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1. 发明申请

WO2007133701A9 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少能力承运人，运输，装卸港，缓冲系统
公开(公告)号：WO2007133701A9
公开(公告)日：2008-01-17
申请号：PCT/US2007011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION INC , BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
发明人： BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
IPC分类号： B65B5/04
CPC分类号： H01L21/67126 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译：一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

2. 发明申请

WO2007133701A2 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少能力承运人，运输，装卸港，缓冲系统
公开(公告)号：WO2007133701A2
公开(公告)日：2007-11-22
申请号：PCT/US2007011443
申请日：2007-05-11
申请人： BROOKS AUTOMATION INC , BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
发明人： BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL A , MAY ROBERT C
IPC分类号： B05D5/12 , C07C15/20
CPC分类号： H01L21/67126 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译：一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

3. 发明申请

WO2008024225A3 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM 审中-公开
标题翻译：减少能力承运人，运输，装卸港，缓冲系统
公开(公告)号：WO2008024225A3
公开(公告)日：2008-10-16
申请号：PCT/US2007017924
申请日：2007-08-13
申请人： BROOKS AUTOMATION INC , BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL , MAY ROBERT C
发明人： BUFANO MICHAEL L , GILCHRIST ULYSSES , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , BABBS DANIEL , MAY ROBERT C
IPC分类号： H01L21/677
CPC分类号： H01L21/67733 , H01L21/67017 , H01L21/67126 , H01L21/67201 , H01L21/67276 , H01L21/67376 , H01L21/67379 , H01L21/67386 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67757 , H01L21/67766 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
摘要翻译：根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分定义旅行方向。第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。

4. 发明申请

WO2008140728A3 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 审中-公开
标题翻译：使用机械开关机构的多个可移动臂的基板运输装置
公开(公告)号：WO2008140728A3
公开(公告)日：2009-12-30
申请号：PCT/US2008005884
申请日：2008-05-08
申请人： BROOKS AUTOMATION INC , HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
发明人： HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
IPC分类号： B66C23/00
CPC分类号： H01L21/68707 , H01L21/67742
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回组态。

5. 发明申请

WO2009003196A8 ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS 审中-公开
标题翻译：带有磁性主轴的机架式驱动装置
公开(公告)号：WO2009003196A8
公开(公告)日：2009-02-26
申请号：PCT/US2008068684
申请日：2008-06-28
申请人： BROOKS AUTOMATION INC , GILCHRIST ULYSSES , HOSEK MARTIN , MOURA JAIRO TERRA , KRISHNASAMY JAY
发明人： GILCHRIST ULYSSES , HOSEK MARTIN , MOURA JAIRO TERRA , KRISHNASAMY JAY
IPC分类号： H02K7/09
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译：一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子支承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置成接合所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平转子轴承部分。

6. 发明申请

WO2012125572A3 SUBSTRATE PROCESSING TOOL 审中-公开
标题翻译：基板加工工具
公开(公告)号：WO2012125572A3
公开(公告)日：2013-07-04
申请号：PCT/US2012028790
申请日：2012-03-12
申请人： BROOKS AUTOMATION INC , GILCHRIST ULYSSES , CAVENEY ROBERT T , KRISHNASAMY JAYARAMAN , DREW MITCHELL , MOURA JAIRO T
发明人： GILCHRIST ULYSSES , CAVENEY ROBERT T , KRISHNASAMY JAYARAMAN , DREW MITCHELL , MOURA JAIRO T
IPC分类号： B25J9/04
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译：一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。

7. 发明申请

WO2012125572A4 SUBSTRATE PROCESSING TOOL 审中-公开
标题翻译：衬底处理工具
公开(公告)号：WO2012125572A4
公开(公告)日：2013-10-03
申请号：PCT/US2012028790
申请日：2012-03-12
申请人： BROOKS AUTOMATION INC , GILCHRIST ULYSSES , CAVENEY ROBERT T , KRISHNASAMY JAYARAMAN , DREW MITCHELL , MOURA JAIRO T
发明人： GILCHRIST ULYSSES , CAVENEY ROBERT T , KRISHNASAMY JAYARAMAN , DREW MITCHELL , MOURA JAIRO T
IPC分类号： B25J9/04
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
摘要翻译： 1。一种基板处理装置，其特征在于，具备：框架;第一SCARA臂，其与所述框架连接，且具有末端执行器，该第一SCARA臂被构成为沿着第一径向轴延伸并缩回; 连接到所述框架的第二SCARA臂，所述第二SCARA臂包括端部执行器，所述第二SCARA臂被配置为沿着第二径向轴线延伸和缩回，所述SCARA臂具有共同的肩部旋转轴线; 并且连接到所述SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且围绕所述共同肩部旋转轴线旋转每个SCARA臂，其中所述第一径向轴线相对于所述第二径向轴线成角度，相应的臂的效应器与相应的径向轴线对齐，其中每个端部执行器构造成保持至少一个基板并且末端执行器位于共同的传送平面上。

