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1. 发明申请

US20080311754A1 LOW TEMPERATURE SACVD PROCESSES FOR PATTERN LOADING APPLICATIONS 审中-公开
标题翻译：用于模式加载应用的低温SACVD工艺
公开(公告)号：US20080311754A1
公开(公告)日：2008-12-18
申请号：US12137372
申请日：2008-06-11
申请人： BALAJI CHANDRASEKARAN , Douglas E. Manning , Nitin K. Ingle , Rong Pan , Zheng Yuan , Sidharth Bhatia
发明人： BALAJI CHANDRASEKARAN , Douglas E. Manning , Nitin K. Ingle , Rong Pan , Zheng Yuan , Sidharth Bhatia
IPC分类号： H01L21/311 , H01L21/31
CPC分类号： H01L21/02164 , C23C16/042 , C23C16/402 , H01L21/02216 , H01L21/02271 , H01L21/28132 , H01L21/31604
摘要： A method of improving pattern loading in a deposition of a silicon oxide film is described. The method may include providing a deposition substrate to a deposition chamber, and adjusting a temperature of the deposition substrate to about 250° C. to about 325° C. An ozone containing gas may be introduced to the deposition chamber at a first flow rate of about 1.5 slm to about 3 slm, where the ozone concentration in the gas is about 6% to about 12%, by wt. TEOS may also be introduced to the deposition chamber at a second flow rate of about 2500 mgm to about 4500 mgm. The deposition rate of the silicon oxide film is controlled by a reaction rate of a reaction of the ozone and TEOS at a deposition surface of the substrate.
摘要翻译：描述了在氧化硅膜沉积中改进图案加载的方法。该方法可以包括向沉积室提供沉积衬底，以及将沉积衬底的温度调节到约250℃至约325℃。含臭氧气体可以以第一流速约1.5slm至约3slm，其中气体中的臭氧浓度为约6重量％至约12重量％。 TEOS还可以以约2500mgm至约4500mgm的第二流速引入沉积室。氧化硅膜的沉积速率由基板的沉积表面处的臭氧与TEOS的反应的反应速率控制。

2. 发明授权

US4873923A Hydraulic press platon support 失效
标题翻译：液压机压板支架
公开(公告)号：US4873923A
公开(公告)日：1989-10-17
申请号：US239040
申请日：1988-08-29
申请人： Douglas E. Manning
发明人： Douglas E. Manning
IPC分类号： B30B1/34 , B30B15/00 , B30B15/06
CPC分类号： B30B15/068 , B30B1/34 , B30B15/0052
摘要： A hydraulic press for compacting materials with a large platen area has a platen support comprising of four hydraulic cylinders, one at each corner of a rectangular or square shaped platen. The cylinders are supplied with near equal fluid flows from commercially available hydraulic flow dividers. When an off-centered platen loading is encountered, the cylinders will respond with a higher restraining force from the cylinders nearest the load with relatively small bending moments transferred to the cylinder rods. The resulting platen structural load resembles a beam supported with pinned connections. The resulting press capacity can be significantly higher than that achievable with guided type platen supports of similar costs where the bending moment is restrained by the stiffness of the guides.
摘要翻译：用于压制具有大压板区域的材料的液压机具有由四个液压缸组成的压板支架，一个在矩形或正方形压板的每一个角上。气瓶由市售的液压分流器供应近似相等的流体流量。当遇到偏心的压板加载时，气缸将以更接近负载的气缸的较高的约束力作出响应，相对较小的弯矩传递到气缸杆。所得到的压板结构负载类似于用固定连接支撑的梁。所产生的压力容量可以显着地高于用类似成本的导向型压板支架可实现的冲击力，其中弯矩受到引导件的刚度的限制。

