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1. 发明专利

JP2004028647A Method for analyzing low coherent interference fringe 有权
公开(公告)号：JP2004028647A
公开(公告)日：2004-01-29
申请号：JP2002182130
申请日：2002-06-21
申请人： Fuji Photo Optical Co Ltd , 富士写真光機株式会社
发明人： KATSURA SOUTO
IPC分类号： G01B9/02 , G01J9/04 , G01M11/00 , G01N21/27 , G01N21/45
CPC分类号： G01B9/02083 , G01B9/0201 , G01B9/0209
摘要： PROBLEM TO BE SOLVED: To make it possible to measure and analyze low coherent interference fringes at high speed by representing the intensity distribution of the low coherent interference pattern by an intensity distribution function using an envelope function, calculating an unknown quantity of the light intensity distribution funciton based on the light intensity of each shift level shifting the phase, and determining a peak position of an envelope curve on the basis of the result of the calculation.
SOLUTION: The light intensity distribution of the interference fringe is represented by the envelope function (S1). The phase is shifted and the light intensity is measured at every shift level (S3). The unknown quantity of the light intensity distribution function is calculated based on the measured light intensity of each shift level (S4). The peak position of the envelope curve is determined on the basis of the result of the calculated unknown quantity (S5). The height of a specimen surface is determined based on the peak position.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2002296003A METHOD AND DEVICE FOR ANALYZING FOURIER TRANSFORM FRINGE 失效
公开(公告)号：JP2002296003A
公开(公告)日：2002-10-09
申请号：JP2001097156
申请日：2001-03-29
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO , MATSUDA SHINICHI
IPC分类号： G01B9/02
摘要： PROBLEM TO BE SOLVED: To provide a stable analysis result by making it possible to uniquely and stably perform determination work on whether a phase is positive or negative by comparing a spectrum corresponding to an existing carrier frequency whose polarity is unknown with a spectrum obtained by additionally superimposing thereon an additional carrier frequency whose polarity is known to determine whether the existing carrier frequency is positive or negative. SOLUTION: An original interference fringe image with the existing space carrier frequency superimposed thereon is obtained by a CCD imaging camera (T1), the fringe image data are Fourier-transformed (T2), and the coordinate of the first spectrum corresponding to the existing frequency is obtained in a frequency coordinate system (T3). Then, the additional carrier frequency is additionally superimposed on the original fringe (T4), an interference fringe image for comparison therewith is obtained by the imaging camera (T5), the fringe image data for comparison are Fourier-transformed (T6), and the coordinate of the second spectrum is obtained in the coordinate system (T7). By comparing the coordinates of the two spectra with each other, whether the existing frequency is positive or negative is determined (T8) to determine whether the phase is positive or negative.

3. 发明专利

JP2004286595A Method of adjusting inclination of clamp device 有权
公开(公告)号：JP2004286595A
公开(公告)日：2004-10-14
申请号：JP2003078979
申请日：2003-03-20
申请人： Fuji Photo Optical Co Ltd , 富士写真光機株式会社
发明人： KATSURA SOUTO , KOBAYASHI FUMIO
IPC分类号： G01B11/26 , G01M11/00 , G02B6/36
摘要： PROBLEM TO BE SOLVED: To precisely adjust the inclination attitude of a clamp device toward an object by a targeted angle of α simply and at a low cost by using a reference subject, using a tip inclination angle β which is smaller than the targeted angle α.
SOLUTION: The clamp device holding a reference ferrule 450 is placed at an initial position where a perpendicular surface Q of a shaft A is parallel to a reference surface P of a microscope interferometer 1, and a relative inclination angle γ is measured, which is the inclination angle of a tip surface 453 of the reference ferule 450 with respect to the reference surface P. Then, the clamp device is tilted toward the object so as to tilt the tip surface 453 of the reference ferule 450 with respect to the reference surface P, and the inclination angle δ with respect to the surface P of the surface 453 is measured. The inclination attitude of the clamp device is adjusted, such that the measured relative inclination angle δ coincides with a difference ε in the targeted angle α and the inclination angle γ.
COPYRIGHT: (C)2005,JPO&NCIPI

