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    • 10. 发明申请
    • ALL-SILICON HERMETIC PACKAGE AND PROCESSING FOR NARROW, LOW-PROFILE MICROBATTERIES
    • 所有硅胶片包装和加工用于NARROW,低轮廓微型机
    • WO2017025858A1
    • 2017-02-16
    • PCT/IB2016/054651
    • 2016-08-02
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONIBM UNITED KINGDOM LIMITEDIBM (CHINA) INVESTMENT COMPANY LIMITED
    • ANDRY, PaulWEBB, BucknellTSANG, Cornelia, Kang-l
    • H01M10/04H01L21/50
    • H01M2/08H01M2/0207H01M2/026H01M6/40H01M10/0436H01M2220/30
    • A microbattery structure (101) for hermetically sealed microbatteries is provided. The microbattery structure (101) includes a first silicon substrate (1001) containing at least one pedestal which houses a cathode material (1601) of a microbattery and at least one depression (1003, 1004) which houses a first sealant material (1301) of the microbattery, the structure further includes a second silicon substrate (201) containing at least one pedestal which houses an anode material (601) of the microbattery and at least one depression (202, 204) which houses a second sealant material (801) of the microbattery. An insulated centerpiece (1401) is bonded to the first sealant material (1301) present in at least two depressions (202,204) on the first silicon substrate (1001). An interlock structure is formed by aligning and superimposing the second silicon substrate (201) on the first silicon substrate (1001) in a mortise and tenon fashion and sealing the two substrates (1001, 201) using a high force.
    • 提供了用于气密密封的微电池的微电池结构(101)。 微电池结构(101)包括第一硅衬底(1001),第一硅衬底(1001)包含容纳微电池的阴极材料(1601)的至少一个基座和容纳第一密封剂材料(1301)的至少一个凹部(1003,1004) 所述微电池还包括第二硅衬底(201),所述第二硅衬底(201)包含容纳所述微电池的阳极材料(601)的至少一个基座和至少一个容纳第二密封剂材料(801)的凹部(202,204) 微电池。 绝缘中心件(1401)与存在于第一硅衬底(1001)上的至少两个凹部(202,204)中的第一密封剂材料(1301)结合。 通过使第二硅衬底(201)以榫眼和榫头的方式对准和叠加在第一硅衬底(1001)上并且使用高力密封两个衬底(1001,201)来形成互锁结构。