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1. 发明授权

US5585220A Resist composition with radiation sensitive acid generator 失效
公开(公告)号：US5585220A
公开(公告)日：1996-12-17
申请号：US566025
申请日：1995-12-01
申请人： Gregory Breyta , Richard A. DiPietro , Donald C. Hofer , Hiroshi Ito
发明人： Gregory Breyta , Richard A. DiPietro , Donald C. Hofer , Hiroshi Ito
IPC分类号： G03F7/004 , G03F7/039 , H01L21/027
CPC分类号： G03F7/0045 , Y10S430/111 , Y10S430/115
摘要： The invention relates to a polymeric, radiation-sensitive resist composition comprising (i) iodonium sulfonate radiation sensitive acid generator; (ii) a polymer; and (iii) an acid labile compound.

2. 发明授权

US4081742A Quantitative analysis of nuclear magnetic resonance spectra having solvent peaks 失效
标题翻译：具有溶剂峰的核磁共振谱的定量分析
公开(公告)号：US4081742A
公开(公告)日：1978-03-28
申请号：US755271
申请日：1976-12-29
申请人： Donald C. Hofer , Vincent N. Kahwaty , Carl R. Valentino
发明人： Donald C. Hofer , Vincent N. Kahwaty , Carl R. Valentino
IPC分类号： G01N24/08 , G01R33/46 , G01R33/00
CPC分类号： G01R33/46
摘要： A method is described for the quantitative analysis of a solution in which the solvent produces a nuclear magnetic resonant (NMR) spectral peak that dominates the system. A first spectrum containing the peak is made by operation of a nuclear magnetic resonant spectrometer at a first gain setting. The NMR apparatus is a pulse-modulated, Fourier-transform type spectrometer. A second spectrum is produced in which a 180.degree. pulse is applied to invert the spectral component magnetization followed after a period of time by a 90.degree. pulse. The period of time is sufficient to allow the solvent or component producing the unwanted peak to relax from the inverted state to a point where there is minimum magnetization along the longitudinal axis. At this point, in many solutions the other components have completely relaxed so that the 90.degree. pulse produces a free induction decay signal which, after undergoing the Fourier-transformation, yields a spectrum that does not include any significant peak due to the solvent. Thereafter, the quantitative analysis is performed by measuring the areas under the respective component peaks and simultaneously solving a series of equations in which the weight of the various components is proportional to the respective areas under the peaks and to the gain settings of the spectrometer.
摘要翻译：描述了一种溶液的定量分析方法，其中溶剂产生支配系统的核磁共振（NMR）光谱峰。通过在第一增益设置下的核磁共振光谱仪的操作来进行含有峰的第一光谱。 NMR装置是脉冲调制的傅里叶变换型光谱仪。产生第二个频谱，其中施加180°脉冲以在一段时间之后90分钟脉冲将频谱分量磁化反转。这段时间足以使得产生不需要的峰的溶剂或组分从反转状态松弛到沿着纵向轴线具有最小磁化强度的点。此时，在许多解决方案中，其他组分已经完全松弛，因此90°脉冲产生一个自由感应衰减信号，在经历傅里叶变换之后，产生不包括由溶剂引起的任何明显峰值的光谱。此后，通过测量各个分量峰值下的面积并同时求解一系列方程式来进行定量分析，其中各种分量的重量与峰值下的各个区域以及分光计的增益设置成比例。

3. 发明授权

US4464460A Process for making an imaged oxygen-reactive ion etch barrier 失效
标题翻译：制作成像氧反应离子蚀刻屏障的方法
公开(公告)号：US4464460A
公开(公告)日：1984-08-07
申请号：US508644
申请日：1983-06-28
申请人： Hiroyuki Hiraoka , Donald C. Hofer , Robert D. Miller , Lester A. Pederson , Carlton G. Willson
发明人： Hiroyuki Hiraoka , Donald C. Hofer , Robert D. Miller , Lester A. Pederson , Carlton G. Willson
IPC分类号： G03C5/00 , G03F7/075 , G03F7/09 , G03F7/26 , H01L21/027
CPC分类号： G03F7/094 , G03F7/0754
摘要： A process for making an image oxygen-reactive ion etch barrier using a polysilane that is resistant to resistive ion etching and is also a positive acting resist.
摘要翻译：使用耐电阻离子蚀刻的聚硅烷制造图像氧反应离子蚀刻阻挡层的方法，也是正性抗蚀剂。

