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1. 发明专利

JP2008102103A Light irradiation device 有权
标题翻译：光照射装置
公开(公告)号：JP2008102103A
公开(公告)日：2008-05-01
申请号：JP2006287013
申请日：2006-10-20
申请人： Ccs Inc , シーシーエス株式会社
发明人： MASUMURA SHIGEKI , TOGAWA TAKUZO
IPC分类号： G01N21/84 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To further accurately inspect a wiring board by eliminating a problem of a low angle light lighting method and solving a new problem such as illuminance shortage or illuminance irregularity that can occur in this case fundamentally using a method of thinking of a dome type lighting method. SOLUTION: This light irradiation device comprises a substantially flat or dome-like light diffusing member 2 that has light transmission and light diffusion and is closely arranged so as to cover an inspection region 20a photographed by a camera 300 for inspection, a plurality of light irradiation members 4 that are separately arranged outside the light diffusing member 2 and transmit light through the light diffusing member 2 to the inspection region 20a and radiate the light, and a cylindrical object 3 extending in the direction of the camera from the periphery of an observation hole 2a for photographing disposed in the light diffusing member 2. The camera is constituted so as to photograph the inspection region 20a via the cylindrical object 3 and the observation hole 2a and constituted so as to prevent direct light from the light irradiation member 4 from coming into a camera-side opening of the cylindrical object 3. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了进一步精确地检查接线板，消除了低角度光照射方法的问题，并解决了在这种情况下可能发生的照度不足或照度不规则性的新问题，从根本上使用思维方法的圆顶式照明方法。解决方案：该光照射装置包括具有光透射和光漫射的基本上平坦或圆顶状的光漫射构件2，并且紧密地布置以覆盖由照相机300拍摄的检查区域20a用于检查，多个的光照射部件4，其分别配置在光漫射部件2的外部，并将光通过光扩散部件2透射到检查区域20a并照射光;以及圆筒状物体3，从相机的外周延伸，用于拍摄的观察孔2a设置在光漫射构件2中。照相机被构造成经由圆柱形物体3和观察孔2a拍摄检查区域20a，并且构成为防止来自光照射构件4的直射光从进入圆柱形物体3的相机侧开口。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2007132700A Method of inspecting inner surface of transparent body 有权
标题翻译：检查透明体内表面的方法
公开(公告)号：JP2007132700A
公开(公告)日：2007-05-31
申请号：JP2005323490
申请日：2005-11-08
申请人： Ccs Inc , シーシーエス株式会社
发明人： MASUMURA SHIGEKI
IPC分类号： G01N21/90 , G01N21/64
摘要： PROBLEM TO BE SOLVED: To provide a method of inspecting the inner surface or the like, capable of precisely inspecting the inner surface of a transparent body, having uneveness on its outer surface (outer peripheral surface) and a smooth glossy surface on its inner surface (inner peripheral surface), in a short time, using a simple and reasonable constitution.
SOLUTION: In the method of inspecting the inner surface 41a of the transparent body 4, of which the outer surface 4b has unevenness 42 and the inner surface 41a has a smooth glossy surface, the inner surface 41a is irradiated with an inspection light L of wavelength region, emitted from the transparent body 4 as fluorescence from an oblique direction, and the fluorescence and scattered reflected light from the inner surface 41a emitted due to this irradiation are observed.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种检查内表面等的方法，其能够精确地检查在其外表面（外周面）上具有不均匀性的透明体的内表面和光滑的光泽表面上其内表面（内周面）在短时间内使用简单合理的构造。解决方案：在检查透明体4的内表面41a的方法中，外表面4b具有凹凸42，内表面41a具有光滑的光滑表面，内表面41a被照射检查光 L的波长区域，作为从倾斜方向的荧光从透明体4发射，并且观察到由于该照射而发射的内表面41a的荧光和散射的反射光。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2005347645A Light volume control unit and light irradiation equipment 审中-公开
标题翻译：轻量控制单元和光照射设备
公开(公告)号：JP2005347645A
公开(公告)日：2005-12-15
申请号：JP2004167778
申请日：2004-06-04
申请人： Ccs Inc , シーシーエス株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI
IPC分类号： G01B11/00 , F21S2/00 , F21V8/00 , F21Y101/02 , G01N21/84 , H01L33/00 , H05B37/02
CPC分类号： Y02B20/42
摘要： PROBLEM TO BE SOLVED: To provide a light volume control unit of simple configuration capable of emitting a specified target light volume while absorbing difference in characteristics when the target light volume which an LED irradiates is given.
