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1. 发明申请

WO2010093733A3 DETECTING DEFECTS ON A WAFER 审中-公开
标题翻译：检测晶圆上的缺陷
公开(公告)号：WO2010093733A3
公开(公告)日：2010-10-28
申请号：PCT/US2010023802
申请日：2010-02-10
申请人： KLA TENCOR CORP , HUANG JUNQING , ZHANG YONG , CHEN STEPHANIE , LUO TAO , GAO LISHENG , WALLINGFORD RICHARD
发明人： HUANG JUNQING , ZHANG YONG , CHEN STEPHANIE , LUO TAO , GAO LISHENG , WALLINGFORD RICHARD
IPC分类号： H01L21/66 , G01N21/88
CPC分类号： G01N21/9501 , G01N21/8806 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Methods and systems for detecting defects on a wafer are provided.
摘要翻译：提供了用于检测晶片上的缺陷的方法和系统。

2. 发明申请

WO2009140411A2 COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR SELECTING POLARIZATION SETTINGS FOR AN INSPECTION SYSTEM 审中-公开
标题翻译：计算机实现方法，载体介质和选择用于检查系统的极化设置的系统
公开(公告)号：WO2009140411A2
公开(公告)日：2009-11-19
申请号：PCT/US2009043825
申请日：2009-05-13
申请人： KLA TENCOR CORP , WALLINGFORD RICHARD , CHEN STEPHANIE , KIRKWOOD JASON , LUO TAO , ZHANG YONG , GAO LISHENG
发明人： WALLINGFORD RICHARD , CHEN STEPHANIE , KIRKWOOD JASON , LUO TAO , ZHANG YONG , GAO LISHENG
IPC分类号： G01N21/88 , G01B11/30 , G01N21/47
CPC分类号： G01N21/21 , G01N21/9501 , G01N2021/8822 , G01N2021/8867
摘要： Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system for inspection of a layer of a wafer are provided. One method includes detecting a population of defects on the layer of the wafer using results of each of scans of the wafer performed with different combinations of polarization settings of the inspection system for illumination and collection of light scattered from the wafer. The method also includes identifying a subpopulation of the defects for each of the different combinations, each of which includes the defects that are common to at least two of the different combinations, and determining a characteristic of a measure of signal-to-noise for each of the subpopulations. The method further includes selecting the polarization settings for the illumination and the collection to be used for the inspection corresponding to the subpopulation having the best value for the characteristic.
摘要翻译：提供了计算机实现的方法，载体介质和用于选择用于检查晶片层的检查系统的偏振设置的系统。一种方法包括使用用于照射的检查系统的偏振设置的不同组合和从晶片散射的光的收集的晶片的每次扫描的结果来检测晶片层上的缺陷群。该方法还包括识别每个不同组合的缺陷的子群体，每个组合包括对于至少两个不同组合是共同的缺陷，以及确定每个组合的信噪比度量的特性的亚群。该方法还包括选择用于与用于该特征具有最佳值的亚群相对应的检查的照明和收集的偏振设置。

3. 发明专利

DE112013000627T5 Segmentierung zur Waferinspektion 未知
公开(公告)号：DE112013000627T5
公开(公告)日：2014-10-09
申请号：DE112013000627
申请日：2013-01-17
申请人： KLA TENCOR CORP
发明人： CHEN STEPHANIE , LUO TAO , ZHANG YONG
IPC分类号： G06T7/00 , G01N21/88
摘要： Verfahren und Systeme zur Segmentierung von Pixeln zur Waferinspektion werden bereitgestellt. Ein Verfahren beinhaltet die Bestimmung einer Statistik für einzelne Pixel auf Grundlage eines Merkmals der einzelnen Pixel in einem Bild, welches für einen Wafer durch ein Inspektionssystem aufgenommen wurde. Das Verfahren beinhaltet ebenfalls, die einzelnen Pixel auf Grundlage der Statistik ersten Segmenten zuzuordnen. Zusätzlich beinhaltet das Verfahren eine oder mehrere Kanten zwischen den ersten Segmenten in einem Bild der ersten Segmente zu detektieren, und eine Kantenkarte zu erzeugen, indem die eine oder mehreren Kanten auf eine Fläche projiziert werden, welche dem Bild des Wafers entspricht. Das Verfahren umfasst ferner, die einzelnen Pixel zweiten Segmenten zuzuordnen, indem die ersten Segmente und die Kantenkarte auf das Bild des Wafers angewendet werden, und dadurch das Bild segmentiert wird. Die Defektinspektion wird auf Grundlage der zweiten Segmente, denen die einzelnen Pixel zugeordnet sind, durchgeführt.

