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    • 3. 发明专利
    • Imprint apparatus
    • IMPRINT APPARATUS
    • JP2011005732A
    • 2011-01-13
    • JP2009151124
    • 2009-06-25
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • MATSUSHITA TAKESHIUCHIDA SHINJI
    • B29C59/02B29C33/50H01L21/027
    • PROBLEM TO BE SOLVED: To make a stamper and a molded material separable in high reliability in an imprint apparatus for transferring the uneven pattern of the stamper to the molded material.SOLUTION: The imprint apparatus has a suction holding means for sucking/holding the stampers 14 and 16 and an elastic deformation means for elastically deforming the stampers 14 and 16 held by the suction holding means to urge the separation of the molded material 12 and the stampers 14 and 16 from each other. The suction holding means can exert suction power on the periphery of the stamper, and the elastic deformation means can deform the stamper to make the central part of the stamper protrude toward the molded material.
    • 要解决的问题:在压印装置中制造压模和模塑材料,以便将压模的不均匀图案转印到模制材料上,可靠地分离。解决方案:压印装置具有用于吸附/保持压模的吸附保持装置 14和16以及用于使由吸引保持装置保持的冲压机14和16弹性变形以促使模制材料12和冲压机14和16彼此分离的弹性变形装置。 吸引保持装置可以对压模的周边施加吸力,并且弹性变形装置可以使压模变形,使得压模的中心部分向模制材料突出。
    • 5. 发明专利
    • Method for manufacturing magnetic recording medium
    • 制造磁记录介质的方法
    • JP2009117013A
    • 2009-05-28
    • JP2007292346
    • 2007-11-09
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • UCHIDA SHINJI
    • G11B5/84G11B5/851
    • G11B5/8404
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing discrete track media and patterned media, which enables a magnetic recording layer having excellent magnetic characteristics to be obtained without imparting damage to a crystal orientation control layer which becomes a surface when forming the magnetic recording layer.
      SOLUTION: The method for manufacturing the magnetic recording media includes: a step of forming a soft magnetic layer on a substrate; a step of forming a first crystal orientation control layer on the soft magnetic layer; a step of providing a depression in at least part of the first crystal orientation control layer; a step of performing heat treatment of the first crystal orientation control layer; and a step of forming a magnetic recording layer on the first crystal orientation control layer.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:提供一种用于制造离散轨道介质和图案化介质的方法,其使得能够获得具有优异磁特性的磁记录层,而不会对成为表面的晶体取向控制层造成损害 磁记录层。 解决方案:磁记录介质的制造方法包括:在基板上形成软磁性层的工序; 在软磁性层上形成第一晶体取向控制层的步骤; 在所述第一晶体取向控制层的至少一部分中设置凹陷的步骤; 执行第一晶体取向控制层的热处理的步骤; 以及在第一晶体取向控制层上形成磁记录层的步骤。 版权所有(C)2009,JPO&INPIT
    • 6. 发明专利
    • Mold, manufacturing method therefor and magnetic recording medium
    • 模具及其制造方法及磁记录介质
    • JP2008126450A
    • 2008-06-05
    • JP2006312058
    • 2006-11-17
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • UCHIDA SHINJI
    • B29C33/38B29L17/00B81C99/00G11B5/65G11B5/84H01L21/027
    • G03F7/0017B82Y10/00B82Y40/00G03F7/0002Y10T428/24479
    • PROBLEM TO BE SOLVED: To provide a mold which can inexpensively provide a magnetic recording medium capable of obtaining a signal having higher signal intensity and a high S/N by a nanoimprint, a manufacturing method therefor and a magnetic recording medium made by using the mold. SOLUTION: The manufacturing method for the mold used for the nanoimprint has at least a transfer process which transfers an uneven pattern on a resist layer by peeling a master mold having an uneven pattern after press-bonding the master mold to a resist layer formed on the surface of a substrate, and an uneven pattern forming process which forms the uneven pattern on the substrate by exposing an under substrate in a recessed part of the resist where the uneven pattern is formed by the transfer process and etching the exposed substrate. The manufacturing method for the mold is characterized in that the substrate is side etched during the substrate etching in the uneven pattern forming process. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供一种能够廉价地提供能够通过纳米压印获得具有较高信号强度和高S / N的信号的磁记录介质的模具,其制造方法和由 使用模具。 解决方案:用于纳米压印的模具的制造方法至少具有通过在将母模压接到抗蚀剂层之后剥离具有不均匀图案的母模而在抗蚀剂层上转印不均匀图案的转印工艺 形成在基板的表面上,以及凹凸图案形成工艺,其通过在转印工艺中形成不均匀图案的抗蚀剂的凹部中暴露下面的基板,并蚀刻暴露的基板,在基板上形成凹凸图案。 模具的制造方法的特征在于,在不均匀图案形成工序中,在基板蚀刻期间对基板进行侧面蚀刻。 版权所有(C)2008,JPO&INPIT
