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    • 1. 发明授权
    • Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
    • 具有用于大面积处理的内部线性天线的感应耦合等离子体处理装置
    • US07338577B2
    • 2008-03-04
    • US10438221
    • 2003-05-15
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • C23C16/00H01L21/306
    • H01J37/321
    • An inductively coupled plasma processing apparatus for a large area processing, the inductively coupled plasma processing apparatus comprising: a reaction chamber; a plurality of linear antennas horizontally arranged at an inner upper portion of the reaction chamber while being spaced from each other by a predetermined distance for receiving induced RF power, the linear antennas being coupled to each other at an outer portion of the reaction chamber, the linear antennas including at least one bending antenna formed by connecting first ends of adjacent antennas, which are exposed to the outer portion of the reaction chamber, to each other; and at least one magnet positioned adjacent to the linear antennas for creating a magnetic field perpendicularly crossing an electric field created by the linear antennas in such a manner that electrons perform a spiral movement.
    • 一种用于大面积处理的电感耦合等离子体处理装置,所述电感耦合等离子体处理装置包括:反应室; 水平地布置在反应室的内部上部的多个线性天线,同时彼此隔开预定距离以接收感应RF功率,线性天线在反应室的外部彼此耦合, 线性天线,其包括通过将暴露于反应室的外部的相邻天线的第一端连接而形成的至少一个弯曲天线; 以及邻近线性天线定位的至少一个磁体,用于产生垂直于由线性天线产生的电场的磁场,使得电子执行螺旋运动。
    • 2. 发明授权
    • Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
    • 具有用于大面积处理的内部线性天线的感应耦合等离子体处理装置
    • US08974630B2
    • 2015-03-10
    • US12332927
    • 2008-12-11
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • H01L21/306C23C16/00H01J37/32
    • H01J37/321
    • An inductively coupled plasma processing apparatus for a large area processing includes a reaction chamber and a bending type antenna structure. The bending type antenna structure includes bending type linear antennas. Each of the bending type linear antennas has a first end, a second end and a bended portion. The bending type linear antennas are arranged horizontally in parallel with the substrate to pass through the reaction chamber inside the reaction chamber. The bending type linear antennas are spaced apart from each other. A bended portion of a bending type linear antenna is protruded out of the reaction chamber, a first end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to an RF power, and a second end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to a ground.
    • 用于大面积处理的电感耦合等离子体处理装置包括反应室和弯曲型天线结构。 弯曲型天线结构包括弯曲型线性天线。 每个弯曲型线性天线具有第一端,第二端和弯曲部。 弯曲型线状天线与基板水平配置,通过反应室内的反应室。 弯曲型线性天线彼此间隔开。 弯曲型线性天线的弯曲部分突出到反应室外,每个弯曲型线性天线的第一端从反应室突出并耦合到RF功率,并且每个的第二端 弯曲型线性天线从反应室突出并耦合到地面。
    • 3. 发明申请
    • INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LINEAR ANTENNA FOR LARGE ARE PROCESSING
    • 具有内部线性天线的电感耦合等离子体处理装置
    • US20090173445A1
    • 2009-07-09
    • US12332927
    • 2008-12-11
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • Geun-Young YeomYoung-Joon LeeKyong-Nam Kim
    • C23F1/00
    • H01J37/321
    • An inductively coupled plasma processing apparatus for a large area processing includes a reaction chamber and a bending type antenna structure. The bending type antenna structure includes bending type linear antennas. Each of the bending type linear antennas has a first end, a second end and a bended portion. The bending type linear antennas are arranged horizontally in parallel with the substrate to pass through the reaction chamber inside the reaction chamber. The bending type linear antennas are spaced apart from each other. A bended portion of a bending type linear antenna is protruded out of the reaction chamber, a first end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to an RF power, and a second end of each of the bending type linear antennas is protruded out of the reaction chamber and is coupled to a ground.
