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1. 发明申请

WO2010024511A1 METHOD OF ADJUSTING VELOCITY OF TRANSFER MEMBER, METHOD OF TRANSFERRING SUBSTRATE USING THE METHOD, AND SUBSTRATE-PROCESSING APPARATUS 审中-公开
标题翻译：调整传送速度的方法，使用该方法传送基板的方法以及基板处理装置
公开(公告)号：WO2010024511A1
公开(公告)日：2010-03-04
申请号：PCT/KR2009/001755
申请日：2009-04-06
申请人： SEMES CO., LTD. , HONG, Kwang-Jin , JUN, Sang-Eun
发明人： HONG, Kwang-Jin , JUN, Sang-Eun
IPC分类号： H01L21/687
CPC分类号： H01L21/67742 , H01L21/67253 , H01L21/67259 , H01L21/67288
摘要： Provided is a method of adjusting a velocity of a transfer arm in a transfer member. The method includes, accelerating the transfer arm from a start point to a first point where a movement velocity reaches a preset reference velocity, dividing a division from the first point to a second point into movement divisions to move the transfer arm in any one of a deceleration motion, an acceleration motion, and a uniform motion according to the respective movement divisions, and decelerating the transfer arm from the second point to a target point. The motion of the transfer arm in the current movement division is different from that in the movement division just before the current movement division. Thus, a different impulse from that in the precedent movement division is applied to a substrate loaded on the transfer arm. Accordingly, the impulse response superposition cancels residual vibration of the substrate, so as to improve transfer efficiency of the transfer member.
摘要翻译：提供了一种调节传送构件中的传送臂的速度的方法。该方法包括：将传送臂从起始点移动到移动速度达到预设参考速度的第一点，将从第一点到第二点的分割分成运动分割，以将传送臂移动到减速运动，加速运动，以及根据各运动部分的均匀运动，以及将传送臂从第二点减速到目标点。传动臂在当前运动部分中的运动与在当前运动分割之前的运动分割中的运动不同。因此，与先前运动分割中的不同的脉冲施加到装载在传送臂上的基板。因此，脉冲响应叠加抵消了基板的残余振动，从而提高了转印部件的转印效率。

2. 发明申请

WO2010024512A1 SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME 审中-公开
标题翻译：基板处理装置及其基板转印方法
公开(公告)号：WO2010024512A1
公开(公告)日：2010-03-04
申请号：PCT/KR2009/001829
申请日：2009-04-09
申请人： SEMES CO., LTD. , HONG, Kwang-Jin , YOU, Jun-Ho
发明人： HONG, Kwang-Jin , YOU, Jun-Ho
IPC分类号： H01L21/677
CPC分类号： H01L21/67276 , H01L21/67253 , H01L21/67742 , H01L21/67745 , H01L21/67766
摘要： Provided is a substrate-processing apparatus including a storage member, a transfer member, and a control unit. The transfer member includes a plurality of transfer arms that load or pick up a substrate to or from the storage member. The control unit controls velocity of the transfer arms such that the simultaneously driven transfer arms simultaneously arrive at target points. Accordingly, the transfer member loads or takes out a plurality of wafers at once to or from the storage member, so that the substrate-processing apparatus reduces transfer time and improves productivity.
摘要翻译：提供了包括存储部件，转印部件和控制单元的基板处理装置。传送构件包括多个传送臂，用于将基板加载到存储构件或从存储构件拾取基板。控制单元控制传送臂的速度，使得同时驱动的传送臂同时到达目标点。因此，转印构件一次加载或取出多个晶片，从而使得基板处理装置减少转印时间并提高生产率。

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