4. 发明专利

JP2004037167A Method for measuring tilt of subject 审中-公开
公开(公告)号：JP2004037167A
公开(公告)日：2004-02-05
申请号：JP2002192764
申请日：2002-07-01
申请人： Fuji Photo Optical Co Ltd , 富士写真光機株式会社
发明人： KATSURA SOUTO , KOBAYASHI FUMIO , TANAKA KUNIHIKO
IPC分类号： G01B9/02 , G01B11/26 , G02B6/36
CPC分类号： G01B9/02084 , G01B9/02032 , G01B11/26
摘要： PROBLEM TO BE SOLVED: To simply and accurately measure a tilt of an axis of a columnar member at a low cost indispensable to regulate the tilt of the axis by detecting a relative angle between a tip end face of the member and a reference surface of an interferometer unit at two rotary positions of the member, and calculating the tilt of the axis of the member by using a predetermined arithmetic formula.
SOLUTION: A method for measuring the tilt of the axis of the columnar member includes the steps of holding a ferrule 420 by a clamping unit 300, and measuring relative angles (m
x1 and m
x2 ) of a tip end face 424 and the reference surface of the interferometer unit 1 at the first rotary position (Fig. (A)) of the ferrule 420 and a second rotary position (Fig. (B)) rotated at 180° from a first rotary position. An angle β is obtained by β=(m
x1 +m
x2 -180)/2, wherein α is an angle of the tip end face 424 of the ferrule 420 to a normal of the axis S of the ferrule 420, and β is an angle of the axis S of the ferrule 420 to an optical axis of the interferometer unit 1.
COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2002303508A PHASE SHIFT FRINGE ANALYZING METHOD AND DEVICE USING THE SAME 审中-公开
公开(公告)号：JP2002303508A
公开(公告)日：2002-10-18
申请号：JP2001399179
申请日：2001-12-28
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO
IPC分类号： G01B9/02 , G01B11/26 , G01J9/00
摘要： PROBLEM TO BE SOLVED: To eliminate influence due to an error of a relative shift amount between an observed object and a reference without complicating a device structure or increasing its cost for quickly and excellently analyzing a fringe by specifying position data of at least three optional phase positions and applying predetermined computing to carrier fringe superimposed fringe image data in each phase position when fringe image data are analyzed by a phase shifting method for finding the phase of the observed object. SOLUTION: An interference fringe image having a superimposed carrier fringe and carrying shape information of the observed object is obtained in a plurality of phase shift positions while driving a phase shift element (S1). Each of the interference fringe image data is Fourier transformed (S2), and a carrier frequency (fx , fy ) is searched to find C(η-fx , ζ-fy ) (S3). C(η-fx , ζ-fy ) is inverse Fourier transformed (S4) for finding a relative displacement (S5), while a relative inclination is found (S6), and the respective positions are found (S7). The phase of the observed object is found by calculation using the found positions.

6. 发明专利

JP2001343208A METHOD AND APPARATUS FOR FRINGE ANALYSIS USING FOURIER TRANSFORM 失效
公开(公告)号：JP2001343208A
公开(公告)日：2001-12-14
申请号：JP2000359142
申请日：2000-11-27
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO
IPC分类号： G01B9/02 , G01J9/02
摘要： PROBLEM TO BE SOLVED: To reduce a computing error when a Fourier transform is executed to fringe image data to which a carrier frequency is introduced by a method wherein carrier fringes generated due to a relative inclination between a wave front from an object to be observed and a wave front from a reference face can set the inclination so as to become the prescribed multiple of a fundamental frequency decided by shape information on the object to be observed and by an observation means. SOLUTION: An interference fringe image on which the carrier fringes are superposed and which expresses the shape information on the object to be observed is obtained (S1). The Fourier transform is executed to the image (S2). The carrier frequency is extracted (S3). Whether the carrier frequency is at the integral multiple of the fundamental frequency expressing the shape of the object to the observed or not is judged (S4). When the carrier frequency is not at the integral multiple, the inclination of the reference face is found (S5). The drive amount of PZT is adjusted in such a way that the carrier frequency becomes the integral multiple of the fundamental frequency of a fringe pattern which expresses the shape of the object to be observed (S6, S7). This procedure is returned to S1. When it is judged that the drive amount is at the integral multiple in S4, it is judged that the drive amount of the PZT is adjusted (S8). The shape regeneration processing operation on the surface of the object to be observed is executed (S9).

7. 发明专利

JP2001227907A METHOD FOR ANALYZING FRINGE USING FOURIER TRANSFORM 失效
公开(公告)号：JP2001227907A
公开(公告)日：2001-08-24
申请号：JP2000037777
申请日：2000-02-16
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO
IPC分类号： G01B9/02 , G01B9/00 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To obtain accurate results of analysis of the effective data region of fringe image data with little error by multiplying the fringe image data by a window function matching the effective data region, before performing a Fourier transform. SOLUTION: When a partial window function is identified in S4, either a rectangular shape S5, a disc shape S7, a ring shape S9, or a rectangular shape S11 with an opening in its center is determined based on the shape of the interference fringe image data of the subject to be observed. When the rectangular shape is determined, the X-Y direction partial window function S6 of the rectangular shape is selected; when the disc shape is determined, the radial partial window function S8 of the disc shape is selected; when the ring shape is determined, a radial ring shape partial window function S10 is selected; and when the rectangular shape with the opening in its center is determined, an X-Y direction ring shape partial window function S12 is selected. The interference fringe image data is multiplied by the selected function, after which a Fourier transform process for the fringe image is effected S18.

