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1. 发明专利

DK0445382T3 未知
公开(公告)号：DK0445382T3
公开(公告)日：1993-06-21
申请号：DK90122994
申请日：1990-11-30
申请人： ENDRESS HAUSER GMBH CO
发明人： HEGNER FRANK DR-ING , FRANK MANFRED DIPL-ING , KLAEHN THOMAS DIPL-ING
IPC分类号： G01L9/12 , G01L9/00 , H01L29/84
摘要： The substrate (12) and/or the diaphragm (11) of the pressure sensor (10) are made of ceramic, glass, or a single-crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second capacitor electrode (15). Substrate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer. This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the diaphragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.

2. 发明专利

DK0490807T3 未知
公开(公告)号：DK0490807T3
公开(公告)日：1996-03-04
申请号：DK91810806
申请日：1991-10-18
申请人： ENDRESS HAUSER GMBH CO
发明人： KLAEHN THOMAS DIPL-ING , HEGNER FRANK DR , SCHMIDT ELKE DIPL-ING , REIMANN PETER EL ING HTL , BREITENSTEIN HEINZ , MESSMER STEPHAN
IPC分类号： B23K35/32 , B22D11/06 , B23K35/02 , B23K35/40 , C04B37/00 , C04B37/02 , C22C16/00 , C30B33/06 , G01L9/12 , G05D16/00
摘要： This active brazing alloy is preferably used for brazing (joining) (aluminium)oxide ceramic parts or single crystals or metal parts to parts of the same material in each case, or (aluminium) oxide ceramic parts to single crystals or (aluminium) oxide ceramic parts or single crystals to metallic parts. In addition to the zirconium/nickel alloy composed of 70 to 85 atomic % of zirconium and 15 to 30 atomic % of nickel, it contains titanium. In a device for producing a uniformly thick strip (6) of this ternary active brazing alloy which has two surfaces which are as smooth as possible by the melt-spinning method, the alloy which has been melted by means of high-frequency energy in a cylindrical crucible (1) composed completely of a highly heat-resistant and highly thermally conducting, nonmetallic material, in particular of high-density graphite or boron nitride, is squeezed out through an opening (3) in the base of the crucible onto a metal drum (5) which is rotating at high circumferential velocity and has a high thermal conductivity, and the liquid alloy solidifies on the drum at a high cooling rate in the order of magnitude of 10 to 10 DEG C/s. A product produced using said ternary active brazing alloy is a pressure sensor (10) comprising a parent body (12) and a membrane (11) made of ceramic, in particular aluminium oxide ceramic, preferably having a purity of 96% by weight, the parent body (12) and the membrane (11) being thermally joined parallel to one another at their edges and at a known distance (d) by means of the active brazing alloy, for example by means of a shaped part (20) thereof, to form a chamber (13).

3. 发明专利

DK0516579T3 未知
公开(公告)号：DK0516579T3
公开(公告)日：1994-09-26
申请号：DK92810261
申请日：1992-04-06
申请人： ENDRESS HAUSER GMBH CO
发明人： HEGNER FRANK DR , KLAEHN THOMAS DIPL-ING
IPC分类号： C04B37/02 , G01L9/00 , H01R9/16 , H02G3/22 , H05K1/03 , H05K3/34 , B23K1/19 , H01G1/153

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