    • 7. 发明专利
    • Method of manufacturing magnetic recording medium
    • 制造磁记录介质的方法
    • JP2011181123A
    • 2011-09-15
    • JP2010041807
    • 2010-02-26
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • UCHIDA SHINJI
    • G11B5/84
    • G11B5/855C23C14/042C23C14/48
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic recording medium of excellent productivity which does not deteriorate a ratio (duty) of a magnetic portion and a separating portion caused by the horizontal expansion of a magnetic characteristic damage, and is manufactured by a simple method. SOLUTION: The method includes a separating portion forming process. The process alters magnetic characteristics of a magnetic recording layer at positions corresponding to concave portions of a mask layer by ion implantation or exposure to an activated halogen-containing reactive gas via the mask layer having a concavo-convex pattern formed thereon by imprinting, thereby forming the separating portion that magnetically separates magnetic portions of the magnetic recording layer in positions corresponding to convex portions of the mask layer. A resist material forming the mask layer varies the shape of the concavo-convex pattern after an imprinting process, and a taper angle of a stepped portion of the concavo-convex pattern in the mask layer when starting the separating portion forming process is between 66° and 88°. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种生产率优异的磁记录介质的制造方法,其不会劣化由磁特性损伤的水平膨胀引起的磁性部分和分离部分的比例(占空比),以及 通过简单的方法制造。 解决方案:该方法包括分离部分形成过程。 该方法通过离子注入在掩模层的凹部对应的位置处改变磁记录层的磁特性,或通过印刷在其上形成凹凸图案的掩模层暴露于活化的含卤素反应气体,从而形成 所述分离部分在与所述掩模层的凸部对应的位置中磁性地分离所述磁记录层的磁性部分。 形成掩模层的抗蚀剂材料在压印过程之后改变凹凸图案的形状,并且当开始分离部分形成工艺时,掩模层中的凹凸图案的阶梯部分的锥角在66° 和88°。 版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Imprint method and its apparatus
    • 印刷方法及其设备
    • JP2009262351A
    • 2009-11-12
    • JP2008111763
    • 2008-04-22
    • Fuji Electric Device Technology Co Ltd富士電機デバイステクノロジー株式会社
    • UCHIDA SHINJI
    • B29C59/02H01L21/027
    • G11B5/855
    • PROBLEM TO BE SOLVED: To provide a method which enabales nano-imprint working to efficiently be carried out and its apparatus. SOLUTION: The method includes at least an alignment process for setting a substrate coated with a resist for a room temperature imprint and a mold with an uneven pattern formed on its offset surface in an incorporation tool, a press process for pushing the pattern surface of the mold to the resist surface of the substrate, and a separation process in which the mold is separated from the substrate to be separated into the substrate, the mold, and the incorporation tool. In the imprint method, each process is carried out in an independent unit in which one process is carried out, and a conveyance process in which, from the alignment process to the separation process, the mold and the substrate are made a pair by the incorporation tool and conveyed between units is set between the units. The imprint apparatus has at least an alignment unit in which the alignment process is carried out, a press unit in which the press process is carried out, and a separation unit in which the separation process is carried out and is provided with a conveyance means for carrying out the conveyance process. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种有效地实现纳米压印工作的方法及其装置。 解决方案:该方法至少包括用于设置涂覆有用于室温压印的抗蚀剂的基材和在其结合工具中形成在其偏移表面上的具有不平坦图案的模具的对准过程,用于推动图案 模具的表面到基板的抗蚀剂表面,以及分离工艺,其中模具与基板分离以分离成基板,模具和结合工具。 在压印方法中,每个处理在其中执行一个处理的独立单元中进行,并且通过结合使得从对准处理到分离处理,模具和基板成对的输送处理 在单元之间设置工具并在单元之间传送。 压印装置至少具有进行对准处理的对准单元,进行加压处理的压制单元和进行分离处理的分离单元,并且设置有用于 进行运输过程。 版权所有(C)2010,JPO&INPIT