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1. 发明授权

US06230572B1 Instrument for measuring and classifying nanometer aerosols 有权
标题翻译：用于测量和分类纳米气溶胶的仪器
公开(公告)号：US06230572B1
公开(公告)日：2001-05-15
申请号：US09249723
申请日：1999-02-12
申请人： David Y. H. Pui , Da-Ren Chen , Frederick R. Quant , Gilmore J. Sem , Heinz Fissan , Detlef Hummes , Frank Dorman
发明人： David Y. H. Pui , Da-Ren Chen , Frederick R. Quant , Gilmore J. Sem , Heinz Fissan , Detlef Hummes , Frank Dorman
IPC分类号： G01N100
CPC分类号： B82Y15/00 , G01N15/0266 , Y10S977/88 , Y10S977/881 , Y10S977/958
摘要： An apparatus for classifying polydisperse aerosols includes aerosol and sheath gas conduits for conducting a sample aerosol and a sheath gas toward a merger area. At the merger area the sheath gas and about ten percent of the sample aerosol merge, then travel through a differential mobility analyzer (DMA) and along a tubular electrode of the DMA. Selected particles, i.e. particles having electrical mobilities within a narrow range, pass through a collection aperture of the electrode. The DMA output, an aerosol consisting of the selected particles, is provided to a condensation particle counter or other device for determining the aerosol concentration. The remainder of the sample aerosol is conducted away from the merger area along a bypass flow conduit. The bypass flow and an improved aerodynamic design provide for a slit at the merger area that is sufficiently narrow to minimize unwanted electric field penetration at the slit and DMA entrance. An annular flow restriction feature in the bypass conduit promotes and maintains laminar, uniform-velocity flow near the slit. The collection aperture is located medially along the tubular electrode, to prevent electrical field fringing near the aperture.
摘要翻译：用于分类多分散气溶胶的装置包括用于将样品气溶胶和护套气体导向合并区域的气溶胶和鞘气导管。在合并区域，护套气体和约10％的样品气溶胶合并，然后通过差示迁移率分析仪（DMA）和DMA的管状电极行进。所选择的粒子，即具有窄范围内的电迁移率的粒子通过电极的收集孔。将DMA输出（由所选颗粒组成的气溶胶）提供给冷凝颗粒计数器或用于确定气溶胶浓度的其它装置。样品气溶胶的其余部分沿旁路流动导管远离合并区域。旁路流动和改进的空气动力学设计为合并区域的狭缝提供足够窄的狭缝，以最小化狭缝和DMA入口处的不需要的电场穿透。旁通管道中的环形流动限制特征促进并维持狭缝附近的层流均匀的流速。收集孔沿着管状电极向内定位，以防止孔附近的电场边缘。

2. 发明授权

US5072626A Measurement of ultrafine particle size distributions 失效
标题翻译：超细粒度分布的测量
公开(公告)号：US5072626A
公开(公告)日：1991-12-17
申请号：US379826
申请日：1989-07-14
申请人： David S. Ensor , Gilmore J. Sem
发明人： David S. Ensor , Gilmore J. Sem
IPC分类号： G01N1/22 , G01N15/06
CPC分类号： G01N1/2202 , G01N15/065 , G01N2001/2223
摘要： A measurement system for microelectronic clean rooms to measure ultrafine particle size distribution in the range of 0.002 to 0.2 micrometers is provided which includes four screen diffusion stages each connected in series with a condensation nucleus detector. The input to each screen diffusion stage is connected to a localized area to be measured, and the output of each condensation nucleus detector is connected to a vacuum system which simultaneously draws particle bearing air through the four channels. The output signals of the condensation nucleus detectors present particle size distributiion. In one embodiment of the present invention, one or more optical particle detectors are connected in parallel with the diffusion stage-condensation nucleus detectors to expand the distribution measurements to larger sizes. Other embodiments inclulde a manifold probe to probe a localized area, an alarm system actuated when particle levels exceed a predetermined level, and a manifold assembly to minimize vacuum lines passing through the walls of the microelectronic clean room.
摘要翻译：提供了用于测量0.002至0.2微米范围内的超微粒度分布的微电子洁净室的测量系统，其包括四个屏幕扩散阶段，每个屏幕扩散阶段与冷凝核心检测器串联连接。每个屏幕扩散阶段的输入连接到要测量的局部区域，并且每个冷凝核检测器的输出连接到真空系统，其同时通过四个通道吸取颗粒轴承空气。冷凝核检测器的输出信号具有粒度分布。在本发明的一个实施例中，一个或多个光学粒子检测器与扩散级 - 凝结核检测器并联连接，以将分布测量扩大到更大的尺寸。其他实施例包括歧管探针以探测局部区域，当颗粒水平超过预定水平时致动的报警系统以及歧管组件，以最小化通过微电子洁净室的壁的真空管线。

