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1. 发明专利

JP2014215782A 流量制御用の多孔型オリフィス及びこれを用いた流量制御装置有权
标题翻译：使用它的流量控制和流量控制装置的多孔分量
公开(公告)号：JP2014215782A
公开(公告)日：2014-11-17
申请号：JP2013091867
申请日：2013-04-25
申请人：株式会社フジキン , Fujikin Inc
发明人： HIRATA KAORU , HIDAKA ATSUSHI , NAGASE MASAAKI , DOI RYOSUKE , IKEDA SHINICHI , NISHINO KOJI , SUGITA KATSUYUKI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , F16L55/02718
摘要：【課題】制御流量制御用オリフィスに於いて、制御流量の増大に対応するため、オリフィス孔径を大きくすると、臨界膨張条件が成立するオリフィス上・下流の圧力比P2/P1が変動し、流量制御範囲が狭くなることを防止する。【解決手段】流量制御用オリフィスに於いて、所定流量の流体の流通に必要な一つのオリフィス孔の開口面積を分割し、前記開口面積に等しい総開口面積を有する複数個のオリフィス小孔を設けた構成とする。【選択図】図10
摘要翻译：要解决的问题：为了防止由于满足临界膨胀条件的上游/下游的压力比P / P的波动引起的流量控制范围的变窄，当孔径扩大以对应于控制的增加用于控制流量的孔口中的流量。解决方案：采用这样一种结构，在用于流量控制的孔口中，分配具有规定流量的流体循环所需的一个孔口的开口面积，并且提供了具有等于孔径面积的总开口面积的多个孔口小孔。

2. 发明专利

JP2007004644A Flow rate range variable flow control device 有权
标题翻译：流量范围可变流量控制装置
公开(公告)号：JP2007004644A
公开(公告)日：2007-01-11
申请号：JP2005185845
申请日：2005-06-27
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SAITO MASAHITO , HINO SHOICHI , SHIMAZU TSUTOMU , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G05D7/00 , G01F1/00 , G01F1/42 , G01F1/48 , G01F1/684 , G01F7/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and to reduce the facility cost by enabling accurate flow control of a fluid in a further wide flow area by use of one flow control device. SOLUTION: The pressure type flow control device is adapted to calculate the flow rate of a fluid passing through an orifice 8 using an orifice upstream pressure P 1 and/or an orifice downstream pressure P 2 as Qc=KP 1 (K is a proportionality factor) or Qc=KP 2 m (P 1 -P 2 ) n (K is a proportionality factor, and m and n are constant numbers). In this pressure type flow control device, a fluid passage between the downstream side of a control valve and a fluid supplying conduit is formed of at least two or more parallel fluid passages, and orifices differed in fluid flow characteristic are interposed in the parallel fluid passages, respectively. The fluid in a small flow area is distributed to one orifice in flow control of the fluid in the small flow area, and the fluid in a large flow area is switchingly distributed to the other orifice in flow control of the fluid in the large flow area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用一个流量控制装置，能够在更宽的流动区域中对流体进行精确的流量控制，从而使流量控制装置小型化并降低设备成本。解决方案：压力型流量控制装置适于计算通过孔口上游压力P 1 和/或孔口下游压力P 2 作为Qc = KP 1 （K是比例因子）或Qc = KP 2 m（SP （K是比例因子，m和n是常数）。在该压力式流量控制装置中，控制阀的下游侧与流体供给管道之间的流体通路由至少两个以上的平行流体通路形成，并且流体流动特性不同的孔插入到并联流体通路，分别。小流量区域中的流体在小流量区域中的流体的流动控制中分配到一个孔口，并且在大流量区域中的流体的流量控制中，大流量区域中的流体被切换地分配到另一个孔口。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2014190387A Flow control valve for flow controlling device 有权
标题翻译：流量控制阀用于流量控制装置
公开(公告)号：JP2014190387A
公开(公告)日：2014-10-06
申请号：JP2013064692
申请日：2013-03-26
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIROSE TAKASHI , YAMAJI MICHIO , YOSHIDA TOSHIHIDE , SHIKKO KOHEI
IPC分类号： F16K31/02 , F16K27/02
CPC分类号： F16K31/004 , F16K7/14 , F16K25/005 , F16K27/0236 , F16K31/007
摘要： PROBLEM TO BE SOLVED: To provide a valve capable of simplifying and miniaturizing a structure of a piezoelectric element driving type metal diaphragm control vale, and facilitate assembly, maintenance and check of the structure.SOLUTION: A flow control valve comprises: a valve body 1; a metal diaphragm valve body 2; a presser screw 5; an upper support cylinder body 23 mounted vertically in a hole part 1a for a valve chamber of the valve body 1 and screwed with a lower support body 22 having a diaphragm presser 3 at a lower part; a guide body 24 mounted to an outer periphery of the upper support body 23; a leaf spring 18 arranged on a bottom wall of the lower support body 22 via a leaf spring receiving board 8; a lower receiving board 9 provided in an upper support cylinder body 21; a piezoelectric element 10 mounted in the upper support cylinder body 21 via a ball 9a; a bearing 14 arranged at an upper part of the piezoelectric element 10; and positioning members 12, 13 arranged above the upper support cylinder body 23.