4. 发明公开

EP2396815A4 DETECTING DEFECTS ON A WAFER 审中-公开
标题翻译：缺陷对晶圆检测
公开(公告)号：EP2396815A4
公开(公告)日：2012-11-28
申请号：EP10741683
申请日：2010-02-10
申请人： KLA TENCOR CORP
发明人： HUANG JUNQING , ZHANG YONG , CHEN STEPHANIE , LUO TAO , GAO LISHENG , WALLINGFORD RICHARD
IPC分类号： H01L21/66 , G01N21/88 , G01N21/95 , G01N21/956
CPC分类号： G01N21/9501 , G01N21/8806 , H01L22/12 , H01L2924/0002 , H01L2924/00

5. 发明专利

SG11201901331YA METHOD FOR DEFOCUS DETECTION 未知
公开(公告)号：SG11201901331YA
公开(公告)日：2019-04-29
申请号：SG11201901331Y
申请日：2017-09-15
申请人： KLA TENCOR CORP
发明人： JIANG XUGUANG , LI SHIFANG , ZHANG YONG
IPC分类号： H01L21/66
摘要： Two or more color data can be combined to form a new data source to enhance sensitivity to defocus signal. Defocus detection can be performed on the newly formed data source. In a setup step, a training wafer can be used to select the best color combination, and obtain defocus detection threshold. This can include applying a segment mask, calculating mean intensities of the segment, determining a color combination that optimizes defocus sensitivity, and generating a second segment mask based on pixels that are above a threshold to sensitivity. In a detection step, the selected color combination is calculated, and the threshold is applied to obtain defocus detection result.

6. 发明专利

SG173586A1 DETECTING DEFECTS ON A WAFER 未知
公开(公告)号：SG173586A1
公开(公告)日：2011-09-29
申请号：SG2011056926
申请日：2010-02-10
申请人： KLA TENCOR CORP
发明人： HUANG JUNQING , ZHANG YONG , CHEN STEPHANIE , LUO TAO , GAO LISHENG , WALLINGFORD RICHARD
摘要： Methods and systems for detecting defects on a wafer are provided.

7. 发明公开

EP3063816A4 METHOD AND DEVICE FOR ENHANCING FUEL CELL LIFETIME 审中-公开
公开(公告)号：EP3063816A4
公开(公告)日：2018-01-31
申请号：EP14858175
申请日：2014-01-24
申请人： ZHANG YONG , MA WEI , QI ZHIGANG
发明人： ZHANG YONG , MA WEI , QI ZHIGANG
IPC分类号： H01M8/04 , H01M8/24
CPC分类号： H01M8/04231 , H01M4/926 , H01M8/04089 , H01M8/04223 , H01M8/04228 , H01M8/04238 , H01M8/04303 , H01M8/0444 , H01M8/04746 , H01M8/04753 , H01M8/04955 , H01M8/1004 , H01M8/241 , H01M8/2457 , H01M8/2475 , H01M2008/1095 , H01M2250/20 , Y02T90/32
摘要： A method for enhance lifetime of fuel cells via a device includes a step of creating a H2 environment for a stack, wherein the H2 environment is composed of H2 confined within a gas-tight enclosure of the device. The device includes an enclosure-H2-inlet port, an enclosure-H2-outlet port, a stack-H2-inlet, a stack-H2-outlet, a stack-air-inlet, a stack-air-outlet, a stack-coolant-inlet, and a stack-coolant-outlet. The device prevents air from getting into the stack when the fuel cell system is in the idling or shutdown state. It solves the problems associated with the electrode damage caused by the open circuit voltage in the entire fuel cell non-operational time period and the electrode damage caused by the formation of an air/hydrogen boundary during either the startup or shutdown process. The device eliminates the damages of the open circuit voltage to either MEAs or stacks during their storage time period.

