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1. 发明专利

JP2004138425A Temperature measuring instrument for pressure type flow controller 有权
公开(公告)号：JP2004138425A
公开(公告)日：2004-05-13
申请号：JP2002301421
申请日：2002-10-16
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 大見忠弘 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , MATSUMOTO ATSUSHI , DOI RYOSUKE , IKEDA SHINICHI , SUGIYAMA KAZUHIKO
IPC分类号： G01F1/42 , G01F1/50 , G01K7/18 , G01L1/22 , G01L9/00
摘要： PROBLEM TO BE SOLVED: To actualize a pressure type flow controller for controlling the rate of an orifice passing flow with high accuracy by simultaneously measuring a fluid pressure and a fluid temperature at a same point in the fluid. SOLUTION: This pressure type flow controller controls the rate of flow passing an orifice by computing Qc = K×P 1 with an upstream side pressure assumed as P 1 when the flow velocity of a fluid passing through an orifice 4 is at the velocity of sound. The controller is characterized in that an upstream side pressure sensor comprises a resistance element whose electrical resistance varies under pressure and this resistance element as the pressure sensor is simultaneously used as a temperature sensor. In this resistance element, four resistors 41a to 41d are disposed on a pressure receiving surface to form a bridge circuit using the four resistors as four sides. A constant-current power supply 43 is connected between input terminals 42a and 42b of the bridge circuit. A voltage V p between output terminals 44a and 44b is used to detect a fluid pressure P while a voltage V T between the input terminals is used to detect fluid temperature T, thus causing the resistance element to function as a pressure-temperature sensor 10. COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2004045424A Mounting structure of pressure detector 审中-公开
公开(公告)号：JP2004045424A
公开(公告)日：2004-02-12
申请号：JP2003330204
申请日：2003-09-22
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 大見忠弘 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , HIROSE TAKASHI , IDETA EIJI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI , YOSHIKAWA KAZUHIRO , KAGATSUME SATORU , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI
IPC分类号： G01L19/00
摘要： PROBLEM TO BE SOLVED: To prevent fluctuation of an output characteristic or a temperature characteristic caused by distortion of a diaphragm by stress when a diaphragm type pressure detector is integrated into a conduit.
SOLUTION: In this mounting structure of the pressure detector, the pressure detector formed by fixing integrally a diaphragm base equipped with a diaphragm and a sensor base having a built-in sensor element operated by displacement of the diaphragm is inserted through a gasket into an insertion hole of a fixture body fixed on a pipe conduit or a mechanical device, and the pressure detector is pressed and fixed gastightly by a presser member inserted into the insertion hole from the upper side. In the structure, the presser member abuts on the body part upper face of the diaphragm base and the gasket abuts on the body part lower face thereof respectively, and a shallow groove is formed in a ring shape on the inside position of the abutting part with the presser member on the body part upper face and a shallow groove is formed in a ring shape on the inside position of the abutting part with the gasket on the body part lower face, and distortion generated by pressing by the presser member is absorbed by both shallow grooves.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2009116904A Pressure type flow control device 有权
标题翻译：压力式流量控制装置
公开(公告)号：JP2009116904A
公开(公告)日：2009-05-28
申请号：JP2009025342
申请日：2009-02-05
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , MATSUMOTO ATSUSHI , DOI RYOSUKE , IKEDA SHINICHI , SUGIYAMA KAZUHIKO
IPC分类号： G05D7/06 , G01F1/00 , G01F1/50 , G05D16/20
摘要： PROBLEM TO BE SOLVED: To provide a pressure type flow control device capable of controlling the amount of flow that passes through an orifice with a high degree of precision, by simultaneously measuring fluid pressure and fluid temperature at the same point in a fluid under noncritical expansion conditions.