摘要翻译：要解决的问题：提供一种能够简化和小型化压电元件驱动型金属隔膜控制阀的结构的阀，并且便于组装，维护和检查结构。解决方案：流量控制阀包括：阀体1 ; 金属隔膜阀体2; 压脚螺丝5; 上部支撑筒体23垂直安装在阀体1的阀室的孔部1a中，并与下部具有隔膜推压器3的下部支撑体22螺纹连接; 安装到上支撑体23的外周的引导体24; 通过板簧接收板8布置在下支撑体22的底壁上的板簧18; 设置在上支撑筒体21中的下接收板9; 经由球9a安装在上支撑筒体21中的压电元件10; 布置在压电元件10的上部的轴承14; 以及布置在上支撑筒体23上方的定位构件12,13。

4. 发明专利

JP2014092929A Accumulation-type gas supply device 有权
标题翻译：蓄能式气体供应装置
公开(公告)号：JP2014092929A
公开(公告)日：2014-05-19
申请号：JP2012243041
申请日：2012-11-02
申请人： Fujikin Inc , 株式会社フジキン
发明人： KOGAI MUTSUNORI , HIROSE TAKASHI , YAMAJI MICHIO , MATSUDA TAKAHIRO
IPC分类号： G05D7/00
CPC分类号： G05D7/00 , F15B13/044 , F16K27/003 , G05D7/0652 , G05D7/0682 , Y10T137/87249 , Y10T137/87885
摘要： PROBLEM TO BE SOLVED: To improve an accumulation-type gas supply device for a semiconductor manufacturing apparatus by the following: increasing the number of gas supply lines, reducing the size of the device, reducing the internal volume of gas channels inside the device, enhancing the gas replacement properties of the device, reducing installation space, and facilitating maintenance of various instruments.SOLUTION: Two flow control devices 3 provided with a plurality of flow controllers are secured in mutually opposed combination to a gas-inlet-side block 12 and a gas-outlet-side block 13 which are parallelly arranged with a space in between in planar view; each of the flow controllers 3 is provided with an inlet opening/closing valve 1 and an outlet opening/closing valve 5, whereby a gas supply unit U provided with at least four gas supply lines S is formed; and a plurality of gas supply units U are secured in a stacked configuration.