SOLUTION: The light volume irradiated from an LED4 toward a specified irradiation region is controlled. The unit comprises a power supply part 301 which accepts light volume parameters such as supply current, supply voltage, and ON/OFF ratio when pulse-driven and drives the LED4 with the power determined by the light volume parameter, a target data accepting part 302 which accepts the target data representing a target light volume that should be irradiated, a measurement data storing part 303 which stores the measurement data representing correspondence between the actual light volume at a single or a plurality of points and the value of light volume parameter for obtaining the actual light volume, and a control part 304 which calculates the light volume parameter for obtaining the target light volume which the target data represents based on the measurement data and outputs it to the power supply part.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种简单配置的光量控制单元，其能够在发出LED照射的目标光体积的同时吸收特性差时发射指定的目标光体积。解决方案：从LED4向特定照射区域照射的光量被控制。该单元包括电源部分301，其在脉冲驱动时接受诸如电源电流，电源电压和ON / OFF比之类的光量参数，并以由光量参数确定的功率驱动LED4;目标数据接收部分302 其接受表示应照射的目标光体积的目标数据;存储测量数据存储部分303，其存储表示单个或多个点处的实际光量之间的对应关系的测量数据和用于获得的光量参数的值实际光量，以及控制部304，其根据测量数据计算用于获得目标数据表示的目标光量的光量参数，并将其输出到电源部。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005050676A Light irradiation device and manufacturing method of the same 有权
标题翻译：光照射装置及其制造方法
公开(公告)号：JP2005050676A
公开(公告)日：2005-02-24
申请号：JP2003281387
申请日：2003-07-28
申请人： Ccs Inc , シーシーエス株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI
IPC分类号： G02B27/00 , F21S2/00 , F21S8/04 , F21W131/40 , F21Y101/02 , H01L33/00
摘要： PROBLEM TO BE SOLVED: To provide a light irradiation device 1 of which the defects can be precisely detected even if a light irradiation surface W is not in a state of a mirror surface but in a rugged half-mirror state.
SOLUTION: The light irradiation device comprises a casing 3 having inspection holes 2 penetrating therethrough, and an LED row R of a plurality of LEDs 4 arranged in a row along the inner periphery of the inspection hole 2. The light irradiation surface W in a state of a mirror surface or half-mirror surface arranged at the bottom surface of the inspection hole 2 is irradiated by light emitted from the LEDs 4. The LEDs 4 are arranged so that light axes of the respective LEDs 4 do not cross the light irradiation surface W, and it is constructed so that light spreading in an angle wider than a prescribed angle from the light axis of the LEDs 4 is not directed toward the light irradiation surface W.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种光照射装置1，其即使光照射面W不处于镜面的状态但是处于凹凸的半反射镜状态，也能够精确地检测出缺陷。解决方案：光照射装置包括具有穿透其中的检查孔2的壳体3和沿着检查孔2的内周排成一行的多个LED 4的LED排R。光照射面W 在配置在检查孔2的底面的镜面或半透视表面的状态下，照射由LED4发出的光.LED4被配置为使各LED4的光轴不穿过光照射面W，并且其构造成使得以比LED 4的光轴更宽的规定角度的光的扩散不指向光照射面W.版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2004003919A Illuminating apparatus used for test and the like 有权
公开(公告)号：JP2004003919A
公开(公告)日：2004-01-08
申请号：JP2002207061
申请日：2002-07-16
申请人： Ccs Inc , シーシーエス株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI
IPC分类号： G01N21/84 , F21S2/00 , F21V8/00 , F21Y101/00 , G01B11/00 , G01N21/88 , G02B5/02 , G02B6/00 , G02B6/04 , G02B6/42 , H01L33/58 , H05K13/08
CPC分类号： G02B6/0008 , G01B11/00 , G01N21/8806 , G02B6/0006 , G02B6/04 , G02B6/4298
摘要： PROBLEM TO BE SOLVED: To provide an illumination apparatus capable of performing efficient illumination while improving ease in moving heads, the reliability of the device, etc.
SOLUTION: The illumination apparatus is provided with light radiation openings 6Aa and 6Ba for radiating an object to be illuminated W; the heads 6A and 6B supported on a movable support 1; LED light source devices 5A and 5B supplied with electric power via an electrical cable 4 from an electric power source 3, provided separately of the movable support 1 to emit light and mounted to the movable support; and flexible optical fibers 7A and 7B passing through the outside from the LED light source devices 5A and 5B for guiding the light to the irradiation openings 6Aa and 6Ba of the heads 6A and 6B.
COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2013120099A Illumination apparatus for inspection and illumination method for inspection 有权
标题翻译：用于检查和照明的检查方法的照明装置
公开(公告)号：JP2013120099A
公开(公告)日：2013-06-17
申请号：JP2011267321
申请日：2011-12-06
申请人： Ccs Inc , シーシーエス株式会社
发明人： MASUMURA SHIGEKI
IPC分类号： G01N21/84 , G01B11/30
CPC分类号： G01B11/30 , G01N21/8806 , G01N2021/8809 , G01N2021/8835 , G01N2201/068
摘要： PROBLEM TO BE SOLVED: To provide an illumination apparatus for inspection and an illumination method for inspection which can irradiate an object with inspection light so that a difference such as a light-dark difference appears between a defect and a normal portion.SOLUTION: The illumination apparatus for inspection includes: a surface light source 1 for emitting inspection light; a lens 2 provided on an optical axis LX of the inspection light emitted from the surface light source 1 between an inspection object W and the surface light source 1; and a first diaphragm 31 provided between the surface light source 1 and the lens 2 or between the lens 2 and the inspection object W. The positions of the surface light source 1 and the lens 2 against the inspection object W are set so that an image forming surface IM on which light from the surface light source 1 is image-formed is formed in the vicinity of the inspection object W. The position of the first diaphragm 31 against the lens 1 is set so that a center axis of an irradiation solid angle regulated by the inspection light made incident on an outer edge part of the image forming surface IM becomes parallel with the optical axis LX or deviated from the optical axis and inclined only by a predetermined angle.
摘要翻译：要解决的问题：提供一种用于检查的照明装置和用于检查的照明方法，其可以用检查光照射物体，使得在缺陷和法线部分之间出现诸如亮暗差异的差异。解决方案：用于检查的照明装置包括：用于发射检查光的表面光源1; 在检查对象物W与面光源1之间从表面光源1发射的检查光的光轴LX上设置的透镜2; 以及设置在表面光源1和透镜2之间或透镜2与检查对象W之间的第一光阑31.面光源1和透镜2对检查对象W的位置被设定为使得图像形成表面光源1成像的光的成膜面IM在检查对象W的附近。第一光阑31抵靠透镜1的位置被设定为使照射立体角的中心轴由入射在图像形成面IM的外缘部分上的检查光调节的光线与光轴LX平行或偏离光轴并且仅倾斜预定角度。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2010032557A Weather measurement apparatus 有权
标题翻译：天气测量装置
公开(公告)号：JP2010032557A
公开(公告)日：2010-02-12
申请号：JP2009262471
申请日：2009-11-18
申请人： Ccs Inc , Yokogawa Denshikiki Co Ltd , シーシーエス株式会社 , 横河電子機器株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI , ASAMIYA MASANORI
IPC分类号： G01W1/14 , G01V8/10
摘要： PROBLEM TO BE SOLVED: To provide a weather measurement apparatus simply constituted, accurately measuring the rain quantity, associating and collecting various information on the rainy weather such as a size and a falling speed of a raindrop, and measuring the snowy weather and the foggy weather.
SOLUTION: The weather measurement apparatus comprises: a light source 6; a collimating lens 7 for collimating a light emitted from the light source 6 into a collimated light L2 traveling in the predetermined direction C; a collecting lens 8 disposed so as to be separated from the collimating lens 7 at a predetermined distance in the predetermined direction C; and an image sensor 4 for receiving the light from the collecting lens 8, and outputting image data of the raindrop, a snow particle and a fog particle in the air passing between the lenses. The apparatus is constituted so as to form a second collimated light L2' irradiated in the direction different from the collimated light, output image data of the raindrop passing across the second collimated light L2', compare the image data, and detect the overlapped raindrop.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供简单构成的气象测量装置，准确地测量雨量，关联并收集雨天的各种信息，例如雨滴的大小和下降速度，并测量下雪天气，以及有雾的天气
解决方案：天气测量装置包括：光源6; 准直透镜7，用于将从光源6发射的光准直到沿预定方向C行进的准直光L2; 聚光透镜8，被配置成与准直透镜7在预定方向C上预定距离分离; 以及用于接收来自收集透镜8的光的图像传感器4，并且在透镜之间的空气中输出雨滴，雪粒子和雾粒的图像数据。该装置构成为形成沿与准直光不同的方向照射的第二准直光L2'，输出穿过第二准直光L2'的雨滴的图像数据，比较图像数据，并检测重叠的雨滴。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2007033389A Surface inspection apparatus 审中-公开
标题翻译：表面检查装置
公开(公告)号：JP2007033389A
公开(公告)日：2007-02-08
申请号：JP2005220878
申请日：2005-07-29
申请人： Ccs Inc , シーシーエス株式会社
发明人： MASUMURA SHIGEKI
IPC分类号： G01N21/88 , G01N21/90
摘要： PROBLEM TO BE SOLVED: To inspect only a transparent layer member reliably when inspecting the surface of a body to be inspected having a transparent layer member on a surface, such as a can.
