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1. 发明公开

KR20180021206A 다층 구조물의 층들 사이의 오버레이를 측정하기 위한 기법 审中-公开
标题翻译：用于测量多层结构的层之间的重叠的技术
公开(公告)号：KR20180021206A
公开(公告)日：2018-02-28
申请号：KR20187004381
申请日：2016-07-06
申请人： APPLIED MATERIALS ISRAEL LTD
发明人： RATHORE DHANANJAY SINGH , WEINBERG YAKOV , SCHWARZBAND ISHAI , KRIS ROMAN , ZAUER ITAY , GOLDMAN RAN , NOVAK OLGA , ADAN OFER , LEVI SHIMON
IPC分类号： G03F7/20 , G03F1/44 , G03F7/11 , H01L21/768
CPC分类号： G06T7/0006 , G06K9/525 , G06T7/001 , G06T7/10 , G06T7/11 , G06T7/12 , G06T7/143 , G06T7/194 , G06T7/30 , G06T7/337 , G06T2207/10061 , G06T2207/20116 , G06T2207/30148
摘要： 다층구조물의층들사이의오버레이를결정하기위한방법은상기다층구조물을나타내는주어진이미지를획득하는단계, 상기다층구조물의층들에대한예상되는이미지들을획득하는단계, 상기층들의예상되는이미지들의조합으로서상기다층구조물의조합된예상되는이미지를제공하는단계, 상기조합된예상되는이미지에대해상기주어진이미지의레지스트레이션을수행하는단계, 상기주어진이미지의세그먼테이션을제공함으로써, 세그먼트화된이미지, 및상기다층구조물의층들의맵들을생성하는단계를포함한다. 이방법은상기다층구조물의임의의 2개의선택된층 사이의오버레이를, 상기 2개의선택된층의예상되는이미지들과함께상기 2개의선택된층의맵들을처리함으로써결정하는단계를추가로포함할수 있다.
摘要翻译：一种用于确定所述多层结构的层之间的重叠方法是一组获得的预期图像的预期图像，用于获得给定的图像，代表该多层结构，该多层结构的层的层为提供组合的投影图像，并且对于该组合的投影图像，通过设置给定的图像的分割为的给定图像进行配准，分割所述多层结构的图像的步骤，并且所述多层并生成结构图层。然后，该方法可以包括通过处理所述的地图为多层结构中的任意两个选定的层之间的重叠确定的进一步的步骤，与所述两个所选择的层的期望图像的两个所选择的层。

2. 发明专利

AU2003263776A8 A system and method for determining a cross sectional feature of a structural element having a sub-micron cross section 未知
公开(公告)号：AU2003263776A8
公开(公告)日：2004-02-02
申请号：AU2003263776
申请日：2003-07-11
申请人： SENDER BENZION , DROR OPHIR , APPLIED MATERIALS ISRAEL LTD , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN , APPLIED MATERIALS INC
发明人： DROR OPHIR , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN , SENDER BENZION
IPC分类号： G01B15/00 , H01J37/28 , H01L21/027 , H01L21/66 , G03F7/20
摘要： A method and system for determining a cross sectional feature of a structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method includes: (a) determining a first traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and a first transverse section; (b) selecting, in response to a first parameter, whether to (i) determine a second traverse section cross sectional feature in response to the first traverse cross sectional feature, or (ii) to determine the second traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and the second transverse section; and (c) determining the second traverse section cross sectional feature in response to the selection.

3. 发明申请

WO2004008255A8 METHOD AND APPARATUS FOR MEASURING CRITICAL DIMENSIONS WITH A PARTICLE BEAM 审中-公开
标题翻译：用粒子束测量临界尺寸的方法和设备
公开(公告)号：WO2004008255A8
公开(公告)日：2004-07-22
申请号：PCT/US0321690
申请日：2003-07-11
申请人： APPLIED MATERIALS INC , APPLIED MATERIALS ISRAEL LTD , SENDER BENZION , DROR OPHIR , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN
发明人： SENDER BENZION , DROR OPHIR , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN
IPC分类号： G01B15/00 , H01J37/28 , H01L21/027 , H01L21/66 , G01N23/225 , G06T11/00
CPC分类号： H01J37/28 , H01J2237/2816
摘要： A method and system for determining a cross sectional feature of a structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method includes: (a) determining a first traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and a first transverse section; (b) selecting, in response to a first parameter, whether to (i) determine a second traverse section cross sectional feature in response to the first traverse cross sectional feature, or (ii) to determine the second traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and the second transverse section; and (c) determining the second traverse section cross sectional feature in response to the selection.
摘要翻译：一种用于确定具有亚微米横截面的结构元件的横截面特征的方法和系统，横截面由位于第一和第二横向部分之间的中间部分限定。该方法包括：（a）响应于以一个或多个对应倾斜角倾斜的电子束对结构元件的一个或多个扫描来确定第一横向截面横截面特征，以便至少照亮顶部部分和第一横向部分; （b）响应于第一参数选择是否（i）响应于第一横向截面特征确定第二横向截面横截面特征，或（ii）响应于第二横向截面特征确定第二横向截面横截面特征利用以一个或多个对应倾斜角倾斜的电子束对结构元件进行一次或多次扫描，以至少照亮顶部部分和第二横向部分; （c）响应于该选择确定第二横断面截面特征。

4. 发明申请

WO2004008255A2 A SYSTEM AND METHOD FOR DETERMINING A CROSS SECTIONAL FEATURE OF A STRUCTURAL ELEMENT HAVING A SUB-MICRON CROSS SECTION 审中-公开
标题翻译：一种用于确定具有子麦克风截面的结构元件的交叉部分特征的系统和方法
公开(公告)号：WO2004008255A2
公开(公告)日：2004-01-22
申请号：PCT/US0321690
申请日：2003-07-11
申请人： APPLIED MATERIALS INC , APPLIED MATERIALS ISRAEL LTD , SENDER BENZION , DROR OPHIR , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN
发明人： SENDER BENZION , DROR OPHIR , TAM AVIRAM , MENADEVA OVADYA , KRIS ROMAN
IPC分类号： G01B15/00 , H01J37/28 , H01L21/027 , H01L21/66 , G03F7/20
CPC分类号： H01J37/28 , H01J2237/2816
摘要： A method and system for determining a cross sectional feature of a structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method includes: (a) determining a first traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and a first transverse section; (b) selecting, in response to a first parameter, whether to (i) determine a second traverse section cross sectional feature in response to the first traverse cross sectional feature, or (ii) to determine the second traverse section cross sectional feature in response to one or more scans of the structural element with an electron beam that is tilted at one or more corresponding tilt angle, such as to illuminate at least the top section and the second transverse section; and (c) determining the second traverse section cross sectional feature in response to the selection.
摘要翻译：用于确定具有亚微米横截面的结构元件的横截面特征的方法和系统，所述横截面由位于第一和第二横移部分之间的中间部分限定。该方法包括：（a）响应于结构元件的一次或多次扫描确定第一横截面横截面特征，其中电子束以一个或多个相应的倾斜角倾斜，例如至少照亮顶部和第一横截面; （b）响应于第一参数选择是否（i）响应于第一横截面特征确定第二横截面横截面特征，或（ii）确定响应中的第二横截面横截面特征以一个或多个扫描结构元件，其中电子束以一个或多个相应的倾斜角倾斜，例如至少照射顶部和第二横截面; 和（c）响应于选择确定第二横截面横截面特征。

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