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2. 发明申请

US20050211890A1 Method for evaluating semiconductor device error and system for supporting the same 失效
标题翻译：评估半导体器件误差的方法及其支持系统
公开(公告)号：US20050211890A1
公开(公告)日：2005-09-29
申请号：US11037105
申请日：2005-01-19
申请人： Hidefumi Ibe , Yasuo Yahagi , Hideaki Kameyama
发明人： Hidefumi Ibe , Yasuo Yahagi , Hideaki Kameyama
IPC分类号： G01R31/30 , G06F9/44 , G06F11/22 , G06F12/16 , G06F17/18 , G06F17/50 , G11C11/412 , G11C29/50 , G11C29/56 , G01V5/10
CPC分类号： G01R31/31816 , G01R31/002 , G01R31/2849 , G01R31/2881 , G01R31/30
摘要： When resistivity against errors caused by cosmic ray neutrons in a semiconductor device is evaluated, the storage in the evaluation apparatus stores multiple spectrum data of white neutrons having different spectrum shapes, and multiple SEE counts obtained by the white neutron method using this multiple spectrum data. A computing section performs processing, with respect to each spectrum data, to read out the spectrum data from the storage, divide the data into multiple energy groups, calculates and stores a total flux of each energy group. Furthermore, the computing section reads out from the storage, the SEE counts with respect to each of the multiple spectrum data and the total flux of each energy group, substitutes the SEE counts and the total flux into a simultaneous equation, where a product of matrix elements indicating the total flux of each of the energy groups as to each of the multiple spectrum data and vectors indicating the SEE cross section of each of the energy groups represents the SEE count as to each of the multiple spectrum data, and calculates the SEE cross section for each of the energy groups. Subsequently, the computing section performs a calculation so that parameters are calculated, which determine a formula of the approximate function of the SEE cross section as a function of energy, so that computed values of error counts obtained by integration of multiple spectra and the approximate function sufficiently match the actual measured values thereof. With the processing as described above, there has been achieved an error evaluation in the semiconductor device using white neutrons independent from an accelerator.
摘要翻译：评估半导体装置中由宇宙射线中子引起的误差的电阻率时，评价装置中的存储存储具有不同光谱形状的白色中子的多个光谱数据，以及使用该多光谱数据通过白中子法获得的多个SEE计数。计算部对每个频谱数据进行处理，从存储器读出频谱数据，将数据分割成多个能量组，计算并存储各能量组的总磁通量。此外，计算部分从存储器读出相对于多个频谱数据中的每一个和每个能量组的总通量的SEE计数，将SEE计数和总通量替换为联立方程，其中矩阵的乘积指示每个能量组对于每个多个频谱数据和指示每个能量组的SEE横截面的矢量的总能量的元素表示对于多个频谱数据中的每一个的SEE计数，并且计算SEE交叉每个能量组的部分。随后，计算部分执行计算，从而计算参数，其确定作为能量的函数的SEE截面的近似函数的公式，使得通过积分多个光谱获得的误差计数值和近似函数充分匹配其实际测量值。通过如上所述的处理，已经在使用独立于加速器的白色中子的半导体器件中实现了误差评估。

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