摘要翻译：要解决的问题：通过以下方式改善用于半导体制造装置的累积型气体供应装置：增加气体供应管线的数量，减小装置的尺寸，减小装置内的气体通道的内部容积，增强设备的气体替换性能，减少安装空间，便于各种仪器的维护。解决方案：设有多个流量控制器的两个流量控制装置3以相互相对的组合固定到气体入口侧块体12和气体出口侧块13，其平面地平面地布置有在其间的空间; 每个流量控制器3设置有入口开闭阀1和出口开/关阀5，由此形成设置有至少四个气体供应管线S的气体供应单元U; 并且多个气体供给单元U被固定在堆叠构造中。

5. 发明专利

JP2012033188A Variable flow rate range type flow control device 有权
标题翻译：可变流量范围流量控制装置
公开(公告)号：JP2012033188A
公开(公告)日：2012-02-16
申请号：JP2011219478
申请日：2011-10-03
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SIATO MASAHITO , HINO SHOICHI , SHIMAZU TSUYOSHI , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA TOSHIHIDE , TANAKA HISASHI
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and reduce equipment cost by enabling a single flow control device to highly accurately control a wider flow rate range of fluids.SOLUTION: In a pressure type flow rate control device which calculates a flow rate of a fluid flowing through an orifice using either pressures at an upstream side of the orifice Pand at a downstream side of the orifice or at least the pressure at the upstream side of the orifice P, a fluid passage between the downstream side of a first valve 2 of the pressure type flow rate control device and a fluid supply pipe conduit 5 is bifurcated into two parallel fluid passages, one fluid passage 5c provided with a second valve 34 and a first orifice 8c and the other fluid passage 5g provided with no valve and a second orifice 8a. The one fluid passage 5c is controlled by an opening and closing of the second valve 34 and allows the fluid in a large flow rate range to flow to the first orifice 8c. The other fluid passage 5g is continuous all the time and allows the fluid in a small flow rate range to flow to the second orifice 8a.
摘要翻译：要解决的问题：通过使单个流量控制装置能够高精度地控制流体的更宽的流量范围，来使流量控制装置小型化并降低设备成本。解决方案：在压力式流量控制装置中，使用压力在孔口P 1 的上游侧计算流过孔口的流体的流量，以及在孔口的下游侧或孔口的上游侧的压力至少为压力类型的第一阀2的下游侧之间的流体通路流量控制装置和流体供给管道5分成两个平行的流体通道，一个流体通道5c设置有第二阀34和第一孔口8c，另一个流体通道5g没有设置阀和第二孔口8a。通过第二阀34的打开和关闭来控制一个流体通道5c，并允许大流量范围内的流体流向第一孔口8c。另一个流体通道5g始终是连续的，并允许流体在小流量范围内流到第二孔口8a。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2010151698A Gasket-type orifice and pressure-type flow controller employing same 有权
标题翻译：垫圈型流量控制器和压力型流量控制器
公开(公告)号：JP2010151698A
公开(公告)日：2010-07-08
申请号：JP2008331743
申请日：2008-12-26
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIROSE TAKASHI , SHINOHARA TSUTOMU , YOSHIDA SHUNEI , SHIKKO KOHEI , YAMAJI MICHIO
IPC分类号： G01F1/42 , G01F1/00
CPC分类号： F16L23/20 , F15D1/025 , G01F1/40 , G01F1/42 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a gasket-type orifice excellent in sealability and capable of saving a space, and a pressure-type flow controller employing the orifice. SOLUTION: The gasket-type orifice 1 includes an orifice base 2 having a through passage 2a at the center, an orifice base 3 having a through passage 3a communicating with the passage 2a of the orifice base 2 at the center, and an orifice plate 4 having an orifice hole formed at the center airtightly fitted between both orifice bases 2 and 3. It is provided in a fluid passage and has external end surfaces of both orifice bases 2 and 3 respectively serving as sealing surfaces 2c and 3c. An outer diameter of the orifice base 3 located downstream is formed to be larger than an outer diameter of the orifice base 2 located upstream among both orifice bases 2 and 3. An outer peripheral part of an internal end surface of the orifice base 3 located downstream is to serve as a sealing surface 3d. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供密封性优异并且能够节省空间的垫圈型孔口以及采用该孔口的压力型流量控制器。解决方案：垫片型孔口1包括在中心具有贯通通道2a的孔口基座2，孔口底座3具有与中心的孔底座2的通道2a连通的通路3a，孔板4具有形成在气密地配合在两个孔底座2,3之间的中心处的孔口。它设置在流体通道中，并且分别具有用作密封表面2c和3c的两个孔底座2和3的外端表面。位于下游的孔口基部3的外径形成为大于位于两个孔基部2和3之间的孔基部2的外径。孔基部3的内端面的外周部分位于下游用作密封面3d。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2007057474A Gasket type orifice and pressure type flow control device using the same 有权