8. 发明专利

JP2011082532A Substrate transport apparatus with multiple independent end effectors 审中-公开
标题翻译：带有多个独立终端效应器的基板运输装置
公开(公告)号：JP2011082532A
公开(公告)日：2011-04-21
申请号：JP2010249093
申请日：2010-11-05
申请人： Brooks Automation Inc , ブルックスオートメーションインコーポレイテッド
发明人： GILCHRIST ULYSSES
IPC分类号： B25J9/06 , H01L21/677 , B25J9/04 , B25J9/10 , B25J15/00 , B25J17/02 , B25J18/04
CPC分类号： B25J18/04 , B25J9/042 , B25J9/1045 , B25J15/0052 , H01L21/67742 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329 , Y10T74/20335
摘要： PROBLEM TO BE SOLVED: To make an operating space of a substrate transport arm as small as possible so as to minimize a size of a machining device. SOLUTION: The substrate machining device 10 consists: a frame 16; a drive section 42; an articulated arm 44; and at least a pair of end effectors. The drive section 42 is connected to the frame 16. The articulated arm 44 is connected to the drive section 42. The articulated arm 44 has a shoulder and a wrist. The arm 44 is pivotally mounted on the drive section 42 at the shoulder. The pair of end effectors is connected to the articulated arm 44. The pair of end effectors is pivotally jointed to the wrist of articulated arms 44 to rotate about a common axis of rotation at the wrist relative to the articulated arm 44. Each end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm 44. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了使基板传送臂的操作空间尽可能小，以便使加工装置的尺寸最小化。＆lt; P＆gt;解决方案：基板加工装置10包括：框架16; 驱动部42; 铰接臂44; 和至少一对末端执行器。驱动部分42连接到框架16.铰接臂44连接到驱动部分42.关节臂44具有肩部和手腕。臂44在肩部处枢转地安装在驱动部42上。一对末端执行器连接到关节臂44.一对末端执行器枢转地连接到铰接臂44的腕部上，以相对于关节臂44围绕手腕的公共旋转轴旋转。每个末端执行器是可以围绕手腕相对于铰接臂44的共同旋转轴线自由枢转。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2015053509A 複数の独立可動アームを伴う基板搬送装置有权
标题翻译：具有多种独立可移动臂的基座运输装置
公开(公告)号：JP2015053509A
公开(公告)日：2015-03-19
申请号：JP2014224566
申请日：2014-11-04
申请人：ブルックスオートメーションインコーポレイテッド , Brooks Automation Inc , ブルックスオートメーションインコーポレイテッド
发明人： MARTIN HOSEK , GILCHRIST ULYSSES
IPC分类号： H01L21/677 , B25J9/06 , B65G49/06 , B65G49/07
CPC分类号： B25J9/042 , H01L21/67742 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要：【課題】ロボットシステムの複雑さを低減し、かつ信頼性および清潔さを向上させた、独立に移動できるアームを伴うロボットマニピュレータを提供する【解決手段】駆動モータを伴う駆動部と、2つの関節アーム491L,491Rであって、それぞれが、各関節アームの伸長および収縮のための当該駆動モータの共通駆動シャフトに動作可能に接続され、当該共通駆動シャフトは1つの独立した回転中心軸を有し、各関節アームが、基板を保持して搬送するエンドエフェクタ430L,430Rを有する2つの関節アームと、両方の関節アームを当該駆動モータに動作可能に連結するロストモーションシステムを有する連結システムとを有する。【選択図】図3A
摘要翻译：要解决的问题：提供一种降低机器人系统的复杂性的机器人操纵器，其提高了可靠性和清洁度，并且伴随着独立的可动臂。解决方案：基板输送装置包括：与驱动马达相伴的驱动部; 两个连接臂491L，491R，其可操作地连接到驱动电机的公共驱动轴，用于每个连接臂的膨胀和收缩，其中公共驱动轴具有一个独立的旋转中心轴，并且每个联接臂传送端部执行器430L，430R 同时保持底物; 以及具有迷失运动系统的联接系统，其中两个接合臂可操作地联接到驱动马达。

10. 发明专利

JP2013175737A Substrate transport apparatus with multiple movable arms utilizing mechanical switch mechanism 审中-公开
标题翻译：具有多个可移动臂的基板运输装置利用机械开关机构
公开(公告)号：JP2013175737A
公开(公告)日：2013-09-05
申请号：JP2013061901
申请日：2013-03-25
申请人： Brooks Automation Inc , ブルックスオートメーションインコーポレイテッド
发明人： CHRISTOPHER HOFMEISTER , ALEXANDER KRUPYSHEV , GILCHRIST ULYSSES , MARTIN HOSEK
IPC分类号： H01L21/677 , B25J9/06 , B65G49/07
CPC分类号： B25J11/0095 , B25J18/00 , Y10S901/21 , Y10S901/27
摘要： PROBLEM TO BE SOLVED: To reduce complexity and containment areas and improve reliability and cleanliness of a robotic system.SOLUTION: A substrate transport apparatus 300 comprises: a frame; a drive section connected to the frame and including at least one independently controllable motor 44; at least two substrate transport arms connected to the frame and comprising arm links 48 arranged for supporting and transporting substrates S; and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：要解决的问题：降低复杂性和容纳区域，并提高机器人系统的可靠性和清洁度。解决方案：基板输送装置300包括：框架; 连接到所述框架并且包括至少一个独立可控马达44的驱动部分; 连接到所述框架的至少两个基板输送臂，并且包括布置用于支撑和输送基板S的臂连杆48; 以及耦合到所述至少一个独立可控电动机和所述至少两个衬底传送臂的机械运动开关，用于在所述至少两个衬底传送臂中的另一个保持在所述至少两个衬底传送臂中的一个的情况下延伸和缩回处于基本上缩回的构型。

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