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    • 1. 发明授权
    • Multi-chamber wafer process equipment having plural, physically
communicating transfer means
    • 具有多个物理通信传送装置的多室晶片处理设备
    • US5286296A
    • 1994-02-15
    • US818535
    • 1992-01-09
    • Junichi SatoToshiaki HasegawaHiroshi Komatsu
    • Junichi SatoToshiaki HasegawaHiroshi Komatsu
    • C23C16/54H01L21/00H01L21/677C23C16/00A61K27/02
    • H01L21/67167C23C16/54H01L21/67184H01L21/67196H01L21/67745
    • In a multi-chamber process equipment in which a plurality of process chambers for processing a single wafer are connected with a wafer transfer chamber in parallel through respective gate valves, and a wafer transfer means is provided for carrying the wafer between the wafer transfer chamber and each process chamber through one of the gate valves, there are further provided a plurality of vacuum pumps in order to prevent cross contamination among processes, improve throughput and prevent condensation in the process chambers. The vacuum pumps are connected with the wafer transfer chamber, and designed to reduce the pressure in the wafer transfer chamber to different vacuum levels. Therefore, the degree of vacuum in the wafer transfer chamber can be set at a desired value according to the process chamber to be opened, by operating the vacuum pumps properly, so that cross contamination between the wafer transfer chamber and the process chambers is prevented effectively.
    • 在用于处理单个晶片的多个处理室通过相应的闸阀与晶片传送室并联连接的多室工艺设备中,并且提供晶片传送装置,用于在晶片传送室和 每个处理室通过一个闸阀,还提供多个真空泵,以防止工艺之间的交叉污染,提高生产量并防止处理室中的冷凝。 真空泵与晶片传送室连接,并被设计成将晶片传送室中的压力降低到不同的真空度。 因此,可以通过适当地操作真空泵,根据要打开的处理室将晶片传送室中的真空度设定为期望值,从而有效地防止晶片传送室与处理室之间的交叉污染 。
    • 4. 发明授权
    • Opening/closing device
    • 开/关装置
    • US08590560B2
    • 2013-11-26
    • US13147345
    • 2010-02-02
    • Hiroshi KomatsuMotonobu ItoKazuhiro YamanouchiKenji HasegawaIwao Ito
    • Hiroshi KomatsuMotonobu ItoKazuhiro YamanouchiKenji HasegawaIwao Ito
    • F16K31/18E02B7/36
    • E03F9/007Y10T137/7358Y10T137/7404
    • An opening/closing device includes a gate that receives a flow of a sewage, and can fall toward a downstream side of the flow, a fall prevention unit that prevents the gate from falling by supporting the gate, a support release unit that releases the support for the gate by the fall prevention unit, a first float that is arranged on the upstream side of the gate, and is smaller in specific gravity than the sewage, a surfacing prevention unit that prevents the first float from surfacing, a second float that is arranged on the upstream side of the gate, above the first float, and is smaller in specific gravity than the fluid, and a surfacing-prevention release unit that releases, resulting from surfacing of the second float, the prevention of the surfacing of the first float by the surfacing prevention unit. Further, the support release unit is activated resulting from surfacing of the first float.
    • 一种打开/关闭装置,包括:接收污水流并能够朝向流动的下游侧流入的门;防止门通过支撑门而防止门落下的防坠落单元, 用于由防坠落单元设置的闸门,布置在闸门上游侧并且比污水小的比重的第一浮子,防止第一浮标浮起的表面防止单元,第二浮子, 布置在闸门的上游侧,在第一浮子上方,并且比流体的比重小;以及由第二浮子的表面剥离而导致的防止放置单元,防止第一浮子的表面化 由防水单元浮起。 此外,支撑释放单元由于第一浮子的浮雕而被激活。
    • 6. 发明授权
    • Liquid crystal display
    • 液晶显示器
    • US07369203B2
    • 2008-05-06
    • US11302390
    • 2005-12-14
    • Hiroshi Komatsu
    • Hiroshi Komatsu
    • G02F1/1343
    • G02F1/134363
    • A liquid crystal display including: a first transparent substrate coated with a first alignment layer, a second transparent substrate coated with a second alignment layer, the second substrate facing the first transparent substrate, a liquid crystal layer between the substrates, a polarizer attached on the outer surfaces of the substrates, a pair of electrodes formed on the first substrates, and a driving circuit applying signal voltage to the electrodes. The liquid crystal molecules adjacent to the first substrate is rotated by applying the voltage, but, the liquid crystal molecule adjacent to the second substrate is fixed regardless of the applied voltage. The electrode pair, substantially straight data and common electrodes, are inclined at an angle with respect to a gate line.
