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1. 发明专利

JP2014149920A Gas field ionization ion source and scanning ion microscope 审中-公开
标题翻译：气体离子源和扫描离子显微镜
公开(公告)号：JP2014149920A
公开(公告)日：2014-08-21
申请号：JP2013016324
申请日：2013-01-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWANAMI YOSHIMI , MUTO HIROYUKI
IPC分类号： H01J27/26 , H01J37/08 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning ion microscope in which an ion beam current is stable for a long term.SOLUTION: In a gas field ionization ion source and a scanning ion microscope using the same, a structure which is controlled so as to have a relatively low temperature with respect to an emitter electrode is provided in a space having the same gas pressure as the gas pressure in the vicinity of the emitter electrode. Preferably, the temperature is controlled to be equal to or less than 60 K. With the operation time of a device or instability of an ion beam current as a determination reference, the operation of the ion source is stopped and the control to increase the temperature of the structure for a predetermined time and by a predetermined temperature difference is performed. Consequently, the ion beam current becomes stable for a long term, a sample image is suppressed from having extra noise, and the accuracy of quantitative measurement, processing and analysis is improved. Moreover, since the breakage of the emitter electrode can be prevented in advance, restoration (recovery or replacement) work is reduced and the operation rate of the device is improved.
摘要翻译：要解决的问题：提供一种其中离子束电流长期稳定的扫描离子显微镜。解决方案：在气体离子源和使用该扫描离子显微镜的扫描离子显微镜中，其结构被控制为在具有与发射电极附近的气体压力相同的气体压力的空间内设置相对于发射极的温度较低的温度。优选地，将温度控制在等于或小于60K。随着器件的操作时间或离子束电流的不稳定性作为确定参考，离子源的操作停止，并且控制以提高温度的结构进行预定时间和预定的温度差。因此，离子束电流长期变得稳定，可以抑制样本图像的噪声增加，提高定量测量，处理和分析的精度。此外，由于可以预先防止发射电极的断裂，所以恢复（恢复或更换）工作减少，并且器件的操作速率提高。

2. 发明专利

JP2013165076A Gas field ionization ion source and ion beam device 有权
标题翻译：气体离子源和离子束装置
公开(公告)号：JP2013165076A
公开(公告)日：2013-08-22
申请号：JP2013111230
申请日：2013-05-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWANAMI YOSHIMI , ISHITANI TORU
IPC分类号： H01J27/26 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide a gas field ionization ion source which emits heavy ions suitable for processing of a sample with high luminance.SOLUTION: A gas field ionization ion source according to this invention includes a temperature control part individually controlling a temperature of a tip of an emitter electrode and a temperature of a gas emission port portion of a gas supply part.
摘要翻译：要解决的问题：提供一种气体离子源，其发射适合于处理高亮度样品的重离子。解决方案：根据本发明的气田电离离子源包括温度控制部分，其单独地控制温度发射电极的尖端和气体供给部的气体排出口部的温度。