3. 发明授权

US07407531B2 Particle surface treatment for promoting condensation 有权
标题翻译：促进凝结的颗粒表面处理
公开(公告)号：US07407531B2
公开(公告)日：2008-08-05
申请号：US11126002
申请日：2005-05-09
申请人： Richard C. Flagan , Stanley L. Kaufman , Gilmore J. Sem
发明人： Richard C. Flagan , Stanley L. Kaufman , Gilmore J. Sem
IPC分类号： G01N1/26
CPC分类号： G01N15/065 , G01N2001/2223
摘要： A system is disclosed for condensation particle counting in conjunction with modifying an aerosol to enhance the formation and growth of droplets of a selected working fluid, preferably water. Before saturation with the working fluid, the aerosol is exposed to an aerosol modifying component, preferably a vapor including molecules that are adsorbed onto surfaces of the particles or other elements suspended in the aerosol. Adsorption alters the surface character of the suspended elements towards increased affinity for the vapor of the working fluid, to promote the formation and growth of working fluid droplets. The droplets are optically detected to indicate numbers and concentrations of the suspended elements.
摘要翻译：公开了一种用于冷凝颗粒计数以及改变气溶胶以增强选定工作流体，优选水的液滴的形成和生长的系统。在与工作流体饱和之前，气溶胶暴露于气溶胶改性组分，优选包含吸附在颗粒表面上的分子的蒸汽或悬浮在气溶胶中的其它元素。吸附改变悬浮元素的表面特征，增加对工作流体蒸汽的亲和力，促进工作流体液滴的形成和生长。光学检测液滴以指示悬浮元件的数量和浓度。

4. 发明授权

US5561515A Apparatus for measuring particle sizes and velocities 失效
标题翻译：用于测量粒径和速度的装置
公开(公告)号：US5561515A
公开(公告)日：1996-10-01
申请号：US319660
申请日：1994-10-07
申请人： Peter P. Hairston , Frank D. Dorman , Gilmore J. Sem , Jugal K. Agarwal
发明人： Peter P. Hairston , Frank D. Dorman , Gilmore J. Sem , Jugal K. Agarwal
IPC分类号： G01N15/02 , G01P5/22 , G01P5/26 , G01P5/18 , G01N21/00 , G01P5/00
CPC分类号： G01P5/22 , G01P5/26 , G01N2015/0238
摘要： An aerodynamic particle size measuring device includes a laser energy source and beam splitting, shaping and polarizing optics for forming two parallel, peripherally overlapping beams. The beams are caused to intersect a gas stream perpendicular to the direction of gas flow, thus to form a measuring volume at the intersection of the beams and flow. Single particles are carried through the measuring volume with the gas flow, each particle scattering and extinguishing light according to the beam profile, as predetermined by the degree of beam overlap and the Gaussian intensity distribution of each beam. A photodetector, responsive either to scattered light or light extinction, generates a time-dependent voltage profile that tends to replicate the intensity profile. The resulting electrical signal is processed to determine an amplitude, set a threshold for minimally acceptable amplitudes, and to derive two negative-going zero crossings for an unambiguous time/velocity determination. Logic circuitry employs the threshold in combination with the zero crossings to reject velocity readings based on single trigger or coincidence events.
摘要翻译：空气动力学粒度测量装置包括激光能量源和分束，成形和偏振光学器件，用于形成两个平行的外围重叠的光束。使梁与垂直于气流方向的气流相交，从而在梁和流的交叉处形成测量体积。单个颗粒通过气流被传送通过测量体积，每个颗粒根据束轮廓散射和熄灭光，如通过束重叠度和每个光束的高斯强度分布所预定的。响应于散射光或光消失的光电检测器产生倾向于复制强度分布的时间依赖电压分布。对所得到的电信号进行处理以确定振幅，设置最小可接受振幅的阈值，并且为明确的时间/速度确定导出两个负向零交叉。逻辑电路采用阈值与零交叉结合，以基于单个触发或重合事件来拒绝速度读数。

5. 发明授权

US5098657A Apparatus for measuring impurity concentrations in a liquid 失效
标题翻译：用于测量液体中杂质浓度的装置
公开(公告)号：US5098657A
公开(公告)日：1992-03-24
申请号：US390282
申请日：1989-08-07
申请人： David B. Blackford , Frederic R. Quant , Thomas A. Kerrick , Gilmore J. Sem , Darrell D. Havir
发明人： David B. Blackford , Frederic R. Quant , Thomas A. Kerrick , Gilmore J. Sem , Darrell D. Havir
IPC分类号： G01N15/06
CPC分类号： G01N15/0656 , B03C3/017 , B03C3/09 , B03C3/12 , B03C3/38 , B03C3/47 , G01N15/065 , B03C2201/04
摘要： An apparatus for measuring nonvolatile residue concentrations in liquid is disclosed. A plurality of fixed and adjustable flow restrictive elements are utilized and arranged in-line from a fluid supply source to provide a constant, pressure controlled flow of liquid to the measuring apparatus and allow for real-time measurements and optimal concentration detection. An atomizer atomizes the liquid into droplets which are dried to nonvolatile residue particles. The nonvolatile residue particle concentration is then determined utilizing an electrostatic aerosol detector. The invention further discloses apparatus for collecting a sample of nonvolatile residue for analysis and identification using a corona precipitator.
摘要翻译：公开了一种用于测量液体中的非挥发性残留物浓度的装置。多个固定和可调节的流动限制元件被利用并且从流体供应源排成一行，以向测量装置提供恒定的压力控制的液体流，并允许实时测量和最佳浓度检测。雾化器将液体雾化成液滴，将其干燥成非挥发性残留物颗粒。然后使用静电气溶胶检测器测定非挥发性残留物颗粒浓度。本发明还公开了一种用于收集非挥发性残留物的样品用于使用电晕除尘器进行分析和识别的装置。

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