SOLUTION: The pressure type flow control device includes: an orifice 4 for controlling the amount of flow; a control valve 22 disposed at the pipework on the upstream side of the orifice 4; an upstream-side pressure sensor 10 disposed between the orifice 4 and the control valve 22 for detecting an upstream side pressure P
1; and a downstream-side pressure sensor 12 disposed at the pipework on the downstream side of the orifice 4 for detecting a downstream-side pressure P
2 . The amount of flow that passes through the orifice is controlled by the opening and closing of the control valve, while the amount of flow that passes through the orifice is calculated from the upstream-side pressure P
1 and the downstream-side pressure P
2 by the flow expression Qc=KP
2
m (P
1 -P
2 )
n . The upstream-side pressure sensor 10 or the downstream-side pressure sensor 12 is constituted of a resistance element of which electrical resistance changes, when pressure is applied; and this resistance element as a pressure sensor is used simultaneously as a temperature sensor.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种压力式流量控制装置，其能够通过同时测量流体中的相同点处的流体压力和流体温度来以高精度控制流过孔的流量在非临界膨胀条件下。解决方案：压力式流量控制装置包括：用于控制流量的孔口4; 设置在孔口4的上游侧的管路处的控制阀22; 设置在孔4和控制阀22之间的上游侧压力传感器10，用于检测设置在下游侧的管道上的上游侧压力P 1; 和下游侧压力传感器12 用于检测下游侧压力P 2 的孔口4。通过控制阀的打开和关闭来控制通过孔口的流量，而从上游侧压力P 1 计算通过孔口的流量，下游侧压力P 2 通过流动表达式Qc = KP 2 P 2 ） n 。上游侧压力传感器10或下游侧压力传感器12由施加压力时电阻变化的电阻元件构成; 并且作为压力传感器的该电阻元件同时用作温度传感器。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2005010108A Automatic zero point correction device for pressure sensor, pressure control device and pressure type flow control device 有权
标题翻译：压力传感器自动零点校正装置，压力控制装置和压力型流量控制装置
公开(公告)号：JP2005010108A
公开(公告)日：2005-01-13
申请号：JP2003177135
申请日：2003-06-20
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , HINO SHOICHI , TAKAHASHI EIJI , SAEGUSA SHIN , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE , UENOYAMA TOYOMI , SUGITA KATSUYUKI
IPC分类号： G01L19/02 , G01L19/00 , G01L19/04
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting accurately the pressure regardless of its using period by correcting automatically the temporal zero point drift of the pressure sensor, and a pressure control device and a flow control device using it. SOLUTION: This pressure sensor using a semiconductor pressure-sensitive element for measuring liquid pressure is operated as follows: a sensor output voltage from the pressure sensor is outputted to the outside through an amplifier; the sensor output voltage is inputted into a temporal zero point drift correction means of the pressure sensor through a D/A converter; it is determined whether the sensor output voltage is larger than a set value or not by a sensor output determination means in the temporal zero point drift correction means; an operation condition of the pressure sensor is determined by an operation condition determination means in the temporal zero point drift correction means; and when the sensor output voltage is larger than the set value and the operation condition of the pressure sensor is under the operation condition set beforehand, a zero point correction voltage having the same voltage as the sensor output voltage and the reverse polarity thereto is inputted into an offset terminal of the amplifier through the D/A converter and the temporal zero point drift of the pressure sensor is deleted. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过自动校正压力传感器的时间零点漂移以及使用该压力传感器的压力控制装置和流量控制装置来精确地检测压力而不管其使用周期的压力传感器。解决方案：使用半导体压敏元件测量液体压力的压力传感器如下操作：来自压力传感器的传感器输出电压通过放大器输出到外部; 传感器输出电压通过D / A转换器输入压力传感器的时间零点漂移校正装置; 通过时间零点漂移校正装置中的传感器输出确定装置确定传感器输出电压是否大于设定值; 压力传感器的操作条件由时间零点漂移校正装置中的操作条件确定装置确定; 并且当传感器输出电压大于设定值并且压力传感器的操作条件处于预先设置的操作条件下时，将具有与传感器输出电压相同的电压和与其相反极性的零点校正电压输入到通过D / A转换器的放大器的偏移端子和压力传感器的时间零点漂移被删除。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2010218571A Pressure type flow control device 有权
标题翻译：压力式流量控制装置
公开(公告)号：JP2010218571A
公开(公告)日：2010-09-30
申请号：JP2010118206
申请日：2010-05-24
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , MATSUMOTO ATSUSHI , DOI RYOSUKE , IKEDA SHINICHI , SUGIYAMA KAZUHIKO
IPC分类号： G05D7/06 , G01F1/00 , G01F1/50 , G01L9/00
摘要： PROBLEM TO BE SOLVED: To achieve a pressure type flow control device, measuring fluid pressure and a fluid temperature of the same point in a fluid at the same time and controlling an orifice passing flow with high accuracy.
