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    • 2. 发明申请
    • YIELD OPTIMIZATION IN ROUTER FOR SYSTEMATIC DEFECTS
    • 系统缺陷路由器的优化优化
    • US20070240090A1
    • 2007-10-11
    • US11279262
    • 2006-04-11
    • Jeanne BickfordMarkus BuehlerJason HibbelerJuergen KoehlDaniel Maynard
    • Jeanne BickfordMarkus BuehlerJason HibbelerJuergen KoehlDaniel Maynard
    • G06F17/50G06F19/00
    • G06F17/5077
    • Embodiments herein provide a method and computer program product for optimizing router settings to increase IC yield. A method begins by reviewing yield data in an IC manufacturing line to identify structure-specific mechanisms that impact IC yield. Next, the method establishes a structural identifier for each structure-specific mechanism, wherein the structural identifiers include wire codes, tags, and/or unique identifiers. Different structural identifiers are established for wires having different widths. Furthermore, the method establishes a weighting factor for each structure-specific mechanism, wherein higher weighting factors are established for structure-specific mechanisms comprising thick wires proximate to multiple thick wires. The method establishes the structural identifiers and the weighting factors for incidence of spacing between single wide lines, double wide lines, and triple wide lines and for incidence of wires above large metal lands. Subsequently, the router settings are modified based on the structural identifiers and the weighting factors to minimize systematic defects.
    • 本文的实施例提供了一种用于优化路由器设置以增加IC产量的方法和计算机程序产品。 一种方法开始于检查IC生产线中的产量数据,以确定影响IC产量的结构特异性机制。 接下来,该方法为每个结构特定机制建立结构标识符,其中结构标识符包括有线代码,标签和/或唯一标识符。 针对具有不同宽度的电线建立了不同的结构标识符。 此外,该方法为每个结构特定机构建立加权因子,其中针对包括靠近多个粗线的粗线的结构特定机构建立较高的加权因子。 该方法建立了单宽线,双宽线和三宽线之间的间距发生的结构标识符和加权因子,以及大金属土地上电线的入射。 随后,路由器设置基于结构标识符和权重因子进行修改,以最大限度地减少系统缺陷。