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    • 3. 发明申请
    • ALTERNATIVE SURFACES FOR CONDUCTIVE PAD LAYERS OF SILICON BRIDGES FOR SEMICONDUCTOR PACKAGES
    • 用于半导体封装的硅桥导电垫层的替代表面
    • WO2017074390A1
    • 2017-05-04
    • PCT/US2015/058069
    • 2015-10-29
    • INTEL CORPORATION
    • KIM, Dae-WooSHARAN, Sujit
    • H01L23/12H01L23/48
    • H01L23/49827H01L23/13H01L23/48H01L23/49822H01L2224/14H01L2224/16225
    • Alternative surfaces for conductive pad layers of silicon bridges for semiconductor packages, and the resulting silicon bridges and semiconductor packages, are described. In an example, a semiconductor structure includes a substrate having a lower insulating layer disposed thereon. The substrate has a perimeter. A metallization structure is disposed on the lower insulating layer. The metallization structure includes conductive routing disposed in a dielectric material stack. First and second pluralities of conductive pads are disposed in a plane above the metallization structure. Conductive routing of the metallization structure electrically connects the first plurality of conductive pads with the second plurality of conductive pads. An upper insulating layer is disposed on the first and second pluralities of conductive pads. The upper insulating layer has a perimeter substantially the same as the perimeter of the substrate.
    • 描述了用于半导体封装的硅桥的导电焊盘层的替代表面以及所得到的硅桥和半导体封装。 在一个示例中,半导体结构包括其上设置有下绝缘层的衬底。 基材具有周边。 金属化结构设置在下绝缘层上。 该金属化结构包括设置在介电材料堆叠中的导电路径。 第一和第二多个导电焊盘设置在金属化结构上方的平面中。 金属化结构的导电布线将第一多个导电焊盘与第二多个导电焊盘电连接。 上绝缘层设置在第一和第二多个导电焊盘上。 上绝缘层的周边与衬底的周边基本相同。
    • 4. 发明申请
    • PROTECTIVE LAYER DURING SCRIBING
    • 保护层在切割期间
    • WO2005034214A2
    • 2005-04-14
    • PCT/US2004/032458
    • 2004-09-29
    • INTEL CORPORATIONSHARAN, SujitDEBONIS, Thomas
    • SHARAN, SujitDEBONIS, Thomas
    • H01L21/00
    • H05K3/0029H01L21/3043H01L21/78H05K3/0052H05K2201/10977H05K2203/0769H05K2203/1383
    • A method including forming a chemically soluble coating on a plurality exposed contacts on a surface of a circuit substrate; scribing the surface of the substrate along scribe areas; and after scribing, removing a portion of the coating. A method including forming a circuit structure comprises a plurality of exposed contacts on a surface, a location of the exposed contacts defined by a plurality of scribe streets; forming a coating comprising a chemically soluble material on the exposed contacts; scribing the surface of the substrate along the scribe streets; and after scribing, removing the coating. A method including coating a surface of a circuit substrate comprising a plurality of exposed contacts with a chemically soluble material; scribing the surface of the substrate along scribe areas; removing the coating; and sawing the substrate in the scribe areas.
    • 包括在电路基板的表面上的多个暴露的触点上形成化学可溶涂层的方法; 沿着划线区划划基板的表面; 并在划片后,去除一部分涂层。 一种包括形成电路结构的方法包括:在表面上的多个暴露的触点,暴露的触点的位置由多个划道限定; 在暴露的触点上形成包含化学可溶材料的涂层; 沿划线道划线基板的表面; 划片后,去除涂层。 一种方法,包括用化学可溶材料涂布包括多个暴露的接触的电路衬底的表面; 沿着划线区划划基板的表面; 去除涂层; 并在切割区域切割基板。