    • 用于大面积处理的电感耦合等离子体处理装置包括反应室和弯曲型天线结构。 弯曲型天线结构包括弯曲型线性天线。 每个弯曲型线性天线具有第一端,第二端和弯曲部。 弯曲型线状天线与基板水平配置,通过反应室内的反应室。 弯曲型线性天线彼此间隔开。 弯曲型线性天线的弯曲部分突出到反应室外,每个弯曲型线性天线的第一端从反应室突出并耦合到RF功率,并且每个的第二端 弯曲型线性天线从反应室突出并耦合到地面。
    • 5. 发明申请
    • Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
    • 具有用于大面积处理的内部线性天线的感应耦合等离子体处理装置
    • US20070101938A1
    • 2007-05-10
    • US11643664
    • 2006-12-22
    • Geun-Young YeomYoung-Joon LeeKyoung-Nam Kim
    • Geun-Young YeomYoung-Joon LeeKyoung-Nam Kim
    • C23F1/00C23C16/00
    • H01J37/321
    • An inductively coupled plasma processing apparatus for a large area processing, the inductively coupled plasma processing apparatus comprising: a reaction chamber; a plurality of linear antennas horizontally arranged at an inner upper portion of the reaction chamber while being spaced from each other by a predetermined distance for receiving induced RF power, the linear antennas being coupled to each other at an outer portion of the reaction chamber, the linear antennas including at least one bending antenna formed by connecting first ends of adjacent antennas, which are exposed to the outer portion of the reaction chamber, to each other; and at least one magnet positioned adjacent to the linear antennas for creating a magnetic field perpendicularly crossing an electric field created by the linear antennas in such a manner that electrons perform a spiral movement.
    • 一种用于大面积处理的电感耦合等离子体处理装置,所述电感耦合等离子体处理装置包括:反应室; 水平地布置在反应室的内部上部的多个线性天线,同时彼此隔开预定距离以接收感应RF功率,线性天线在反应室的外部彼此耦合, 线性天线,其包括通过将暴露于反应室的外部的相邻天线的第一端连接而形成的至少一个弯曲天线; 以及邻近线性天线定位的至少一个磁体,用于产生垂直于由线性天线产生的电场的磁场,使得电子执行螺旋运动。
    • 6. 发明申请
    • Apparatus and method for displaying an image of a speaker in a push-to-talk communication service in a push-to-talk portable terminal
    • 用于在即按即说便携式终端中的即按即说通信服务中显示扬声器的图像的装置和方法
    • US20060040686A1
    • 2006-02-23
    • US11184773
    • 2005-07-20
    • Young-Joon Lee
    • Young-Joon Lee
    • H04Q7/20
    • H04W4/10H04W76/45
    • Apparatus and method are provided for displaying a push-to-talk (PTT) communication service subscriber having the right to speak in a portable terminal capable of using a PTT communication service. When the PTT communication service is executed, information of a PTT communication service subscriber having the speaking right is received. Image information is extracted from the received information of the PTT communication service subscriber having the speaking right. The extracted image information is displayed. While the PTT communication service is executed, an image of a buddy having the speaking right can be displayed. Accordingly, the PTT communication service can be realistically executed, the speaking right that is frequently shifted can be clearly identified, and user convenience can be improved.
    • 提供了用于显示能够使用PTT通信服务的便携式终端具有发言权的一键通(PTT)通信服务用户的装置和方法。 当执行PTT通信服务时,接收具有发言权的PTT通信服务用户的信息。 从具有说话权的PTT通信服务用户的接收信息中提取图像信息。 显示提取的图像信息。 当执行PTT通信服务时,可以显示具有说话权的伙伴的图像。 因此,可以实际执行PTT通信服务,可以清楚地识别频繁移动的说话权,并且可以提高用户便利性。
    • 9. 发明授权
    • Apparatus and method for displaying an image of a speaker in a push-to-talk communication service in a push-to-talk portable terminal
    • 用于在即按即说便携式终端中的即按即说通信服务中显示扬声器的图像的装置和方法
    • US07720498B2
    • 2010-05-18
    • US11184773
    • 2005-07-20
    • Young-Joon Lee
    • Young-Joon Lee
    • H04B7/00
    • H04W4/10H04W76/45
    • Apparatus and method are provided for displaying a push-to-talk (PTT) communication service subscriber having the right to speak in a portable terminal capable of using a PTT communication service. When the PTT communication service is executed, information of a PTT communication service subscriber having the speaking right is received. Image information is extracted from the received information of the PTT communication service subscriber having the speaking right. The extracted image information is displayed. While the PTT communication service is executed, an image of a buddy having the speaking right can be displayed. Accordingly, the PTT communication service can be realistically executed, the speaking right that is frequently shifted can be clearly identified, and user convenience can be improved.
    • 提供了用于显示能够使用PTT通信服务的便携式终端具有发言权的一键通(PTT)通信服务用户的装置和方法。 当执行PTT通信服务时,接收具有发言权的PTT通信服务用户的信息。 从具有说话权的PTT通信服务用户的接收信息中提取图像信息。 显示提取的图像信息。 当执行PTT通信服务时,可以显示具有说话权的伙伴的图像。 因此,可以实际执行PTT通信服务,可以清楚地识别频繁移动的说话权,并且可以提高用户便利性。