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    • 2. 发明申请
    • Acoustic wave etch rate sensor system
    • 声波蚀刻率传感器系统
    • US20060283249A1
    • 2006-12-21
    • US11156012
    • 2005-06-16
    • James LiuMichael RhodesAziz Rahman
    • James LiuMichael RhodesAziz Rahman
    • G01H13/00
    • G01N17/02G01N29/022G01N33/2888G01N2291/0224G01N2291/0226G01N2291/0256G01N2291/0422G01N2291/0423G01N2291/0426G01N2291/0427
    • An acoustic wave sensor system for monitoring the etch rate or etchability of a selective material has an acoustic wave sensing device having a piezoelectric substrate and at least one electrode coupled to the substrate for generating a propagating acoustic wave and for detecting changes in frequency or other propagation characteristics of the acoustic wave. A selective material is disposed on the substrate. Changes in propagation characteristics of the wave caused by etching of the selective material by an etchant can be analyzed to evaluate the etching rate or etchability of the selective material. The sensing system can have a wireless sensing device which device is mountable in an oil filter system for monitoring the corrosion of the engine. The sensing device can be configured as BAW, SH-SAW, SH-APM, FPM devices or other acoustic wave devices.
    • 用于监测选择性材料的蚀刻速率或蚀刻性的声波传感器系统具有声波感测装置,其具有压电衬底和耦合到衬底的至少一个电极,用于产生传播声波并检测频率或其他传播的变化 声波的特点。 选择性材料设置在基板上。 可以分析通过蚀刻剂蚀刻选择性材料引起的波的传播特性的变化,以评价选择性材料的蚀刻速率或蚀刻性。 感测系统可以具有无线感测装置,该装置可安装在用于监测发动机腐蚀的机油滤清器系统中。 感测装置可以配置为BAW,SH-SAW,SH-APM,FPM装置或其他声波装置。
    • 3. 发明申请
    • Acoustic wave lubricity sensor
    • 声波润滑传感器
    • US20060260404A1
    • 2006-11-23
    • US11132870
    • 2005-05-19
    • James LiuMichael RhodesAziz Rahman
    • James LiuMichael RhodesAziz Rahman
    • G01N29/02
    • G01N29/022G01N29/024G01N29/032G01N29/036G01N29/222G01N33/30G01N2291/0226G01N2291/0256G01N2291/0422G01N2291/0426G01N2291/0427
    • A lubricity sensor includes a flexural plate wave device and a face shear mode bulk acoustic wave device, which is associated with and located proximate to the flexural plate wave device. The face shear mode bulk acoustic wave device and the flexural plate wave device form a lubricity sensor wherein acoustic wave data produced by the flexural plate device together with the face shear mode bulk acoustic wave device when the lubricity sensor is exposed to a liquid relates directly to a lubricity of the liquid thereby providing lubricity measurement data associated with the liquid. The acoustic wave data can comprises the oscillation gain compensation, the frequency, amplitude and/or phase velocity associated with the flexural plate device and the shear mode bulk acoustic wave device such that the oscillation gain compensation, the frequency, amplitude and/or phase velocity provide an indication of the lubricity of the liquid.
    • 润滑性传感器包括弯曲板波装置和面剪切模式体声波装置,其与弯曲板波装置相关联并位于其附近。 面剪切模式体声波装置和挠曲板波装置形成润滑传感器,其中当润滑性传感器暴露于液体时,由弯曲板装置与面剪切模式体声波装置一起产生的声波数据直接关系到 液体的润滑性,从而提供与液体相关联的润滑性测量数据。 声波数据可以包括与弯曲板装置和剪切模式体声波装置相关联的振荡增益补偿,频率,幅度和/或相位速度,使得振荡增益补偿,频率,振幅和/或相速度 提供液体的润滑性的指示。
    • 4. 发明申请
    • Passive acoustic wave sensor system
    • 无源声波传感器系统
    • US20060283252A1
    • 2006-12-21
    • US11157103
    • 2005-06-17
    • James LiuMichael RhodesAziz Rahman
    • James LiuMichael RhodesAziz Rahman
    • G01N29/00
    • G01S13/755G01N29/022G01N29/2462G01N29/30G01N29/4436G01N2291/0226G01N2291/0256G01N2291/0422G01N2291/0423G01N2291/0427G01N2291/045
    • A passive acoustic wave sensor system for monitoring the quality of liquids, such as engine oil, is disclosed. The sensor system has an acoustic wave sensing device for generating a propagating acoustic wave and for detecting changes in frequency or other propagation characteristics of the acoustic wave caused by acousto-electric interactions between the liquid and the wave at an interactive region of the device. An antenna is integrated in the sensing device for receiving an interrogation signal and for transmitting the output response of the sensing device. The output response can be analyzed to determine the conductivity, pH or other electrical characteristics of the liquid. One or more reference devices may be utilized to compensate for mechanical effects of the liquid and temperature or other environmental effects. The sensing and reference devices can be configured as SH-SAW, SH-APM, FPM devices or other acoustic wave devices.
    • 公开了一种用于监测诸如机油的液体质量的被动声波传感器系统。 传感器系统具有声波传感装置,用于产生传播声波,并且用于检测在装置的交互区域处由液体和波之间的声电相互作用引起的声波的频率变化或其他传播特性。 天线集成在感测装置中,用于接收询问信号并传输感测装置的输出响应。 可以分析输出响应以确定液体的电导率,pH或其他电气特性。 可以使用一个或多个参考装置来补偿液体的机械效应和温度或其他环境影响。 感测和参考设备可以配置为SH-SAW,SH-APM,FPM设备或其他声波设备。