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1. 发明申请

WO2013058471A1 APPARATUS AND METHOD FOR MANUFACTURING FINE PATTERN USING INTERFEROGRAM OF OPTICAL AXIS DIRECTION 审中-公开
标题翻译：使用光轴方向间隔制作精细图案的装置和方法
公开(公告)号：WO2013058471A1
公开(公告)日：2013-04-25
申请号：PCT/KR2012/005899
申请日：2012-07-24
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE , RHEE, Hyug-Gyo , LEE, Yun Woo
发明人： RHEE, Hyug-Gyo , LEE, Yun Woo
IPC分类号： G03F7/20 , G03F7/26 , H01L21/027
CPC分类号： B29C59/16 , G03F7/70383 , G03F7/70408 , G03F7/70566
摘要： The present invention relates to a fine pattern manufacturing apparatus using interference and a fine pattern manufacturing method using the fine pattern manufacturing apparatus, which can improve height direction resolution in a laser irradiation method. More specifically, the invention relates to a fine pattern manufacturing apparatus using interference and a fine pattern manufacturing method using the manufacturing apparatus, in which a height direction interference generation unit is included to interfere laser beams respectively having a different plane direction width, and height direction line width can be improved by irradiating an interference laser beam having an interference fringe direction of height direction on a photosensitive film.
摘要翻译：本发明涉及使用干涉的精细图案制造装置和使用精细图案制造装置的精细图案制造方法，其能够提高激光照射方法中的高度方向分辨率。更具体地，本发明涉及使用干涉的精细图案制造装置和使用该制造装置的精细图案制造方法，其中包括高度方向干涉产生单元以干扰分别具有不同的平面方向宽度的激光束和高度方向可以通过在感光膜上照射具有高度方向的干涉条纹方向的干涉激光束来提高线宽。

2. 发明申请

WO2012057388A1 APPARATUS FOR FORMING FINE PATTERNS CAPABLE OF SWITCHING DIRECTION OF POLARIZATION INTERFERENCE PATTERN IN LASER SCANNING METHOD AND METHOD OF FORMING FINE PATTERNS USING THE SAME 审中-公开
标题翻译：用于形成能够切换激光扫描方法中的偏振干涉图案的精细图案的装置和使用其形成精细图案的方法
公开(公告)号：WO2012057388A1
公开(公告)日：2012-05-03
申请号：PCT/KR2010/007982
申请日：2010-11-12
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE , RHEE, Hyug-Gyo , LEE, Yun-Woo
发明人： RHEE, Hyug-Gyo , LEE, Yun-Woo
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： G03F7/70308 , G03F7/2053 , G03F7/70141 , G03F7/70191 , G03F7/70383 , G03F7/70566
摘要： An apparatus for forming fine patterns by employing polarization interference in a laser scanning method comprises a laser generator; a calcite wave plate configured to refract at least one of the S wave and the P wave, polarized by the polarization plate, an analyzer configured to make coincident with each other the polarization directions of the S wave and the P wave having the paths spaced apart from each other by the calcite wave plate; an exposure lens; an exposure head; an X stage; and a rotation stage configured to move the substrate mounting unit around a Z axis which is a vertical axis.
摘要翻译：一种用于通过在激光扫描方法中使用偏振干涉来形成精细图案的装置包括：激光发生器; 被配置为折射由偏振板极化的S波和P波中的至少一个的方解石波片，被配置为使S波的极化方向和具有间隔开的路径的P波彼此一致的分析器由方解石波片相互作用; 曝光镜片; 曝光头; X阶段以及旋转台，被配置为使基板安装单元围绕作为垂直轴的Z轴移动。

3. 发明申请

WO2014025149A1 APPARATUS AND METHOD FOR MANUFACTURING PHASE-TYPE DIFFRACTION ELEMENT USING LASER EXPOSURE TYPE 审中-公开
标题翻译：使用激光曝光类型制造相型衍射元件的装置和方法
公开(公告)号：WO2014025149A1
公开(公告)日：2014-02-13
申请号：PCT/KR2013/006711
申请日：2013-07-26
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人： RHEE, Hyug-Gyo , YANG, Ho Soon , GHIM, Young Sik , LEE, Yun Woo
IPC分类号： G02B5/18 , G03F7/26
CPC分类号： G02B5/1871 , G02B5/1857 , G03F7/70383
摘要： The present invention relates to an apparatus for manufacturing a phase-type diffraction element using a direct laser exposure method, a method of manufacturing a phase-type diffraction element, and a phase-type diffraction element using a direct laser exposure method. More specifically, the present invention relates to an apparatus and method for manufacturing a phase-type diffraction element by radiating a laser beam on a substrate formed of photo-curable resin.
摘要翻译：本发明涉及一种使用直接激光曝光方法制造相位衍射元件的装置，相型衍射元件的制造方法和使用直接激光曝光法的相位衍射元件。更具体地，本发明涉及通过在由光固化树脂形成的基板上照射激光束来制造相型衍射元件的装置和方法。