3. 发明专利

JP2013054911A Emitter, gas field ionization ion source, and ion beam device 有权
标题翻译：发动机，气体场离子源和离子束装置
公开(公告)号：JP2013054911A
公开(公告)日：2013-03-21
申请号：JP2011192272
申请日：2011-09-05
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWANAMI YOSHIMI , MORIYA HIRONORI , MUTO HIROYUKI
IPC分类号： H01J27/26 , H01J37/08 , H01J37/317
CPC分类号： H01J37/26 , H01J9/50 , H01J37/08 , H01J49/16 , H01J2237/0807 , Y02W30/828
摘要： PROBLEM TO BE SOLVED: To provide an ion source emitter minute in variation of extraction voltages even after regeneration processing at an apex section has been repeatedly performed.SOLUTION: In an emitter according to the present invention, a tip has a triangular pyramid shape including an apex of a monoatom, and a shape of the tip viewed from the apex side is substantially hexagonal.
摘要翻译：要解决的问题：即使在重新进行在顶点处的再生处理之后，也可以提供在提取电压的变化中分钟的离子源。解决方案：在根据本发明的发射器中，尖端具有包括单原子的顶点的三角锥形，并且从顶点观察的尖端的形状基本上是六边形。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2014078458A Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：JP2014078458A
公开(公告)日：2014-05-01
申请号：JP2012226519
申请日：2012-10-12
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHICHI HIROYASU , MATSUBARA SHINICHI , OSE YOICHI , KAWANAMI YOSHIMI , ARAI NORIAKI
IPC分类号： H01J37/28 , H01J37/12 , H01J37/20 , H01J37/244
CPC分类号： H01J37/20 , H01J37/026 , H01J37/244 , H01J37/28 , H01J2237/04756 , H01J2237/12 , H01J2237/2448 , H01J2237/2449 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To provide an ion bean device that is high in a signal/noise strength ratio of an observation image even with low ion energy, can make ultra high resolution observation and dimension measurement, can observe an insulator sample, and can appropriately obtain sample element information.SOLUTION: In an ion beam device formed of an ion source generating positive ions, an ion lens, and a sample, a first electrode is disposed between an ion lens closest to the sample and the sample to apply a first positive voltage and a second positive voltage different from the first voltage is applied to the sample, so that an electric field gradient can be generated between the sample and the first electrode. Further, the ion beam device comprises a charged particle detector that can detect secondary electrons emitted from the sample.
摘要翻译：要解决的问题：为了提供即使具有低离子能量的观测图像的信号/噪声强度比高的离子束装置，可以进行超高分辨率观察和尺寸测量，可以观察绝缘体样品，并且可以适当地获得样品元素信息。解决方案：在由产生正离子的离子源，离子透镜和样品形成的离子束装置中，第一电极设置在最接近样品的离子透镜和样品之间以施加第一阳性电压和与第一电压不同的第二正电压被施加到样品，使得可以在样品和第一电极之间产生电场梯度。此外，离子束装置包括可以检测从样品发射的二次电子的带电粒子检测器。

5. 发明专利

JP2013229271A Charged particle microscope 有权
标题翻译：充电颗粒显微镜
公开(公告)号：JP2013229271A
公开(公告)日：2013-11-07
申请号：JP2012102035
申请日：2012-04-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MATSUBARA SHINICHI , KAWANAMI YOSHIMI , TANAKA HIROYUKI , SHICHI HIROYASU , OSE YOICHI
IPC分类号： H01J27/26 , H01J37/08 , H01J37/16 , H01J37/28
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/0807
摘要： PROBLEM TO BE SOLVED: To supply an ion beam which is made high in purity, highly reliable, and stable by cooling an ionization gas supplied to an emitter tip of a gas electric field ionization ion source, and to solve the program that the electric field ionization ion source becomes unstable owing to impurities included in the ionization gas.SOLUTION: A charged particle microscope is constituted by including a first heat exchanger thermally coupled to a part of an electric field ionization ion source, a refrigerator such that a second gas line which is connected to the first heat exchanger and in which a refrigerant circulates and a cold head can be cooled, and a second heat exchanger which cools both the first and second gas lines and is connected to the cold head.
摘要翻译：要解决的问题：为了通过冷却供给到气体电离电离离子源的发射极尖端的电离气体来提供纯度高，可靠性和稳定的离子束，并且解决了电场离子化离子源由于电离气体中包含的杂质而变得不稳定。解决方案：带电粒子显微镜由包括与电场电离离子源的一部分热耦合的第一热交换器构成，冰箱使得第二气体管线连接到第一热交换器，其中制冷剂循环并且冷头可以被冷却;以及第二热交换器，其冷却第一和第二气体管线并连接到冷头。