4. 发明授权

US4612210A Process for planarizing a substrate 失效
标题翻译：用于平坦化衬底的工艺
公开(公告)号：US4612210A
公开(公告)日：1986-09-16
申请号：US759030
申请日：1985-07-25
申请人： Donald C. Hofer , Debra B. LaVergne , Robert J. Twieg , Willi Volksen
发明人： Donald C. Hofer , Debra B. LaVergne , Robert J. Twieg , Willi Volksen
IPC分类号： B05D5/00 , B05D7/26 , H01L21/312 , B05D5/12 , B05D3/02
CPC分类号： H01L21/312 , Y10T428/31721
摘要： A surface coating of high glass temperature and superior mechanical properties along with excellent planarization and gap filling is used to coat substrates. The coating comprises a polyamide alkyl ester from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220.degree. C.
摘要翻译：使用高玻璃温度和优异的机械性能以及优异的平坦化和间隙填充的表面涂层来涂覆基材。涂层包含溶解在含有至少10％沸点高于220℃的共溶剂的溶剂的溶剂中的均苯四酸烷基二酯的聚酰胺烷基酯和对位的芳族二胺。

5. 发明授权

US4110681A NMR field frequency lock system 失效
标题翻译： NMR场频锁系统
公开(公告)号：US4110681A
公开(公告)日：1978-08-29
申请号：US769142
申请日：1977-02-16
申请人： Donald C. Hofer , Vincent N. Kahwaty , Carl R. Valentino
发明人： Donald C. Hofer , Vincent N. Kahwaty , Carl R. Valentino
IPC分类号： G05F7/00 , G01R33/389 , G01R33/46 , G01R33/08
CPC分类号： G01R33/46 , G01R33/389
摘要： An NMR (nuclear magnetic resonance) spectrometer has a permanent magnet provided with a field coil. A lock system cyclically pulses a deuterium lock sample to produce a FID (free induction decay) signal that is analyzed by measuring the time interval during which the FID signal crosses the zero axis a predetermined number of times. The measured interval is compared to a predetermined interval or set point, and the current through the field coil is adjusted in the direction tending to correct the field strength so as to maintain the measured interval equal to the preset interval. Such measurement, comparison and adjustment are done several times each second. When the sample is removed, the lock system retains the last field setting achieved with the sample.
摘要翻译： NMR（核磁共振）光谱仪具有设置有场线圈的永磁体。锁定系统周期性地脉冲氘锁定样本以产生FID（自由感应衰减）信号，该信号通过测量FID信号跨过零轴预定次数的时间间隔来分析。将测量的间隔与预定的间隔或设定点进行比较，并且在趋向于校正场强的方向上调整通过励磁线圈的电流，以便将测量的间隔保持为预设间隔。这样的测量，比较和调整每秒进行几次。当样品被取出时，锁定系统保留用样品实现的最后一个场设置。

6. 再颁专利

USRE34524E Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines 失效
标题翻译：基于间二烷基二氢均苯四酸二苯酯和芳族二胺的聚酰亚胺涂料组合物
公开(公告)号：USRE34524E
公开(公告)日：1994-01-25
申请号：US733049
申请日：1991-07-18
申请人： Richard D. Diller, deceased , Anthony F. Arnold , Ying Y. Cheng , Patricia M. Cotts , Donald C. Hofer , Mahmoud M. Khojasteh , Elwood H. Macy , Prabodh R. Shah , Willi Volksen
发明人： Richard D. Diller, deceased , Anthony F. Arnold , Ying Y. Cheng , Patricia M. Cotts , Donald C. Hofer , Mahmoud M. Khojasteh , Elwood H. Macy , Prabodh R. Shah , Willi Volksen
IPC分类号： C09D179/08 , B05D5/12 , C08G73/10 , C08L79/08 , C08G69/26
CPC分类号： B05D5/12 , C08G73/1032 , C08G73/1067 , C08G73/1071 , C08L79/08 , C09D179/08
摘要： A composition for the application of a planar polymide coating having a glass transition temperature above 300.degree. C. comprises a solution in an anhydrous, aprotic solvent of .Iadd.the reaction product .Iaddend.of an aromatic diamine and a .[.dialkyldihydrogen.]. .Iadd.dialkyl .Iaddend.pyromellitate .Iadd.diacyl chloride .Iaddend.which .[.is more than.]. .Iadd.comprises about .Iaddend.90% .Iadd.or more .Iaddend.meta isomer.
摘要翻译：玻璃化转变温度高于300℃的平面聚酰亚胺涂层的组合物包括在无水非质子溶剂中的芳族二胺和（ - 二烷基二氢 - ）（+ （+二氯化物+）（+多于 - ）（+包含约+）90％（+或更多+）间位异构体。

