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    • 4. 发明申请
    • METHOD AND APPARATUS FOR CLEANING AND SURFACE CONDITIONING OBJECTS USING PLASMA
    • 使用等离子体清洗和表面调节对象的方法和装置
    • WO2006130780A2
    • 2006-12-07
    • PCT/US2006/021309
    • 2006-06-02
    • CERIONX, INC.KURUNCZI, Peter
    • KURUNCZI, Peter
    • B08B7/00
    • An apparatus and method for cleaning objects using plasma are disclosed. The apparatus provides a plurality of elongated dielectric barrier members arranged adjacent each other, a plurality of electrodes each contained within, and extending substantially along the length of, the plurality of elongated dielectric barrier members, and at least one buss bar for electrically coupling the plurality of electrodes to a voltage source. The method provides providing a plurality of elongated dielectric barrier members arranged adjacent each other, providing a plurality of electrodes each contained within, and extending substantially along the length of the plurality of elongated dielectric barrier members, providing at least one buss bar connected to the plurality of electrodes, electrically coupling the plurality of electrodes to a voltage source through the at least one buss bar, introducing the objects proximate the plurality of elongated dielectric barrier members, generating a dielectric barrier discharge between the plurality of dielectric barrier members and the objects; and forming plasma to clean at least a portion of the objects.
    • 公开了一种使用等离子体清洁物体的设备和方法。 该装置提供了彼此相邻布置的多个细长的电介质阻挡件,多个电极各自容纳在多个细长的电介质阻挡件的内部并且基本沿其长度延伸,以及至少一个用于电耦合多个 的电极到电压源。 该方法提供了多个彼此相邻布置的细长电介质阻挡件,提供多个电极,每个电极均包含在多个细长的电介质阻挡件的内部并基本上沿其长度延伸,提供至少一个连接到多个 通过所述至少一个汇流条将所述多个电极电耦合到电压源,将所述物体引入所述多个细长介质阻挡构件附近,在所述多个电介质阻挡构件和所述物体之间产生电介质势垒放电; 以及形成等离子体以清洁所述物体的至少一部分。