6. 发明专利

JP2014149921A Ion beam apparatus, and the sample observation method 审中-公开
标题翻译：离子束装置和样品观测方法
公开(公告)号：JP2014149921A
公开(公告)日：2014-08-21
申请号：JP2013016326
申请日：2013-01-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MUTO HIROYUKI , KAWANAMI YOSHIMI
IPC分类号： H01J37/28 , H01J37/08 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a device and a method for observing the processing surface of a sample including an uneven cross section with high image resolution, by suppressing image failure due to charging.SOLUTION: In a vacuum container 4, a liquid medium 1 containing ion liquid is supplied from a liquid medium supply section 17 to the processing cross section of a sample 2, and at least the surface being irradiated with an ion beam 3 is covered with the liquid medium 1 containing ion liquid. The liquid medium supply section 17 has a reservoir and a manipulator with a probe. A gas field ionization ion source is used as an ion source 7.
摘要翻译：要解决的问题：提供一种通过抑制由于充电引起的图像故障来观察包括具有高图像分辨率的不均匀横截面的样品的处理表面的装置和方法。解决方案：在真空容器4中，液体介质1 含有液体的离子液体从液体介质供给部17供给到样品2的处理截面，至少被离子束3照射的面被包含离子液体的液体介质1覆盖。液体介质供给部分17具有储存器和具有探针的操纵器。气体离子源用作离子源7。

7. 发明专利

JP2014032890A Analytical method and ion beam device 审中-公开
标题翻译：分析方法和离子束装置
公开(公告)号：JP2014032890A
公开(公告)日：2014-02-20
申请号：JP2012173578
申请日：2012-08-06
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MUTO HIROYUKI , KAWANAMI YOSHIMI
IPC分类号： H01J37/28 , H01J37/20 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To solve such a problem of a mass spectroscope using a matrix-assisted laser desorption ionization method that since laser is used for irradiating a sample and the spot diameter is the micrometer order, analysis of nanometer level is impossible, and that secondary ion mass spectrometry has a problem in the ionization of molecule of large mass, although it has a revolving-power of several hundreds nanometer.SOLUTION: An ion beam device including an ion source, an ion beam irradiation system, a sample, a stage for mounting the sample, a mass spectrograph, a control unit, and a vacuum container is used. The sample is coated or impregnated with a liquid medium containing an ion liquid in the shape of thin film. A gas electric field ionization ion source or a liquid metal ion source is used. Sputtered particles of the sample are controlled to become atoms, molecules or both of them, by the liquid medium containing the ion liquid.
摘要翻译：要解决的问题为了解决使用矩阵辅助激光解吸电离法的质谱仪的这种问题，由于使用激光照射样品并且光斑直径是微米级，因此纳米级的分析是不可能的，并且二次离子质谱法具有大质量分子离子化的问题，尽管它具有几百纳米的旋转功率。解决方案：一种离子束装置，包括离子源，离子束照射系统，样品，阶段为了安装样品，使用质谱仪，控制单元和真空容器。将样品用含有薄膜形式的离子液体的液体介质进行涂布或浸渍。使用气体电场离子源或液态金属离子源。样品的溅射颗粒被含有离子液体的液体介质控制成为原子，分子或二者。