标题翻译：垫圈型式和压力型流量控制装置使用它
公开(公告)号：JP2007057474A
公开(公告)日：2007-03-08
申请号：JP2005245804
申请日：2005-08-26
申请人： Fujikin Inc , Tohoku Univ , 国立大学法人東北大学 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI , HIRATA KAORU , SUGITA KATSUYUKI , SHINOHARA TSUTOMU , HIROSE TAKASHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G01F1/42 , G05D7/06
CPC分类号： F16K27/003 , F16L55/02718 , G01F1/36 , G01F15/001 , G01F15/005 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To easily switch, without decomposition and fabrication of a pressure type flow control device, orifices in the device and to easily switch controlled flow rates. SOLUTION: The flow inlet of a valve body 23 of a control valve 2 and a mounting block 39 on the flow inlet, and the flow outlet of the valve body 23 and a mounting block 43 on the outlet are respectively connected dissociatably and airtightly. Thus, a flow passage is formed so that gas flows through the control valve 2. A gasket type orifice 38 of the device A is inserted to fit attachably and detachably between a gasket type orifice insertion hole 42c on the outlet of the valve body 23 and a gasket type orifice insertion hole 43b of the mounting block 43 on the outlet. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了容易地在不分解和制造压力式流量控制装置的情况下切换装置中的孔口并且容易地切换受控的流量。解决方案：控制阀2的阀体23和流入口上的安装块39的流入口以及阀体23的流出口和出口上的安装块43分别分别连接和气密性。因此，形成流路，使得气体流过控制阀2.装置A的垫圈型孔38被插入以可装卸地安装在阀体23的出口上的垫圈型孔插入孔42c和出口上的安装块43的垫圈型孔插入孔43b。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2006330851A Improved pressure type flow rate controller 有权
标题翻译：改进型压力流量控制器
公开(公告)号：JP2006330851A
公开(公告)日：2006-12-07
申请号：JP2005150057
申请日：2005-05-23
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIROSE TAKASHI , DOI RYOSUKE , NISHINO KOJI , SHINOHARA TSUTOMU , IKEDA SHINICHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0623 , H01L21/67017
摘要： PROBLEM TO BE SOLVED: To easily and accurately measure any real gas other than nitrogen by using a pressure type flow rate controller calibrated based on nitrogen gas, and be easily replaced with a thermal type flow rate controller(mass flow controller).
SOLUTION: This pressure flow rate controller for calculating the flow rate of fluid flowing through an orifice 8 using Qc=KP
1 (K is proportional constant) or Q
c =KP
2
m (P
1 -P
2 )
n (K is proportional constant, m and n are constant) by using an orifice upstream side pressure P
1 and an orifice downstream pressure P
2 is configured to adjust a conversion rate(Qe'/Qer) as the rate of a set flow rate signal Qer and a set input signal Qe' of an input/output converter 25 and a conversion rate(Qo'/Qor') as the rate of the flow rate output signal Qor and the control flow rate output Qo'.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用基于氮气校准的压力式流量控制器，容易且准确地测量除氮气之外的任何实际气体，并且可以容易地用热式流量控制器（质量流量控制器）替换。解决方案：该压力流量控制器用于计算使用Qc = KP 1 （K为比例常数）或Q c 的孔8流动的流体的流量。 = KP 2 m （P 1 -P 2 比例常数，m和n是常数），并且孔口下游压力P 2 被配置为调节转化率（Qe'/ Qer）作为输入/输出转换器25的设定流量信号Qer和设定输入信号Qe'的速率和作为流量输出信号Qor和控制的速率的转换速率（Qo'/ Qor'）的速率流量输出Qo'。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005149075A Fluid controller 有权
标题翻译：流体控制器
公开(公告)号：JP2005149075A
公开(公告)日：2005-06-09
申请号：JP2003384945
申请日：2003-11-14
申请人： Fujikin Inc , 株式会社フジキン
发明人： YAMAJI MICHIO , SHINOHARA TSUTOMU , TSUBOTA KENJI , HIROSE TAKASHI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI
IPC分类号： F16K27/00 , F16K37/00 , F17D1/02 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To realize the reduction of the number of components in a fluid controller forming a gas control line, the further miniaturization of the controller itself, and precise flow control thereby. SOLUTION: In the fluid controller composed of a plurality block connectors 1 to 5 which are disposed on a lower stage and form fluid passages 1a, 2a, 3a, 4a, 5a, respectively, and a plurality of fluid control devices 6 to 9 which are disposed on an upper stage and are connected to the block connectors 1 to 5, respectively so as to permit communication therebetween, one fluid control device 9, among fluid control devices 9, is provided with an orifice 11 for rate of flow control, a control valve 12 provided on the upstream side of the orifice 11, and an upstream side pressure sensor 13 which is provided between the orifice and the control valve 12, and detects the pressure of the upstream side of the orifice 11, and controls the rate of flow passing through the orifice by the opening/closing of the control valve 12 while computing the rate of flow passing through the orifice due to the upstream pressure. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了实现形成气体控制线的流体控制器中的部件的数量的减少，控制器本身的进一步的小型化以及精确的流量控制。解决方案：在由设置在下层上并分别形成流体通道1a，2a，3a，4a，5a的多个块连接器1至5的流体控制器中，以及多个流体控制装置6至 9分别设置在上级并且分别连接到块连接器1至5以允许它们之间的连通，一个流体控制装置9在流体控制装置9之间设置有用于流量控制的孔口11 设置在孔口11的上游侧的控制阀12和设置在孔口与控制阀12之间的上游侧压力传感器13，并检测孔口11的上游侧的压力，并控制通过控制阀12的打开/关闭同时通过孔口的流速，同时计算由于上游压力而通过孔口的流速。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2007003013A Fluid control device 有权
标题翻译：流体控制装置
公开(公告)号：JP2007003013A
公开(公告)日：2007-01-11
申请号：JP2006274737
申请日：2006-10-06
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , TOSHI YUJI , YAMAJI MICHIO , TANAKA SHIGEAKI , HIRAO YOSHIYUKI , KAWANO YUJI , HIROSE TAKASHI , YOKOYAMA KOSUKE , KURAMOCHI MICHIO , HATANO MASAYUKI , IKEDA SHINICHI
IPC分类号： F15B11/00
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device having an integrated form without increasing the number of the types of on-off valves as main structural elements of the fluid control device.
SOLUTION: A closing and opening device arranged in the gateway of a fluid controller is one of five types of closing and opening devices, a closing and opening device 91 having one two-port valve 101, a closing and opening device 92 having one two-port valve 101 and one three-port valve 102, a closing and opening device 93 having one two-port valve 101 and two three-port valves 102, a closing and opening device 94 having two three-port valves 102, or a closing and opening device 95 having three three-port valves 102. Valve bodies 101a of the two-port valves 101 of all types of closing and opening devices 91, 92, 93 have the same shape with inlets 103 and outlets 104 provided in the lower faces. Valve bodies 102a of the three-port valves 102 of all types of closing and opening devices 92, 93, 94 95 have the same shape with sub-inlets 105 provided in the lower faces in addition to the inlets 107 and the outlets 106 always communicated with each other.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供具有集成形式的流体控制装置，而不增加作为流体控制装置的主要结构元件的开关阀的类型的数量。解决方案：布置在流体控制器的网关中的关闭和打开装置是五种类型的关闭和打开装置之一，具有一个双口阀101的关闭和打开装置91，闭合和打开装置92具有一个双口阀101和一个三通阀102，具有一个双口阀101和两个三通阀102的关闭和打开装置93，具有两个三通阀102的关闭和打开装置94或具有三个三通阀102的关闭和打开装置95.所有类型的关闭和打开装置91,92,93的双口阀101的阀体101a具有相同的形状，其中入口103和出口104设置在下面。所有类型的关闭和打开装置92,93,9495的三通阀102的阀体102a除了入口107之外还具有与设置在下表面中的子入口105相同的形状，并且出口106始终连通与彼此。版权所有（C）2007，JPO＆INPIT

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