3. 发明授权

US4930331A Apparatus and method for fabricating elliptical tubing 失效
标题翻译：椭圆管制造装置及方法
公开(公告)号：US4930331A
公开(公告)日：1990-06-05
申请号：US315284
申请日：1989-02-24
申请人： Douglas E. Manning
发明人： Douglas E. Manning
IPC分类号： B21D22/02 , B21D41/00
CPC分类号： B21D22/025 , B21D41/00
摘要： An apparatus (10) and method for fabricating metal tubing of generally elliptical shape by cold pressing round tubing stock into the desired shape. The apparatus (10) includes a first pair of opposing dies (16 and 18) secured to the platens (12and 14) of a press for forming the substantially flattened sides of the tubing. A second pair of opposing dies, positioned substantially between and on either side of the first pair of dies, is provided for forming the substantially rounded sides of the elliptical tubing. Means (52) for providing a preselected rate of resistance to movement of the second pair of opposing dies as they are engaged by the substantially rounded sides of the tubing, such that the tubing can be pressed into the desired substantially elliptical shape defined by the die faces of the first and second pairs of opposing dies by operating the press to move the platens (12 and 14) toward one another, are provided.
摘要翻译：一种用于通过将圆管材料冷压成所需形状来制造大致椭圆形金属管的装置（10）和方法。装置（10）包括固定到压力机的压板（12和14）上的第一对相对的模具（16和18），用于形成管道的基本扁平的侧面。提供基本上位于第一对模具的两侧之间并且位于第一对模具的任一侧上的第二对相对的模具，用于形成椭圆形管道的基本圆形的侧面。用于当所述第二对相对的模具被所述管道的基本上圆形的侧面接合时提供对所述第二对相对的模具的运动的预选速率的装置（52），使得所述管道可以被压入所述模具限定的期望的大致椭圆形状提供通过操作压力机使第一和第二对相对的模具的表面彼此相对移动压板（12和14）。

4. 发明授权

US4777874A Anti-springback device for a container 失效
标题翻译：用于容器的防回弹装置
公开(公告)号：US4777874A
公开(公告)日：1988-10-18
申请号：US96276
申请日：1987-09-09
申请人： Douglas E. Manning
发明人： Douglas E. Manning
IPC分类号： B30B9/30 , B30B15/06
CPC分类号： B30B9/3028
摘要： A container used for compacting materials such as low level radioactive waste has a device used to keep the compacted material from springing out of the container when the compacting force is removed, thus resulting in a significant increase in the final compacted density. The device develops its restraining force by using the beam strength of its members. The device includes a louvre attached to the container, enabling the cross beams to be snapped into place with a wedge shape of the cross beam end or a hydraulic clamping device external to the container.
摘要翻译：用于压实诸如低放射性废料的材料的容器具有用于在压实压力被去除时保持压实材料不会从容器弹出的装置，从而导致最终压实密度的显着增加。该装置通过使用其构件的束强度来发展其约束力。该装置包括连接到容器的百叶窗，使得横梁能够以横梁端的楔形或容器外部的液压夹紧装置卡扣就位。

5. 发明授权

US4807748A Attachable container riser 失效
标题翻译：可拆卸的集装箱立管
公开(公告)号：US4807748A
公开(公告)日：1989-02-28
申请号：US129966
申请日：1987-12-04
申请人： Douglas E. Manning
发明人： Douglas E. Manning
IPC分类号： B65D19/00
CPC分类号： B65D19/00
摘要： An attachable riser used in material handling is held in place by spring clips. At least two such risers are attached to the underside of an object allowing clearance for the forks of a machine such as a forktruck to move under the object. When the object is picked up, moved, and set down the risers remain attached to the object thus eliminating the manual moving or placement of ordinary risers such as timbers. The risers are easily removed from the object when desired.
摘要翻译：用于材料处理的可附接提升管通过弹簧夹固定到位。至少两个这样的立管连接到物体的下侧，允许诸如叉车的机器的叉的间隙在物体下方移动。当物体被拾取，移动和放下时，立管保持附接到物体上，从而消除了诸如木材的普通立管的手动移动或放置。当需要时，立管可以方便地从物体上移除。

6. 发明授权

US4729302A Floating container clamp for a compaction press 失效
标题翻译：用于压实机的浮动容器夹
公开(公告)号：US4729302A
公开(公告)日：1988-03-08
申请号：US864295
申请日：1986-05-16
申请人： Douglas E. Manning
发明人： Douglas E. Manning
IPC分类号： B30B9/30 , B30B15/04
CPC分类号： B30B9/3032 , B30B9/30 , B30B9/3003
摘要： A box type container used in a press for compacting materials is supported by a floating clamp arrangement that protects the container during compaction and allows significantly higher compaction pressures to be used. The clamps are supported with spherical connections and are pressed to the container with hydraulic cylinders. A container that is fabricated out of square with generous dimensional tolerances is protected as the clamps float to conform to the container being used. All sides and bottom of the box type container are protected with this arrangement.
摘要翻译：在用于压实材料的压机中使用的盒式容器由浮动夹具装置支撑，其在压实期间保护容器并且允许使用显着更高的压实压力。夹具用球形连接件支撑，并用液压缸压到容器上。由方形制成的具有大尺寸公差的容器被保护，因为夹具浮动以符合所使用的容器。盒式容器的所有侧面和底部均采用这种安排进行保护。

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