SOLUTION: Light nearly in parallel with the surface of the body 200 to be inspected comprising a base material 201 and the transparent layer member 202 for covering the surface of the base material 201 is applied obliquely, only S polarization in the reflection light L2 is transmitted by a polarization element 31, and the transmitted light is observed.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：在诸如罐的表面上检查具有透明层构件的待检查体的表面时，仅可靠地检查透明层构件。解决方案：倾斜地施加与待检查的主体200的表面几乎平行的光，其包括基材201和用于覆盖基材201的表面的透明层构件202，仅反射反射光中的S偏振 L2由偏振元件31透射，并且观察透射光。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2007017450A Light irradiator for image processing and light irradiation method for image processing 有权
标题翻译：用于图像处理的光照射器和用于图像处理的光照射方法
公开(公告)号：JP2007017450A
公开(公告)日：2007-01-25
申请号：JP2006252217
申请日：2006-09-19
申请人： Ccs Inc , シーシーエス株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI , FUKUI SATOSHI , KASHIWABARA HIDEAKI
IPC分类号： G01N21/84 , H05B37/02
摘要： PROBLEM TO BE SOLVED: To provide a light irradiator for image processing, as it were, to be called as an intelligent light irradiator, structured so as to provide an image optimum for image processing by dynamically and automatically producing an illumination environment. SOLUTION: This light irradiator A4 for image processing irradiates a prescribed area with light L1 in such a manner that at least one of light irradiation conditions can be changed which are irradiation direction, irradiation solid angle, irradiation intensity, irradiation range, and spectrum distribution while detecting the state of light irradiation in whole or in part of the prescribed area. While referring to the state of light irradiation, at least any one of the irradiation conditions is adjusted prior to image processing by an image processor each time the prescribed area is changed, thereby setting light irradiation conditions corresponding to the purpose of image processing. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供用作图像处理的光照射器，被称为智能光照射器，被构造成通过动态地且自动地产生照明环境来提供图像处理最佳的图像。解决方案：用于图像处理的这种光照射器A4以照射方向，照射立体角，照射强度，照射范围等的光照射条件中的至少一个来改变照射具有光L1的规定区域在检测整个或部分规定区域的光照射状态的同时进行光谱分布。在参照光照射状态的情况下，在每次规定的区域变化时，由图像处理器进行图像处理之前调整照射条件中的至少一个，从而设定与图像处理的目的对应的光照射条件。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2006339254A Wafer contour detection device 有权
标题翻译：波形轮廓检测装置
公开(公告)号：JP2006339254A
公开(公告)日：2006-12-14
申请号：JP2005159656
申请日：2005-05-31
申请人： Ccs Inc , シーシーエス株式会社
发明人： YONEDA KENJI , MASUMURA SHIGEKI
IPC分类号： H01L21/68 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To provide a compact device for wafer contour detection capable of precisely detecting wafer contour, with simple structure only composed of static parts and ease of handling. SOLUTION: There are provided a light irradiator 1 for irradiating polarized light Ra in a predetermined direction from one surface side of a semiconductor wafer 300 which is a non-optically active substance; a reflecting member 2 which rotates or reduces and reflects the polarized light Ra from the light irradiator 1, while being arranged at another surface side of the wafer 300 so as to spread the light to the outside including the outer contour of the wafer 300 in view of the one surface side; and a light detector 3 for detecting only the polarized light Ra in the predetermined direction or only the light except the polarized light Ra among the reflecting light, arranged in a position which can receive the reflective light from the wafer 300 and the reflecting member 2. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够精确检测晶片轮廓的晶片轮廓检测的紧凑型装置，其结构简单，仅由静态部件组成，易于处理。解决方案：提供一种用于从作为非光学活性物质的半导体晶片300的一个表面侧沿预定方向照射偏振光Ra的光照射器1; 反射构件2，其在被布置在晶片300的另一表面侧的同时旋转或缩小并反射来自光照射器1的偏振光Ra，以将光展开到包括晶片300的外轮廓的外侧的一面; 以及光检测器3，其仅检测预定方向上的偏振光Ra，或者仅检测反射光中除了偏振光Ra之外的光，布置在能够接收来自晶片300和反射部件2的反射光的位置。版权所有（C）2007，JPO＆INPIT

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