8. 发明专利

JP2001174235A PATTERN ANALYZING METHOD UTILIZING FOURIER TRANSFORMATION 失效
公开(公告)号：JP2001174235A
公开(公告)日：2001-06-29
申请号：JP36324199
申请日：1999-12-21
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO
IPC分类号： G01B9/02 , G01B11/00 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To analyze a pattern so that even when a pattern image data expressed in the orthogonal coordinate system shows a closed pattern shape, an open pattern shape can be obtained by transforming the data into a coordinate system different therefrom, the low-frequency signal components and a carrier frequency components can be separated by Fourier transformation and hence a good shape of an object under observation can be obtained. SOLUTION: For analyzing the surface shape of an object to be observed, using Fourier transformation for a closed interference fringe pattern image data, the original image data expressed in the orthogonal coordinate system is once transformed into an interference fringe pattern image data expressed in the polar coordinate system, this transformed data is subject to Fourier transformation and returned to the orthogonal coordinate system by the inverse polar coordinate transformation, thus analyzing the surface shape of the object to be observed, and hence the low-frequency signal components can be separated surely from a signal, having the low frequency signal components mixed with the carrier frequency component in the Fourier spectrum.

9. 发明专利

JP2004012335A METHOD FOR SUPPORTING INCLINATION ERROR ADJUSTMENT OF TESTING SUBSTANCE 审中-公开
公开(公告)号：JP2004012335A
公开(公告)日：2004-01-15
申请号：JP2002167219
申请日：2002-06-07
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KOBAYASHI FUMIO , KATSURA SOUTO , TANAKA KUNIHIKO
IPC分类号： G01B11/26 , G01B11/00 , G01B11/27 , G01M11/00 , G02B6/36 , G02B6/38
摘要： PROBLEM TO BE SOLVED: To provide an inclination error adjustment supporting method which recognizes an inclination error of the axis of a ferrule easily and at low cost, on the basis of the locus of movement of the center position of an interference pattern obtained at each rotational position by rotating the ferrule held with a clamping work, and makes use of it for error adjustment. SOLUTION: When the ferrule 501 inclines, and the shape of its tip surface 503 has an eccentric vertex, the center of an interference pattern on the tip surface 503 is at a position P which corresponds to the vertex position of the tip surface 503 on projection coordinates. If the ferrule 501 is rotated around its center axis (S-S'), the locus T of the center of the interference pattern at each rotational position becomes a circle of a predetermined radius whose center is point O separated by a distance d from point C(0, 0). The coordinates X, Y of the center of this circle are found by specified operation, and on the basis of relative distance information and its relative direction information between this center position and a position which corresponds to the rotational center position in the spherical tip part of the ferrule 501, the inclination of the ferrule 501 is adjusted. COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2002286407A METHOD AND DEVICE FOR ANALYZING FOURIER TRANSFORM FRINGE 失效
公开(公告)号：JP2002286407A
公开(公告)日：2002-10-03
申请号：JP2001092339
申请日：2001-03-28
申请人： FUJI PHOTO OPTICAL CO LTD
发明人： KATSURA SOUTO , MATSUDA SHINICHI
IPC分类号： G01B9/02
摘要： PROBLEM TO BE SOLVED: To make filtering work uniquely and stably performable and make stable analysis result obtainable by obtaining a maximum value position where the amplitude is maximized in a spectrum other than at the origin position and a minimum value position, where it is minimized between the maximum value position and the origin in a frequency coordinate system, and determining a filtering range in the frequency coordinate system on the basis of both positions. SOLUTION: An interference fringe images is fetched (S1), the interference fringe image data are subject to Fourier transform to obtain a spectrum on a frequency coordinate system (S2), and the peak of the spectrum at the origin position is found out (S3). The peak Pmax of a spectrum that is maximized other than at the origin is found out (S4), and its coordinate is obtained (S5). The peak Pmin of a spectrum that is minimized between the coordinate and origin is found out (S6) and its coordinate is obtained (S7), and a circle of a radius same as the distance between the Pmax and Pmin is drawn by using Pmax as its center on the frequency coordinate system (S8), thus determining a filtering range.

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