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    • 3. 发明授权
      US06998217B2 Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels 有权
    • Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels
    • 关键尺寸边缘放置和中心像素剂量加法和调制内像素的斜率增强
    • US06998217B2
    • 2006-02-14
    • US10326953
    • 2003-01-06
    • Jerry Martyniuk , H. Christopher Hamaker , Matthew J. Jolley , Peter Pirogovsky , Asher Klatchko , Richard E. Crandall
    • Jerry Martyniuk , H. Christopher Hamaker , Matthew J. Jolley , Peter Pirogovsky , Asher Klatchko , Richard E. Crandall
    • G03C5/00
    • G03F1/78
    • Systems and methods for gray scale lithography for defining edges such as on microelectronic device patterns during integrated circuit fabrication are disclosed. Methods for critical dimension edge placement and slope enhancement utilize central pixel dose addition or modulated inner pixels. A method for gray scale lithography for defining edges of features generally comprises identifying a center pixel of a feature, exposing the general width of the feature including the identified center pixel with full doses, and enhancing the identified center pixel by exposing the identified center pixel with additional dose to accurately place the edge of the feature, whereby the edge of the feature is defined and moved by exposing the center pixel with the additional dose. Another method for gray scale lithography generally comprises identifying a proximal interior pixel immediately interior to an unbiased edge of the feature, exposing the general width of the feature full dosages, and exposing the proximal interior pixel with a dosage of elevated intensity selected from a set of gray levels, the elevated intensities being above the full dosage, the set of gray levels biases the edge of the feature and facilitates in further moving the edge of the feature in fractional increments of a pixel depending upon the gray level selected.
    • 公开了用于在集成电路制造期间用于限定边缘（例如微电子器件图案）上的灰度光刻的系统和方法。 关键尺寸边缘放置和斜率增强的方法利用中心像素剂量加法或调制内像素。 用于定义特征边缘的灰度光刻的方法通常包括识别特征的中心像素，以全剂量暴露包括所识别的中心像素的特征的一般宽度，以及通过将所识别的中心像素曝光于所识别的中心像素， 附加剂量以精确地放置特征的边缘，由此通过用附加剂量暴露中心像素来限定和移动特征的边缘。 用于灰度光刻的另一种方法通常包括：在特征的非偏向边缘内部识别近端内部像素，暴露特征全部剂量的总体宽度，以及从一组 灰度级，提高的强度高于全剂量，灰度级集合偏置特征的边缘，并且有助于根据所选择的灰度级进一步移动像素的分数增量中的特征边缘。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
    • 5. 发明授权
      US07034963B2 Method for adjusting edges of grayscale pixel-map images 有权
    • Method for adjusting edges of grayscale pixel-map images
    • 调整灰度像素图图像边缘的方法
    • US07034963B2
    • 2006-04-25
    • US09903843
    • 2001-07-11
    • Asher Klatchko , Samuel C. Howells , Michael A. Ward
    • Asher Klatchko , Samuel C. Howells , Michael A. Ward
    • H04N1/40 , H04N1/405 , G06K15/00
    • H04N1/4092 , G03F1/68 , G03F1/78 , G03F7/70291 , G06T5/003 , G06T2207/20192 , G06T2207/30148
    • An algorithm (method) for sizing (adjusting edges 01) grayscale or dose level pixel-maps (raster images) real time for input into radiant beam lithography systems or similar dose level grayscale image rendering systems to compensate for systemic distortions such as edge bias and/or loss of linearity (i) successively assembles one or more frame matrixes of grayscale values from a parent pixel-map having edges and corners where an edge is defined by gray pixels having values between 1, 2, . . . n, or by pixels having at least one black (0-gray or dose level) neighbor; (ii) slides a sub-matrix window within each frame matrix, to find, calculate and store values for gradients perpendicular to the edges, and any corner within each frame matrix; (iii) loops over pixels within such sub-matrix window at each position within the frame matrix to adjust the grayscale value of each edge pixel found; and (iii) propagates a grayscale correction value to pixels inward or outward per the computed perpendicular gradient to establish a new edge position within each frame matrix, and where there is more than one frame matrix , (iv) reassembles the frame matrixes, thereby, generating a daughter grayscale or dose level pixel-map which upon projection and recording compensates for systemic distortions.
    • 用于实时地调整（调整边缘）灰度级或剂量级像素图（光栅图像）的算法（方法），以输入到辐射束光刻系统或类似剂量级灰度图像渲染系统中，以补偿系统失真，如边缘偏差和 /或线性的丢失（i）从具有边缘和角落的父像素图连续地组装一个或多个灰度值的帧矩阵，其中边缘由具有1,2，...之间的值的灰色像素定义。 。 。 n或具有至少一个黑色（0-灰色或剂量级）邻居的像素; （ii）在每个帧矩阵内滑动子矩阵窗口，以查找，计算和存储垂直于边缘的梯度和每个帧矩阵内的任何角; （iii）在所述帧矩阵内的每个位置的所述子矩阵窗口内的像素上循环，以调整发现的每个边缘像素的灰度值; 并且（iii）将灰度校正值向所计算的垂直梯度向内或向外传播到像素，以在每个帧矩阵内建立新的边缘位置，并且其中存在多于一个的帧矩阵，（iv）重新组合帧矩阵， 产生在投影和记录时补偿全身失真的女儿灰度或剂量水平像素图。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
    • 6. 发明授权
      US06812474B2 Pattern generation method and apparatus using cached cells of hierarchical data 失效
    • Pattern generation method and apparatus using cached cells of hierarchical data
    • US06812474B2
    • 2004-11-02
    • US09905561
    • 2001-07-13
    • Matthew J. Jolley , Asher Klatchko , Robert Marc Sills
    • Matthew J. Jolley , Asher Klatchko , Robert Marc Sills
    • G21G500
    • G03F7/70383 , H01J37/3026 , H01J2237/3175
    • A pattern generation method and system in which hierarchical image data (determining a pattern to be imaged on a target) is received at a graphics engine having a memory, at least one cell determining a repeated feature or set of features of the pattern is stored in the memory, and beam control data is generated in response to the image data. The image data includes residual data including at least two subroutine call commands for each cell stored in the memory. In response to each subroutine call command, the graphics engine retrieves a cell (identified by the command) from the memory, and asserts beam control data that determines a feature or feature set determined by the cell to be imaged at (or beginning at) a location on the target identified by the command. The subroutine call commands can be distributed throughout the image data, including in at least one cell to be cached as well as in the residual data. Preferably, the graphics engine caches each cell of the image data in the memory and generates a set of beam control data in response to each subroutine call command including by retrieving a cached cell from the memory and generating the beam control data in response to the retrieved cell. Alternatively, the graphics engine generates a cell of beam control data in response to each cell of image data, caches each such beam control data cell in the memory, and responds to each subroutine call command of the image data by retrieving a cached beam control data cell from the memory and asserting the retrieved beam control data cell as part of a set of beam control data that determines a feature or feature set (determined by the retrieved cell) to be imaged on the target. Another aspect of the invention is a method and apparatus for determining cells of hierarchical image data (to be transferred to a graphics engine) by analyzing hierarchical raw image data and transforming the raw image data into optimized hierarchical image data including the cells.
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
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