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    • 2. 发明公开
    • 가속도 센서, 가속도 센서 장치 및 가속도 센서의 제조 방법
    • 加速传感器,加速传感器装置和加速传感器的制作方法
    • KR1020010082610A
    • 2001-08-30
    • KR1020000083450
    • 2000-12-28
    • 후지쯔 가부시끼가이샤후지쓰 메디아 데바이스 가부시키가이샤
    • 이시카와히로시다나카히로시이카타오사무사토요시오
    • G01P15/09
    • G01P15/097G01P15/0915
    • PURPOSE: An acceleration sensor is provided to realize a further reduction in size and cost while maintaining high performance and not limit sliding vibration of a vibrator for the purpose of preventing a lowering of the detection performance. CONSTITUTION: The acceleration sensor includes a vibrator(1) formed of a piezoelectric single crystal, and a weight section(2) connected to the vibrator(1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes(1a) used for detecting an electrical signal are formed on the vibrator(1) and connected to two wiring patterns(2a) of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section(2) is detected as sliding vibration by the vibrator(1) and an electrical signal corresponding to the acceleration is output from the electrodes(1a) through the wiring patterns(2a).
    • 目的:提供一种加速度传感器,以实现进一步降低尺寸和成本,同时保持高性能,并且不限制振动器的滑动振动,以防止检测性能的降低。 构成:加速度传感器包括由压电单晶形成的振动器(1)和连接到振动器(1)的重量部分(2),并且支撑在与组件的重心位置不同的位置 振动器和重量部分。 在振动器(1)上形成用于检测电信号的两个分割电极(1a),并与各向异性导电粘合剂一起连接到也用作信号检测基板的配重部分的两个布线图案(2a)。 当施加一个方向的加速度时,施加在重物部分(2)中的角力矩被振动器(1)检测为滑动振动,并且通过布线从电极(1a)输出与加速度对应的电信号 图案(图2a)。