7. 发明授权

US4291272A Method for reducing homonuclear broadening in magnetic resonance spectra of solids 失效
标题翻译：降低固体磁共振谱中同核变宽的方法
公开(公告)号：US4291272A
公开(公告)日：1981-09-22
申请号：US108254
申请日：1979-12-28
申请人： Donald C. Hofer , Raymond D. Kendrick , Costantino S. Yannoni
发明人： Donald C. Hofer , Raymond D. Kendrick , Costantino S. Yannoni
IPC分类号： G01R33/20 , G01N24/08 , G01R33/46 , G01N27/00
CPC分类号： G01R33/4641
摘要： A method for line narrowing in nuclear magnetic resonance (NMR) studies in solids is described. The method employs quasi-continuous amplitude modulation of an rf field wherein the field is eliminated at intervals for short periods of time at or about the time when the amplitude for both the maximum and minimum approach zero, these intervals creating windows where the NMR signal can be observed.
摘要翻译：描述了固体中核磁共振（NMR）研究中的线窄化方法。该方法采用rf场的准连续幅度调制，其中在最大和最小逼近为零的时间的时间或之间以短时间段间隔地消除该场，这些间隔产生其中NMR信号可以的窗口被观察。

8. 发明授权

US06482566B1 Hydroxycarborane photoresists and process for using same in bilayer thin film imaging lithography 有权
标题翻译：羟基碳硼烷光刻胶及其在双层薄膜成像光刻中的应用方法
公开(公告)号：US06482566B1
公开(公告)日：2002-11-19
申请号：US09507522
申请日：2000-02-18
申请人： Donald C. Hofer , Scott A. MacDonald , Arpan P. Mahorowala , Robert D. Miller , Josef Michl , Gregory M. Wallraff
发明人： Donald C. Hofer , Scott A. MacDonald , Arpan P. Mahorowala , Robert D. Miller , Josef Michl , Gregory M. Wallraff
IPC分类号： G03C173
CPC分类号： G03F7/0392 , G03F7/0042 , Y10S430/106 , Y10S430/111 , Y10S430/115
摘要： A photoresist composition which includes hydroxycarborane either incorporated as a monomeric dissolution modifier or as pendent groups on a polymer backbone. The photoresist composition is particularly useful in a bilayer thin film imaging lithographic process in which ultraviolet radiation-imaging in a wavelength range of between about 365 nm and about 13 nm is employed.
摘要翻译：一种光致抗蚀剂组合物，其包括作为单体溶解改性剂掺入或作为聚合物主链上的悬挂基团引入的羟基碳硼烷。光致抗蚀剂组合物在双层薄膜成像光刻工艺中特别有用，其中采用波长范围在约365nm至约13nm之间的紫外线辐射成像。

9. 发明授权

US5045608A Polyimide-poly(phenylquinoxaline) block copolymers 失效
标题翻译：聚酰亚胺 - 聚（苯基喹喔啉）嵌段共聚物
公开(公告)号：US5045608A
公开(公告)日：1991-09-03
申请号：US413361
申请日：1989-09-27
申请人： James L. Hedrick, Jr. , Donald C. Hofer , Jeffrey W. Labadie , Sally A. Swanson , Willi Volksen
发明人： James L. Hedrick, Jr. , Donald C. Hofer , Jeffrey W. Labadie , Sally A. Swanson , Willi Volksen
IPC分类号： C08G73/06 , C08G73/10
CPC分类号： C08G73/1042 , C08G73/0694 , C08G73/1085
摘要： Block copolymers of polyimide and poly (phenylquinoxaline) have been synthesized. They are useful, particularly as dielectric layers in thin film multilayer structures. The most preferred embodiments are formed from polyimides which are those from pyromellitic dianhydride and oxydianiline. The most preferred poly (phenylquinoxaline) is a monofunctional oligomer, which yields the best microstructure.

10. 发明授权

US4849501A Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines 失效
标题翻译：基于间二烷基二氢均苯四酸二苯酯和芳族二胺的聚酰亚胺涂料组合物
公开(公告)号：US4849501A
公开(公告)日：1989-07-18
申请号：US183123
申请日：1988-04-19
申请人： Richard D. Diller, deceased , Anthony F. Arnold , Ying Ying Cheng , Patricia M. Cotts , Donald C. Hofer , Mahmoud Khojasteh , Elwood H. Macy , Prabodh R. Shah , Willi Volksen
发明人： Richard D. Diller, deceased , Anthony F. Arnold , Ying Ying Cheng , Patricia M. Cotts , Donald C. Hofer , Mahmoud Khojasteh , Elwood H. Macy , Prabodh R. Shah , Willi Volksen
IPC分类号： C09D179/08 , B05D5/12 , C08G73/10 , C08L79/08
CPC分类号： B05D5/12 , C08G73/1032 , C08G73/1067 , C08G73/1071 , C08L79/08 , C09D179/08
摘要： A composition for the application of a planar polyimide coating having a glass transition temperature above 300.degree. C. comprises a solution in an anhydrous, aprotic solvent of an aromatic diamine and a dialkyldihydrogen pyromellitate which is more than 90% meta isomer.

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