8. 发明专利

IL278173D0 Nlrp3 modulators 未知
公开(公告)号：IL278173D0
公开(公告)日：2020-11-30
申请号：IL27817320
申请日：2020-10-20
申请人： MARKWALDER JAY A , SEITZ STEVEN P , INNATE TUMOR IMMUNITY INC , GHOSH SHOMIR , ROUSH WILLIAM R , GAVAI ASHVINIKUMAR V , SIVAPRAKASAM PRASANNA , ZHANG YONG , DONNELL ANDREW F
发明人： MARKWALDER JAY A , SEITZ STEVEN P , GHOSH SHOMIR , ROUSH WILLIAM R , GAVAI ASHVINIKUMAR V , SIVAPRAKASAM PRASANNA , ZHANG YONG , DONNELL ANDREW F
IPC分类号： A61P35/00
摘要： The present invention provides compounds of Formula (I): wherein all of the variables are as defined herein. These compounds are modulators of NLRP3, which may be used as medicaments for the treatment of proliferative disorders, such as cancer in a subject (e.g., a human).

9. 发明专利

CA2750918A1 DEVICE FOR GRASPING AND ACTIVE RELEASE OF MICRO AND NANO OBJECTS 未知
公开(公告)号：CA2750918A1
公开(公告)日：2010-08-26
申请号：CA2750918
申请日：2009-02-17
申请人： SUN YU , CHEN K BRANDON , ZHANG YONG
发明人： SUN YU , CHEN K BRANDON , ZHANG YONG
IPC分类号： B81B7/02 , B25J7/00 , B81B5/00 , B81C1/00 , G03F7/00 , H01L21/60
摘要： The present invention relates to design and microfabrication methods for forming devices that are capable of grasping and actively releasing micro or nanometer-sized objects in ambient and vacuum environments. Grasping motion is produced by one or more microactuators, and rapid, accurate, highly reproducible active release is achieved through impacting an adhered object with a high-speed plunging structure. Two fabrication processes for constructing these new types of micro and nano gripping devices are also described.

10. 发明专利

AU2019222833A1 Rubik's Cube Rotating Cabinet 未知
公开(公告)号：AU2019222833A1
公开(公告)日：2020-03-19
申请号：AU2019222833
申请日：2019-08-27
申请人： ZHANG YONG MR
发明人： ZHANG YONG
IPC分类号： A47B49/00
摘要： Rubik's Cube Cabinet This invention relates to a Rubik's cube rotating cabinet, which comprises: a base, the storage boxes, a rotating mechanism and a hinge; Each storage box is a six-sided cube, one side of which is open; The base of the structure does not move nor rotate. the first side of the base is in contact with the ground, and the second side is in contact with the different layers of storage boxes; each layer has 4 storage boxes, and the opening side of 2 of the boxes are the same in each layer and are in the opposite direction of the other 2 . The opening direction between the boxes of the adjacent layers is 90 degrees apart; each layer there is a hinge connection between two adjacent boxes; a rotating mechanism is arranged between the boxes of the adjacent ones, so that the box rotates with the rotating mechanism as a rotating shaft, and the maximum rotation can be to a 180 degrees maximum; surface of the base which is in contact with the storage boxes is provided with four rotating mechanisms, so that the first layer of the box in contact with the surface of the base rotates with the rotating mechanism as a rotating shaft; each layer of the moving device drives the rotation of the box of the next layer and when the upper and lower two boxes are opened or closed, the rotation direction of adjacent layers is opposite. Due to the illusion of misalignment of the rotating mechanism, the function and storage of the display cabinet is realized and maximized, and the visual effect is good when opening and closing. Drawing of the Product Described in Abstract

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