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    • 5. 发明授权
    • X-ray reduction exposure apparatus and device manufacturing method using
the same
    • X射线减少曝光装置及其制造方法
    • US5995582A
    • 1999-11-30
    • US835721
    • 1997-04-10
    • Shigeru TerashimaMasami Tsukamoto
    • Shigeru TerashimaMasami Tsukamoto
    • G21K5/02G03F7/20G21K1/06H01L21/027G21K5/00
    • G03F7/70891G21K1/06
    • A deflection mirror is disposed before an X-ray mask so as to reflect an X-ray beam and to project it to the X-ray mask. The X-ray mask is disposed opposed to a wafer with a distance D therebetween, and the X-ray beam reflected by the X-ray mask is projected onto the wafer through a reduction projection optical system. The deflecting mirror is disposed, in an example, at a position satisfying a relation D>L>d/(tan .delta.1+tan .delta.2) where L is the distance from the X-ray mask to an edge of the deflection mirror closer to the path of the X-ray beam reflected by the X-ray mask, d is the width of irradiation of the X-ray beam upon the X-ray mask, and .delta.1 and .delta.2 are incidence angles of the X-ray beam at upper and lower edges of the irradiation width d, respectively, upon the X-ray mask. This assures a compact structure wherein, even when a wafer of a large diameter is used, illumination light to the mask is not intercepted.
    • 偏转镜设置在X射线掩模之前,以便反射X射线束并将其投影到X射线掩模。 X射线掩模与其间具有距离D的晶片相对设置,并且由X射线掩模反射的X射线束通过还原投影光学系统投影到晶片上。 偏转镜例如设置在满足关系D> L> d /(tanδ1 +tanδ2)的位置处,其中L是从X射线掩模到偏转镜的边缘的距离更近 到由X射线掩模反射的X射线束的路径,d是X射线掩模上的X射线束的照射宽度,δ1和δ2是X射线的入射角 在X射线掩模上分别照射宽度d的上边缘和下边缘。 这确保了紧凑的结构,其中即使当使用大直径的晶片时,不遮挡对掩模的照明光。