SOLUTION: In the pressure type flow control device, a pressure sensor and a temperature sensor are formed as one pressure-temperature sensor 10 in which a constant current power supply is connected between input terminals of a bridge circuit taking four resistors formed on pressure receiving surfaces as four sides to detect a fluid pressure by a voltage change between output terminals thereof, and a fluid temperature is detected by a voltage change between the input terminals. The pressure type flow control device includes: a gas temperature correction means for making correction corresponding to the fluid temperature T and converting it to a fluid pressure P
1 , and making temperature correction with a proportional constant K of a flow arithmetic expression corresponding to the fluid temperature T from the temperature converting means; and a comparator circuit for taking a difference between the correction operation flow Q
C and a preset flow Q
S as a control signal and outputting the same to a control valve.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了实现压力式流量控制装置，同时测量流体中的相同点的流体压力和流体温度，并以高精度控制孔流动流动。解决方案：在压力式流量控制装置中，形成压力传感器和温度传感器作为一个压力 - 温度传感器10，其中恒定电流电源连接在桥接电路的输入端之间，作为四个侧面的压力接收表面通过其输出端之间的电压变化来检测流体压力，并且通过输入端子之间的电压变化来检测流体温度。压力型流量控制装置包括：气体温度校正装置，用于根据流体温度T进行校正，并将其转换为流体压力P 1 ，并且使用比例常数K进行温度校正对应于来自温度转换装置的流体温度T的流动算术表达式; 以及用于将校正操作流程Q C 和预设流程Q SB SB之间的差作为控制信号的比较器电路，并将其输出到控制阀。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2008286812A Differential flow meter 有权
标题翻译：差分流量计
公开(公告)号：JP2008286812A
公开(公告)日：2008-11-27
申请号：JP2008228485
申请日：2008-09-05
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA SHINICHI , NISHINO KOJI , NAKAMURA OSAMU , DOI RYOSUKE , MATSUMOTO ATSUSHI
IPC分类号： G01F1/36 , G01F1/00 , G01F1/50
摘要： PROBLEM TO BE SOLVED: To provide a differential flow meter, having such a simple structure as to lower the cost of production, which can highly accurately measure flow rates with an error E of not more than (1%SP) over a wide flow rate range of 100% to 1% in real time and in an in-line state.
SOLUTION: The differential flow meter that measures a flow rate range of 100% to 10% of the maximum flow rate and a differential flow meter that measures a flow rate range of 10% to 1% of the maximum flow rate are combined. Fluid to be measured is selectively supplied to either of the differential flow meters through a switching valve in accordance with the flow rate ranges. This makes it possible to highly accurately measure flow rates over a wide flow rate range.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种差分流量计，具有降低生产成本的简单结构，其可以高精度地测量流量，误差E不超过（1％SP）的误差E超过宽流量范围为100％至1％，实时和在线状态。
解决方案：测量流量范围为最大流量的100％至10％的差分流量计和测量最大流量的10％至1％流量范围的差分流量计相结合。根据流量范围通过切换阀选择性地将待测量的流体提供给差分流量计中的任一个。这使得可以在宽的流量范围内高精度地测量流量。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2005024421A Differential pressure type flow meter and differential pressure type flow control system 有权
标题翻译：差压式流量计和差压式流量控制系统
公开(公告)号：JP2005024421A
公开(公告)日：2005-01-27
申请号：JP2003190988
申请日：2003-07-03
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA SHINICHI , NISHINO KOJI , NAKAMURA OSAMU , DOI RYOSUKE , MATSUMOTO ATSUSHI
IPC分类号： G01F1/00 , G01F1/42 , G01F1/50 , G01F1/88 , G01F7/00 , G05D7/06
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To lower the manufacturing cost of a differential pressure type flow meter by simplifying the structure and to perform accurate flow measurement with an error E of (1%SP) or less in a wide flow range of 100% to 1%, in real time and an in-line state.
