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    • 8. 发明申请
    • APPARATUSES AND METHODS FOR LASER PROCESSING TRANSPARENT WORKPIECES USING NON-AXISYMMETRIC BEAM SPOTS
    • 用非轴对称束斑激光加工透明工件的装置和方法
    • WO2018064409A1
    • 2018-04-05
    • PCT/US2017/054168
    • 2017-09-28
    • CORNING INCORPORATED
    • AKARAPU, Ravindra KumarPIECH, Garrett AndrewTSUDA, SergioWEST, James Andrew
    • B23K26/00B23K26/073B23K26/53B23K26/06C03B33/02B23K103/00
    • A method for laser processing a transparent workpiece includes forming a contour line that includes defects, by directing a pulsed laser beam output by a beam source through an aspheric optical element positioned offset in a radial direction from the beam pathway and into the transparent workpiece such that the portion of the pulsed laser beam directed into the transparent workpiece generates an induced absorption within the transparent workpiece that produces a defect within the transparent workpiece. The portion of the pulsed laser beam directed into the transparent workpiece includes a wavelength λ, an effective spot size w o,eff , and a non-axisymmetric beam cross section having a minimum Rayleigh range Z Rx,min in an x-direction and a minimum Rayleigh range Z Ry,min min in a y-direction. Further, the smaller of Z Rx,min and Z Ry,min is greater than formula (I), where F D is a dimensionless divergence factor comprising a value of 10 or greater.
    • 用于激光加工透明工件的方法包括通过将由束源输出的脉冲激光束引导通过非球面光学元件来形成包括缺陷的轮廓线,该非球面光学元件沿着从该束的径向方向 路径并且进入透明工件,使得被引导到透明工件中的脉冲激光束的部分在透明工件内产生诱发吸收,其在透明工件内产生缺陷。 被引导到透明工件中的脉冲激光束的部分包括波长λ,有效光斑尺寸w0,eff和非 在x方向和最小Rayleigh范围内具有最小Rayleigh范围的最小Rayleigh范围 Rx,min 的轴对称射束横截面。 在y方向上Ry,min min。 进一步地,Z 大于公式(I),其中, 是无量纲的散度因子,包括10或更大的值