8. 发明专利

JP2013214425A Ion beam device and method of removing impurity gas 审中-公开
标题翻译：离子束装置和去除气体的方法
公开(公告)号：JP2013214425A
公开(公告)日：2013-10-17
申请号：JP2012084424
申请日：2012-04-03
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MUTO HIROYUKI , ARAI NORIAKI , KAWANAMI YOSHIMI
IPC分类号： H01J27/26 , H01J37/08 , H01J37/18
摘要： PROBLEM TO BE SOLVED: To solve such a problem of a gas field ionization ion source that glow discharge takes place near the exhaust port of ionization gas when it is floating and the displacement is increased, and since the displacement cannot be increased, it takes time for discharging the impurity gas exiting a gas ionization chamber therefrom.SOLUTION: The ion beam device used for observing or processing a sample by irradiating the sample with an ion beam generated from a gas field ionization ion source includes an emitter tip becoming an anode, an extraction electrode becoming a cathode, a vacuum container for housing at least the emitter tip, a gas introduction part for supplying gas through a gas introduction port into a space between the emitter tip and the extraction electrode, and a gas exhaust part for exhausting the gas through a gas exhaust port by means of a vacuum pump.
摘要翻译：要解决的问题为了解决在离子化气体排出口附近发生辉光放电的气体电离离子源的这种问题，当浮动和位移增加时，由于位移不能增加，所以需要时间用于排出离开气体离子化室的杂质气体。解决方案：用于通过用气体离子源产生的离子束照射样品来观察或处理样品的离子束装置包括成为阳极的发射极尖端，提取电极成为阴极，用于容纳至少发射极尖端的真空容器，用于将气体通过气体导入口供给到发射极尖端和引出电极之间的空间的气体导入部，以及用于排出气体的排气部通过真空泵通过排气口。

9. 发明专利

JP2013084489A Ion source and ion beam device using the same 有权
标题翻译：离子源和离子束设备使用它
公开(公告)号：JP2013084489A
公开(公告)日：2013-05-09
申请号：JP2011224473
申请日：2011-10-12
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SHICHI HIROYASU , MATSUBARA SHINICHI , OSE YOICHI , KAWANAMI YOSHIMI , ARAI NORIAKI
IPC分类号： H01J27/26 , H01J37/08 , H01J37/28
CPC分类号： H01J27/022 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/0216 , H01J2237/0807
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which is small in mechanical vibration amplitude at an emitter tip, obtains a sample observation image with super high resolution, and also eliminates shaking, etc. in the sample observation image.SOLUTION: A charged particle beam microscope incorporates a gas field ionization ion source which includes an emitter tip to generate ions, an emitter base mount to hold the emitter tip in place, a mechanism to heat the emitter tip, an extraction electrode installed oppositely to the emitter tip, and a mechanism to supply gas to the vicinity of the emitter tip. The emitter tip heating mechanism is constructed in such a way that a filament connecting at least two terminals is energized to heat the emitter tip. The terminals are connected by a V-shaped filament, with the angle of the letter V being obtuse. The emitter tip is connected substantially at the center of the filament.
摘要翻译：要解决的问题：为了提供在发射极尖端处的机械振动振幅小的带电粒子束显微镜，以超高分辨率获得样本观察图像，并且还消除了样本观察图像中的抖动等。
解决方案：带电粒子束显微镜包括气体电离离子源，其包括发射极尖端以产生离子，发射器基极安装件以将发射极尖端保持就位，加热发射极尖端的机构，安装的引出电极与发射极尖端相反，以及将气体供应到发射极尖端附近的机构。发射极尖端加热机构的构造使得连接至少两个端子的灯丝被通电以加热发射极尖端。端子通过V形灯丝连接，字母V的角度是钝的。发射极尖端基本上连接在灯丝的中心。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2011086465A Gas field ionization ion source and ion beam device 有权
标题翻译：气体离子源和离子束装置
公开(公告)号：JP2011086465A
公开(公告)日：2011-04-28
申请号：JP2009237599
申请日：2009-10-14
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWANAMI YOSHIMI , ISHITANI TORU
IPC分类号： H01J27/26 , H01J37/08 , H01J37/317
CPC分类号： H01J37/08 , H01J27/26 , H01J37/3056 , H01J2237/002 , H01J2237/006 , H01J2237/0807
摘要： PROBLEM TO BE SOLVED: To provide a gas field ionization ion source capable of discharging heavy ions suitable for processing a sample with a high luminance. SOLUTION: The gas field ionization ion source includes a temperature control portion separately controlling a temperature of a leading end of an emitter electrode and a temperature of a gas discharge port of a gas supply part. COPYRIGHT: (C)2011,JPO&INPIT

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