SOLUTION: The differential pressure type flow meter comprises an orifice, a detector of pressure P
1 upstream the orifice, a detector of pressure P
2 downstream the orifice, a detector of fluid temperature upstream the orifice, and a control operation circuit for calculating a fluid flow rate Q flowing in the orifice by using the detected pressures P
1 and P
2 and the detected temperature T of each detectors. The fluid flow rate Q is calculated with Q=C
1 × P
1 / √T × [(P
2 /P
1 )
m -(P
2 /P
1 )
n ]
1/2 (here, C
1 is a constant of proportion, m and n are constants).
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题为了通过简化结构并且在100％的宽流动范围内以误差E为（1％SP）以下的误差E来降低差压式流量计的制造成本）到1％，实时和在线状态。解决方案：差压式流量计包括孔口，孔口上游压力P 1 的检测器，孔口下游的压力P 2 检测器，a 在孔口上游的流体温度检测器，以及控制运算电路，用于通过使用检测压力P 1 和P 2 计算在孔中流动的流体流量Q，每个检测器的检测温度T。流体流量Q用Q = C ×P 1 /√T×[（P 2 / P 1 ）米 - （P 2 / P 1 ）名词] 1/2 （这里，C 1 是比例常数，m和n是常数）。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004264881A Flow control method of hydrogen fluoride gas, and flow control device for hydrogen fluoride gas used therefor 有权
公开(公告)号：JP2004264881A
公开(公告)日：2004-09-24
申请号：JP2003010162
申请日：2003-01-17
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , MIZUSAWA KANEYOSHI , TAKAHASHI EIJI , UNO TOMIO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI
IPC分类号： G05D7/06
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To enable the precise flow control, with respect to a flow rate range of about 3-300 SCCM, of HF gas to be supplied to a vacuum chamber or the like by use of a pressure type flow control device. SOLUTION: In this flow control method of hydrogen fluoride gas using the pressure type flow control device, the flow rate of the gas passing through an orifice in the state where the ratio P 2 /P 1 of the gas pressure P 1 on the orifice upstream side gas and the gas pressure P 2 on the orifice downstream side is retained at a critical pressure ratio of gas or less is calculated as Q=KP 1 (wherein K is a constant). The hydrogen fluoride gas is passed through the orifice while heating the pressure type flow control device to a temperature of 40°C or higher. COPYRIGHT: (C)2004,JPO&NCIPI

9. 发明专利

JP2007004644A Flow rate range variable flow control device 有权
标题翻译：流量范围可变流量控制装置
公开(公告)号：JP2007004644A
公开(公告)日：2007-01-11
申请号：JP2005185845
申请日：2005-06-27
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SAITO MASAHITO , HINO SHOICHI , SHIMAZU TSUTOMU , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G05D7/00 , G01F1/00 , G01F1/42 , G01F1/48 , G01F1/684 , G01F7/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and to reduce the facility cost by enabling accurate flow control of a fluid in a further wide flow area by use of one flow control device. SOLUTION: The pressure type flow control device is adapted to calculate the flow rate of a fluid passing through an orifice 8 using an orifice upstream pressure P 1 and/or an orifice downstream pressure P 2 as Qc=KP 1 (K is a proportionality factor) or Qc=KP 2 m (P 1 -P 2 ) n (K is a proportionality factor, and m and n are constant numbers). In this pressure type flow