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1. 发明申请

WO2008070876A2 ENVIRONMENTAL ISOLATION SYSTEM FOR FLAT PANEL DISPLAYS 审中-公开
标题翻译：平板显示屏的环境隔离系统
公开(公告)号：WO2008070876A2
公开(公告)日：2008-06-12
申请号：PCT/US2007/087034
申请日：2007-12-10
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , PHARAND, Michel , GOULD, Robert
发明人： BONORA, Anthony, C. , PHARAND, Michel , GOULD, Robert
IPC分类号： B65D85/48 , G02F1/13
CPC分类号： B65D81/2076 , B65D85/30 , B65D2585/6837 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67379 , H01L21/67383 , H01L21/67393 , H01L21/67772 , H01L21/67775
摘要： The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.
摘要翻译：本发明通常包括用于FPD材料储存和运输的系统。 FPD系统可能包含环境保护，材料跟踪和/或工作站加载功能。该系统的一个部件包括一个可运输，可密封的容器。该系统的另一个部件包括可密封的负载端口，容器对准该负载端口，使得可以处理衬底。

2. 发明申请

WO2008008737A3 VARIABLE LOT SIZE LOAD PORT 审中-公开
公开(公告)号：WO2008008737A3
公开(公告)日：2008-01-17
申请号：PCT/US2007/073085
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： B65G49/07
摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

3. 发明申请

WO2007008736A1 STOCKER 审中-公开
公开(公告)号：WO2007008736A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/026642
申请日：2006-07-07
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
发明人： BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
IPC分类号： H01L21/00
CPC分类号： H01L21/67769 , H01L21/67161
摘要： The present invention comprises a stocker for managing containers within a fabrication facility having a ceiling-based interbay material handling system a floor-based intrabay material handling system. In one embodiment, the stocker comprises a container storage area for storing at least one container, a ceiling-based input conveyor, a floor- based conveyor and a robotic mechanism. The ceiling-based input conveyor receives containers from the ceiling based interbay material handling system. The stocker' s floor- based conveyor may comprise an output conveyor, an input conveyor or both, and moves containers between the stocker' s container storage area and the floor-based intrabay material handling system. A robotic mechanism moves containers between the ceiling- based input conveyor, the container storage area and the floor-based conveyor.
摘要翻译：本发明包括一个用于管理制造设备内的容器的储料器，其具有一个基于天花板的间隔物料处理系统，一个基于楼层的垃圾处理系统。在一个实施例中，储料器包括用于存储至少一个容器，天花板输入输送机，基于地板的输送机和机器人机构的容器存储区域。基于天花板的输入输送机从天花板间隔物料处理系统接收容器。贮存者地板输送机可以包括输出输送机，输入输送机或两者，并且在储料器的容器储存区域和地板间的内部材料处理系统之间移动容器。机器人机构将容器移动到基于天花板的输入输送机，容器存储区域和基于地板的输送机之间。

4. 发明申请

WO2006124683A2 MODULAR TERMINAL FOR HIGH-THROUGHPUT AMHS 审中-公开
标题翻译：用于高通量AMAM的模块化端子
公开(公告)号：WO2006124683A2
公开(公告)日：2006-11-23
申请号：PCT/US2006/018568
申请日：2006-05-15
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
IPC分类号： H01L21/67
CPC分类号： H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67766 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.
摘要翻译：本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。本发明还可以包括存储架，优选地基本上水平地围绕共同的垂直平面与一个传送系统的一部分对准。运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。垂直模块在运输系统和至少一个存储架之间运输容器。

5. 发明申请

WO2009089122A2 CONTROLLED DEFLECTION OF LARGE AREA SEMICONDUCTOR SUBSTRATES FOR SHIPPING & MANUFACTURING CONTAINERS 审中-公开
标题翻译：用于船舶和制造集装箱的大面积半导体衬底的受控偏转
公开(公告)号：WO2009089122A2
公开(公告)日：2009-07-16
申请号：PCT/US2009/030060
申请日：2009-01-03
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C.
发明人： BONORA, Anthony, C.
IPC分类号： H01L21/673 , H01L21/68
CPC分类号： H01L21/67383 , H01L21/67386
摘要： A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a container door for access into an inner region of the housing assembly. The housing assembly includes a support structure defined along sidewalls of the housing assembly. The support structure has a plurality of edge support constraints protruding into the inner region of the housing assembly. The plurality of edge support constraints support opposing edge regions of the at least one substrate so as to cause the at least one substrate to deflect around an axis.
摘要翻译：提供了用于存储至少一个衬底的衬底容器。基板容器包括包围至少一个基板的壳体组件，壳体组件具有用于进入壳体组件的内部区域的容器门。壳体组件包括沿壳体组件的侧壁限定的支撑结构。支撑结构具有突出到壳体组件的内部区域中的多个边缘支撑约束。所述多个边缘支撑约束支撑所述至少一个基板的相对边缘区域，以致使所述至少一个基板围绕轴线偏转。

6. 发明申请

WO2008008738A2 VARIABLE LOT SIZE LOAD PORT 审中-公开
标题翻译：可变大尺寸负载端口
公开(公告)号：WO2008008738A2
公开(公告)日：2008-01-17
申请号：PCT/US2007/073086
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： H01L21/677
CPC分类号： H01L21/67772
摘要： A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.
摘要翻译：可变批量装载端口组件包括工具接口，端口门，前进板以及第一和第二闩锁键。工具界面通常在垂直方向上延伸并具有孔径。端口门具有关闭位置，其中端口门至少部分地封闭孔。前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。第一闩锁键以第一高度设置在端口门上，第一高度被构造成选择性地接合具有第一选择的FOUP容量的FOUP的对应的闩锁钥匙插座，并且第二闩锁键以第二高度设置在端口门上，第二高度被配置为选择性地接合具有第二选择的FOUP容量的另一FOUP的对应的闩锁键插座。