4. 发明申请

WO2015064957A1 DUAL OPTICAL-COMB FEMTOSECOND OPTICAL FIBER LASER 审中-公开
标题翻译：双光纤激光光纤激光器
公开(公告)号：WO2015064957A1
公开(公告)日：2015-05-07
申请号：PCT/KR2014/009999
申请日：2014-10-23
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人： LEE, Joo-Hyung , RHEE, Hyug-Gyo , GHIM, Young-Sik , YANG, Ho-Soon
IPC分类号： H01S3/067 , H01S3/083 , H01S3/10
CPC分类号： H01S3/06791 , H01S3/08054 , H01S3/105 , H01S3/1115
摘要： Provided is a dual optical-comb femtosecond optical fiber laser that includes an optical fiber resonator maintained at a polarization state, a wavelength division multiplexing coupler (WDM coupler) mounted on the optical fiber resonator to provide pump light to the optical fiber resonator, a pump light source adapted to output the pump light, a gain medium doping optical fiber, mode-locking means mounted on the optical fiber resonator to induce mode-locking, an isolator mounted on the optical fiber resonator to make light traveling into the optical fiber resonator travel in one direction, and a birefringent element mounted on the optical fiber resonator to provide different refractive indices according to a polarization state of the light traveling into the optical fiber resonator.
摘要翻译：提供了一种包括保持在偏振状态的光纤谐振器的双光梳飞秒光纤激光器，安装在光纤谐振器上的波分复用耦合器（WDM耦合器），以向光纤谐振器提供泵浦光，泵适于输出泵浦光的光源，增益介质掺杂光纤，安装在光纤谐振器上的模锁定装置以引起锁模，安装在光纤谐振器上的隔离器，以使光进入光纤谐振器行进以及安装在光纤谐振器上的双折射元件，以根据传入光纤谐振器的光的偏振状态提供不同的折射率。

5. 发明申请

WO2002095326A1 SYSTEM AND METHOD FOR DETERMINING COORDINATES ON THREE-DIMENSIONAL SPACE USING BEAM PHASE INTERFERENCE 审中-公开
标题翻译：使用光束相位干扰确定三维空间坐标的系统和方法
公开(公告)号：WO2002095326A1
公开(公告)日：2002-11-28
申请号：PCT/KR2002/000957
申请日：2002-05-21
申请人： KAIST , KIM, Seong-Woo , RHEE, Hyug-Gyo
发明人： KIM, Seong-Woo , RHEE, Hyug-Gyo
IPC分类号： G01B9/02
CPC分类号： G01B11/005 , G01B11/002
摘要： Disclosed are a system and a method for setting coordinates of a three-dimensional measurer probe using a beam phase interference method. Two optical fibers are mounted inside the probe, and detecting means obtains an interference pattern generated by beam emitted from a point beam source mounted at ends of the optical fibers. After that, wave front of the interference pattern is measured and a location of the point beam source is determined through a nonlinear optimization from the wave front, and thereby the coordinates of the three-dimensional measurer probe are set. Because the two optical fibers of the inside of the probe to be measured are located in close vicinity to the three-dimensional object, the present measuring system and method can reduce a measurement error, make a structure of the system simple, and thereby reduce a manufacturing cost.
摘要翻译：公开了一种使用波束相位干扰法设置三维测量探头的坐标的系统和方法。两根光纤安装在探头内部，检测装置获得由安装在光纤端部的点光源发射的光束产生的干涉图案。之后，测量干涉图案的波前，并通过波前的非线性优化来确定点波束源的位置，由此设置三维测量探针的坐标。因为要测量的探针内部的两根光纤位于三维物体附近，所以本测量系统和方法可以减少测量误差，使系统的结构简单，从而减少制造成本。

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