han
发明人： Chun-Hyuk Lee , Sang-Jin Han
IPC分类号： C07C231/12 , C07B61/00 , C07C281/06 , C08G18/81
CPC分类号： C07C281/06
摘要： The method for preparing hydrazodicarbonamide(HDCA) using biuret as a starting material is disclosed. The method comprises the steps of; obtaining metal monohalobiuret salt by reacting a biuret with a metal hypohalogen compound, or by reacting the biuret with a halogenating agent and a base; and reacting the obtained metal monohalobiuret salt with ammonia, wherein the hydrazodicarbonamide is produced in the presence of a catalyst including bromine or iodine atom and generating bromine or iodine ion during the reaction.
摘要翻译：公开了使用缩二脲作为原料制备肼基二酰胺（HDCA）的方法。该方法包括以下步骤：通过使缩二脲与金属低卤化合物反应，或通过使缩二脲与卤化剂和碱反应获得金属单卤代硼酸盐; 并使所得金属单卤代硼酸盐与氨反应，其中在反应期间在包含溴或碘原子的催化剂存在下产生肼基二酰胺并产生溴或碘离子。

9. 发明授权

US06515845B1 Method for preparing nanoporous carbon materials and electric double-layer capacitors using them 失效
标题翻译：使用它们制备纳米多孔碳材料和双电层电容器的方法
公开(公告)号：US06515845B1
公开(公告)日：2003-02-04
申请号：US09658199
申请日：2000-09-08
申请人： Seung-Mo Oh , Taeg-Hwan Hyeon , Sang-Jin Han
发明人： Seung-Mo Oh , Taeg-Hwan Hyeon , Sang-Jin Han
IPC分类号： H01G900
CPC分类号： H01G9/155 , Y02E60/13
摘要： Disclosed herein is the fabrication method of producing nanoporous carbon materials with pore sizes ranging from 2 nanometer to 20 nanometer which can be used as electrode materials for a supercapacitor and an electric double layer capacitors being a kind of supercapacitor. The invention also relates to electric double layer capacitors utilizing these carbon materials as electrodes. The carbon materials presented in the present invention possess regular pores with dimensions ranging in between 2 nm and 20 mm and exhibit high electrical conductivity. These carbon materials shows low equivalent series resistance (ESR) and thus exhibits high charge storage capacity at high charging/discharging current density.
摘要翻译：本文公开的是制造孔径为2纳米到20纳米的纳米多孔碳材料的制造方法，其可以用作超级电容器的电极材料和作为一种超级电容器的双电层电容器。本发明还涉及利用这些碳材料作为电极的双电层电容器。本发明中提供的碳材料具有尺寸在2nm和20mm之间的规则孔，并且表现出高导电性。这些碳材料显示出低等效串联电阻（ESR），因此在高充电/放电电流密度下表现出高电荷存储容量。

10. 发明授权

US07422727B2 Apparatus for preparing hydrazo-dicarbonamide using urea as starting material 有权
标题翻译：使用尿素作为起始原料制备二氢萘二甲酰胺的装置
公开(公告)号：US07422727B2
公开(公告)日：2008-09-09
申请号：US11747596
申请日：2007-05-11
申请人： Chun-hyuk Lee , Sang-Jin Han
发明人： Chun-hyuk Lee , Sang-Jin Han
IPC分类号： B01J8/04 , B01J8/00 , B01J10/00 , C07C281/00
CPC分类号： C07C281/06
摘要： The present invention relates to a method and apparatus for preparing hydrazodicarbonamide using urea as starting material economically and environmentally desirably. The apparatus includes a pyrolysis furnace to obtain biuret and ammonia by pyrolyzing urea; a recrystallization reactor to purify the biuret obtained from the pyrolysis furnace; a first reactor to obtain an metal monohalobiuret salt by reacting the biuret with metal hypohalogen compound or with halogen and base; a second reactor to synthesize the hydrazodicarbonamide by reacting the monohalobiuret metal salt with ammonia; and an ammonia evaporator to separate the excess ammonia from hydrazodicarbonamide and to supply the separated ammonia to an ammonia concentrator.
摘要翻译：本发明涉及一种以经济和环保方式使用尿素作为原料制备肼基二酰胺的方法和装置。该装置包括热解炉，通过热解尿素获得缩二脲和氨; 用于纯化从热解炉获得的缩二脲的再结晶反应器; 通过使缩二脲与金属低卤化合物或与卤素和碱反应获得金属单卤代硼酸盐的第一反应器; 第二反应器，通过使单卤代硼烷金属盐与氨反应合成肼二酰胺; 和氨蒸发器，以将过量的氨与肼基二酰胺分离，并将分离的氨供应到氨浓缩器。

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