control device, a fluid passage between the downstream side of a control valve and a fluid supplying conduit is formed of at least two or more parallel fluid passages, and orifices differed in fluid flow characteristic are interposed in the parallel fluid passages, respectively. The fluid in a small flow area is distributed to one orifice in flow control of the fluid in the small flow area, and the fluid in a large flow area is switchingly distributed to the other orifice in flow control of the fluid in the large flow area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用一个流量控制装置，能够在更宽的流动区域中对流体进行精确的流量控制，从而使流量控制装置小型化并降低设备成本。解决方案：压力型流量控制装置适于计算通过孔口上游压力P 1 和/或孔口下游压力P 2 作为Qc = KP 1 （K是比例因子）或Qc = KP 2 m（SP （K是比例因子，m和n是常数）。在该压力式流量控制装置中，控制阀的下游侧与流体供给管道之间的流体通路由至少两个以上的平行流体通路形成，并且流体流动特性不同的孔插入到并联流体通路，分别。小流量区域中的流体在小流量区域中的流体的流动控制中分配到一个孔口，并且在大流量区域中的流体的流量控制中，大流量区域中的流体被切换地分配到另一个孔口。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2005011258A Device and method for distributary supply of gas to chamber from gas supply plant equipped with flow-control device 有权
标题翻译：从配有流量控制装置的气体供应设备向气室分配供气的装置和方法
公开(公告)号：JP2005011258A
公开(公告)日：2005-01-13
申请号：JP2003177134
申请日：2003-06-20
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： SUGIYAMA KAZUHIKO , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE , UENOYAMA TOYOMI
IPC分类号： F17D1/04 , G05D7/06 , H01L21/02 , H01L21/31
CPC分类号： G05D7/00 , G05D7/0623 , G05D7/0652 , G05D7/0658 , G05D7/0664 , G05D11/132 , Y10T137/0379 , Y10T137/0396 , Y10T137/2521 , Y10T137/2529 , Y10T137/2562 , Y10T137/263 , Y10T137/2663 , Y10T137/7761 , Y10T137/8175
摘要： PROBLEM TO BE SOLVED: To accurately, quickly and divergently supply a predetermined flow rate Q of the processing gas at a desirable flow ratio Q 1 /Q 2 into a chamber from a gas supply plant equipped with a flow rate control device. SOLUTION: This device supplies the predetermined flow rate Q of the gas G divergently at a predetermined flow ratio Q 1 /Q 2 into the chamber C through a plurality of branch supply lines GL 1 , GL 2 and shower plates 3, 4 fixed to the terminals from the gas supply plant 1 equipped with the flow rate control device QCS. Opening and closing valves OV 1 , OV 2 are respectively interposed on a plurality of branch supply lines GL 1 , GL 2 . A bypass line BL 1 branched from the GL 1 in the downstream of the OV 1 , a BL 2 branched from the GL 2 in the downstream of the OV 2 , a pressure type divided flow rate controller FV connected to the BL 1 and the BL 2 , a pressure sensor PS 1 measuring the pressure in the GL 1 , and a pressure sensor PS 2 measuring the pressure in the GL 2 are interposed. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了准确地，以期望的流量比Q＆lt; SB＆gt; / Q＆lt; SB＆gt; 2＆lt; / SB＆gt;将处理气体的预定流量Q快速地和分散地供给到来自配备有流量控制装置的气体供给装置。
解决方案：该装置以预定的流量比Q / Q 2 将气体G的预定流量Q通过多个分支供应线GL 1，SB <2>和从配备有流量控制装置QCS的气体供应设备1固定到端子的淋浴板3,4。打开和关闭阀OV 1 ，OV 2 分别插入在多个分支供应管线GL 1 ，GL SB>。在OV 1 的下游从GL 1 分支的旁路管线BL 1 ，支化的BL 2 在OV 2 的下游的GL 2 中，连接到BL 1 的压力型分流量控制器FV， SB> 2 ，测量GL 1 中的压力的压力传感器PS 1 和测量插入GL 2 中的压力。版权所有（C）2005，JPO＆NCIPI

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