    • 一种液晶显示器,包括:涂覆有第一取向层的第一透明基板,涂覆有第二取向层的第二透明基板,与第一透明基板相对的第二基板,基板之间的液晶层, 基板的外表面,形成在第一基板上的一对电极以及向电极施加信号电压的驱动电路。 与第一基板相邻的液晶分子通过施加电压而旋转,但与第二基板相邻的液晶分子是固定的,而与施加的电压无关。 电极对,基本上直的数据和公共电极相对于栅极线倾斜一定角度。
    • 7. 发明申请
    • Liquid crystal display
    • 液晶显示器
    • US20070013851A1
    • 2007-01-18
    • US11302390
    • 2005-12-14
    • Hiroshi Komatsu
    • Hiroshi Komatsu
    • G02F1/1343
    • G02F1/134363
    • A liquid crystal display including: a first transparent substrate coated with a first alignment layer, a second transparent substrate coated with a second alignment layer, the second substrate facing the first transparent substrate, a liquid crystal layer between the substrates, a polarizer attached on the outer surfaces of the substrates, a pair of electrodes formed on the first substrates, and a driving circuit applying signal voltage to the electrodes. The liquid crystal molecules adjacent to the first substrate is rotated by applying the voltage, but, the liquid crystal molecule adjacent to the second substrate is fixed regardless of the applied voltage. The electrode pair, substantially straight data and common electrodes, are inclined at an angle with respect to a gate line.
    • 一种液晶显示器,包括:涂覆有第一取向层的第一透明基板,涂覆有第二取向层的第二透明基板,与第一透明基板相对的第二基板,基板之间的液晶层, 基板的外表面,形成在第一基板上的一对电极以及向电极施加信号电压的驱动电路。 与第一基板相邻的液晶分子通过施加电压而旋转,但与第二基板相邻的液晶分子是固定的,而与施加的电压无关。 电极对,基本上直的数据和公共电极相对于栅极线倾斜一定角度。
    • 8. 发明授权
    • Coating device
    • 涂装装置
    • US07063744B2
    • 2006-06-20
    • US11206343
    • 2005-08-18
    • Hiroshi KomatsuGen Okano
    • Hiroshi KomatsuGen Okano
    • B05C1/14B32B37/12
    • B05C1/14B05C1/022Y10S118/03
    • There is provided a coating device which can quickly cope with a change in size of a container. A pair of coating belts (annular belts) (11, 15) are arranged on two sides of a conveyor (10). The coating belt (15) is rotated at a high speed while the coating belt (11) is rotated at a low speed. A container (bottle) (1) on the conveyor (10) is coated while being rotated. When the size of the container (1) is to be changed, a pressing roller (57) is moved by an adjusting mechanism (50) in accordance with the size of the container (1).
    • 提供了能够快速应对容器尺寸变化的涂布装置。 一对涂布带(环形带)(11,15)布置在输送机(10)的两侧。 当涂布带(11)以低速旋转时,涂布带(15)以高速旋转。 输送机(10)上的容器(瓶)(1)被旋转涂覆。 当要改变容器(1)的尺寸时,根据容器(1)的尺寸,通过调节机构(50)使加压辊(57)移动。