7. 发明申请

WO2007008944A1 BELT CONVEYOR FOR USE WITH SEMICONDUCTOR CONTAINERS 审中-公开
标题翻译：带式输送机用于半导体容器
公开(公告)号：WO2007008944A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/026978
申请日：2006-07-10
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
发明人： BONORA, Anthony, C. , HINE, Roger, G. , KROLAK, Michael
IPC分类号： B65G15/12 , B65G47/26 , B65G43/10 , H01L21/677
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： The present invention comprises a conveyor (100) for moving a semiconductor containers (2) throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones (Z). Each conveyor zone includes a first belt (110), a second belt (112), a drive assembly (138) for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors (200) to determine, among other things, the position of the container.
摘要翻译：本发明包括用于在整个制造设施中移动半导体容器（2）的输送机（100）。在一个实施例中，输送机包括多个单独控制的传送带（Z）。每个传送带包括第一带（110），第二带（112），用于以基本上相同的速度旋转第一带和第二带的驱动组件（138）。第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。在另一个实施例中，输送机包括用于确定容器位置的传感器（200）。

8. 发明申请

WO2007008555A2 WORKPIECE SUPPORT STRUCTURES AND APPARATUS FOR ACCESSING SAME 审中-公开
标题翻译：工作支持结构和设备进行访问
公开(公告)号：WO2007008555A2
公开(公告)日：2007-01-18
申请号：PCT/US2006/026281
申请日：2006-07-07
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C.
发明人： BONORA, Anthony, C.
IPC分类号： H01L21/673
CPC分类号： B25J15/0028 , B65G65/00 , H01L21/67383 , H01L21/68707
摘要： The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or "grip zones" of the workpiece.
摘要翻译：本发明包括用于存储至少一个具有底面和周缘的工件的工件容器。在一个实施例中，工件支撑结构位于容器外壳内，其在外壳内形成多个垂直堆叠的存放货架。在一个实施例中，每个储物架包括用于以基本上水平的方向支撑工件的第一齿和第二齿。坐在储物架上的工件的底面和周缘延伸超出第一齿和第二齿的外边缘。根据本发明的末端执行器可以接合工件的这些延伸部分或“抓握区域”。

9. 发明申请

WO2006066202A2 ACTIVE EDGE GRIP REST PAD 审中-公开
标题翻译：主动边缘GRIP REST PAD
公开(公告)号：WO2006066202A2
公开(公告)日：2006-06-22
申请号：PCT/US2005/045923
申请日：2005-12-15
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , NOBLES, D., Wayne, Jr. , RILEY, Norma, B.
发明人： BONORA, Anthony, C. , HINE, Roger, G. , NOBLES, D., Wayne, Jr. , RILEY, Norma, B.
IPC分类号： H01L21/00
CPC分类号： H01L21/68707 , Y10S294/902 , Y10S414/141
摘要： The present invention comprises a distal rest pad for supporting a portion of a wafer seated on an end effector. In one embodiment, the rest pad includes a bottom support pad and an edge stop. Each element is mounted separately to the distal end of a support plate. The bottom support pad includes an inclined surface that transitions to a substantially horizontal surface at its distal end. The edge stop has a substantially vertical wafer contact surface that the peripheral edge of a wafer eventually contacts as the wafer is urged towards the distal rest pad. In another embodiment, the bottom support pad comprises an inclined surface. In yet another embodiment, the distal rest pad comprises a single structure. The distal rest pad includes a backstop portion and a bottom support separated by a particle collection groove. The bottom support may include an inclined lead-in surface that transitions into a flat contact surface or only comprise an inclined lead-in surface.
摘要翻译：本发明包括用于支撑位于末端执行器上的晶片的一部分的远端休息垫。在一个实施例中，休息垫包括底部支撑垫和边缘止动件。每个元件分别安装到支撑板的远端。底部支撑垫包括在其远端处转变到基本水平的表面的倾斜表面。边缘止动器具有基本上垂直的晶片接触表面，当晶片被推向远侧支撑垫时，晶片的周边边缘最终接触。在另一个实施例中，底部支撑垫包括倾斜表面。在另一个实施例中，远侧支撑垫包括单个结构。远侧支撑垫包括由颗粒收集槽分隔的止挡部分和底部支撑件。底部支撑件可以包括倾斜的导入表面，其转变成平坦的接触表面或仅包括倾斜的导入表面。

10. 发明申请

WO2009154789A1 DIRECT LOADING TO AND FROM A CONVEYOR SYSTEM 审中-公开
标题翻译：直接装载到输送机系统
公开(公告)号：WO2009154789A1
公开(公告)日：2009-12-23
申请号：PCT/US2009/003686
申请日：2009-06-19
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , FATULA, Joseph, John, III , DEYANOV, Roumen, I. , ITO, Hiroshi , HINE, Roger, G.
发明人： BONORA, Anthony, C. , FATULA, Joseph, John, III , DEYANOV, Roumen, I. , ITO, Hiroshi , HINE, Roger, G.
IPC分类号： H01L21/677
CPC分类号： H01L21/67706 , H01L21/6773 , H01L21/67736 , H01L21/67775
摘要： A direct load system includes a load port for moving containers in a vertical orientation between a lower position near a conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass. The single arm raises up from the nested location, off of the conveyor, and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e g, wafers, etc ) to locations/tools of a fabrication facility.
摘要翻译：直接负载系统包括用于在垂直方向上移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。输送机包括允许单臂通过的梁中的单个槽。单臂从嵌套位置抬起，离开传送带，并到达装载端口门。单臂和输送槽的接口可以被其他工具使用，例如储存器或工具，其需要直接接近用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。

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