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1. 发明申请

WO2010049652A9 DISPOSITIF ET PROCEDE DE MESURES POLARIMETRIQUES SPECTROSCOPIQUES DANS LE DOMAINE VISIBLE ET PROCHE INFRAROUGE 审中-公开
公开(公告)号：WO2010049652A9
公开(公告)日：2010-05-06
申请号：PCT/FR2009/052087
申请日：2009-10-28
申请人： HORIBA JOBIN YVON SAS , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , ECOLE POLYTECHNIQUE , CATTELAN, Denis , GARCIA-CAUREL, Enric , DE MARTINO, Antonello , DREVILLON, Bernard
发明人： CATTELAN, Denis , GARCIA-CAUREL, Enric , DE MARTINO, Antonello , DREVILLON, Bernard
IPC分类号： G01N21/21
摘要： L'invention concerne un système polarimétrique spectroscopique sur un large domaine spectral, comprenant une source de lumière apte à émettre un faisceau lumineux incident sur un domaine de longueur d'onde, un générateur d'états de polarisation (PSG), un analyseur d'états de polarisation (PSA) et un détecteur. Le PSG et le PSA comprennent des moyens de modulation de la polarisation du faisceau lumineux. Selon l'invention, les moyens de modulation de la polarisation du PSG sont aptes à générer une séquence de m états de polarisation avec m > 4 à chaque longueur d'onde de mesure, les moyens de modulation de la polarisation du PSA sont aptes à déterminer une séquence de n états de polarisation avec n > 4 à chaque longueur d'onde de mesure, et les moyens de détection sont aptes à acquérir une séquence de N mesures avec 16

2. 发明申请

WO2007071480A1 A BROADBAND ELLIPSOMETER/POLARIMETER SYSTEM 审中-公开
标题翻译：宽带测量仪/偏光仪系统
公开(公告)号：WO2007071480A1
公开(公告)日：2007-06-28
申请号：PCT/EP2006/067860
申请日：2006-10-27
申请人： ECOLE POLYTECHNIQUE , GARCIA-CAUREL, Enric , DE MARTINO, Antonello , DREVILLON, Bernard
发明人： GARCIA-CAUREL, Enric , DE MARTINO, Antonello , DREVILLON, Bernard
IPC分类号： G01N21/21 , G01J4/04
CPC分类号： G01J4/04 , G01N21/211
摘要： The present invention concerns a broadband ellipsometer / polarimeter system for analysing a sample (8) comprising an illumination source (5) emitting a polychromatic light beam (12), a polarisation state generator (PSG) (6) including a fixed linear polarizer (13) and a substantially achromatic retarder (21 ) mounted on a rotating holder (14), a sample holder (3), a polarisation state analyser (PSA) (10) including a fixed linear polarizer (20) and a substantially achromatic retarder (22) mounted on a rotating holder (19), a primary detection system (11 ) measuring the intensities at each wavelength of the light beam transmitted through said PSA (10), optics to collimate the beam into the PSG (6) and into the PSA (10) and to focus the beam into the sample surface (8) and the detector (11 ). According to the invention, said linear polarizer (20) and said substantially achromatic retarder (22) in the PSA (10) are identical to the linear polarizer (13) and the substantially achromatic retarder (21 ) of the PSG (6) but mounted in a reverse order, said rotating holders (14, 19) run in a stepper mode allowing a set of four selected orientation angles for the retarders (21 , 22), said four selected orientation angles being optimized in order to maintain the condition numbers of the modulation and analysis matrices associated respectively with the PSG (6) and the PSA (10), over 0.2.
摘要翻译：本发明涉及用于分析包括发射多色光束（12）的照明源（5），包括固定线性偏振器（13）的偏振态发生器（PSG）（6））的样品（8）的宽带椭偏仪/偏振计系统）和安装在旋转保持器（14）上的基本上消色差的延迟器（21），样品保持器（3），包括固定线性偏振器（20）和基本上消色差延迟器（22）的偏振态分析器（PSA））安装在旋转保持器（19）上的主要检测系统（11），测量透过所述PSA（10）的光束的每个波长处的强度的光学器件，用于将光束准直到PSG（6）中并进入PSA （10）并将光束聚焦到样品表面（8）和检测器（11）中。根据本发明，PSA（10）中的所述线性偏振器（20）和所述基本消色差延迟器（22）与PSG（6）的线性偏振器（13）和基本消色差延迟器（21）相同，但安装以相反的顺序，所述旋转保持器（14,19）以步进模式运行，允许针对延迟器（21,22）的一组四个选定的取向角，所述四个选定的取向角度被优化以便维持条件数分别与PSG（6）和PSA（10）相关联的调制和分析矩阵超过0.2。

3. 发明公开

EP1963822A1 A BROADBAND ELLIPSOMETER/POLARIMETER SYSTEM 审中-公开
标题翻译：宽带椭偏仪/偏振系统
公开(公告)号：EP1963822A1
公开(公告)日：2008-09-03
申请号：EP06807610.8
申请日：2006-10-27
申请人： ECOLE POLYTECHNIQUE
发明人： GARCIA-CAUREL, Enric , DE MARTINO, Antonello , DREVILLON, Bernard
IPC分类号： G01N21/21 , G01J4/04
CPC分类号： G01J4/04 , G01N21/211
摘要： The present invention concerns a broadband ellipsometer / polarimeter system for analysing a sample (8) comprising an illumination source (5) emitting a polychromatic light beam (12), a polarisation state generator (PSG) (6) including a fixed linear polarizer (13) and a substantially achromatic retarder (21 ) mounted on a rotating holder (14), a sample holder (3), a polarisation state analyser (PSA) (10) including a fixed linear polarizer (20) and a substantially achromatic retarder (22) mounted on a rotating holder (19), a primary detection system (11 ) measuring the intensities at each wavelength of the light beam transmitted through said PSA (10), optics to collimate the beam into the PSG (6) and into the PSA (10) and to focus the beam into the sample surface (8) and the detector (11 ). According to the invention, said linear polarizer (20) and said substantially achromatic retarder (22) in the PSA (10) are identical to the linear polarizer (13) and the substantially achromatic retarder (21 ) of the PSG (6) but mounted in a reverse order, said rotating holders (14, 19) run in a stepper mode allowing a set of four selected orientation angles for the retarders (21 , 22), said four selected orientation angles being optimized in order to maintain the condition numbers of the modulation and analysis matrices associated respectively with the PSG (6) and the PSA (10), over 0.2.

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