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    • 1. 发明专利
    • Substrate cleaning apparatus
    • 基板清洁装置
    • JP2007150262A
    • 2007-06-14
    • JP2006250697
    • 2006-09-15
    • Yoshiharu Yamamoto義治 山本
    • YAMAMOTO YOSHIHARU
    • H01L21/304B08B3/02G02F1/13
    • B08B3/02H01L21/67051H01L21/68728
    • PROBLEM TO BE SOLVED: To provide an apparatus which can also clean an outer peripheral surface of a substrate during rotation of the substrate.
      SOLUTION: The apparatus comprising: air cylinders 51 and 52 which can generate output separately; a rotation shaft 4 rotatably attached to a main body 43; cam mechanisms 36 and 37 which are rotatably attached to the main body 43 with the rotation shaft 4 as a center for converting the outputs into rotating forces; rotation columns 10 and 11 fixed to the rotation shaft 4 rotatably with an axis parallel to the rotation shaft 4 as a center while circling around an center axis 5 is allowed to horizontally support the substrate and sandwich or release the side surface of the substrate in cooperation with one another along with their rotation; transfer members 26 and 27 which have rotational centers concentrically with the rotation shaft 4 and is capable of transferring the rotating force to the sets of rotation columns 10 and 11 in conjunction with the cam mechanisms 36 and 37, respectively; and a stopper 23 causing the rotation of the cam mechanisms 36 and 37 to be related to the rotation of the rotation shaft 4.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种在基板旋转期间也可以清洁基板外周表面的装置。 解决方案:该装置包括:可分别产生输出的气缸51和52; 可旋转地安装在主体43上的旋转轴4; 凸轮机构36和37,其以旋转轴4为中心旋转地附接到主体43,用于将输出转换成旋转力; 允许以围绕中心轴线5围绕旋转轴4平行于旋转轴4的轴线可旋转地旋转的旋转柱10和11水平地支撑基板并且相互夹着或释放基板的侧表面 相互转动; 转动构件26和27分别具有与转动轴4同心的旋转中心并且能够分别与凸轮机构36和37一起将旋转力传递到旋转柱10和11组; 以及使凸轮机构36,37的旋转与旋转轴4的旋转有关的止动件23。(C)2007,JPO&INPIT
    • 3. 发明专利
    • Device for supplying and agitating flocculant, and method for switching flocculant
    • 用于供应和制造絮凝剂的装置以及用于切换絮凝剂的方法
    • JP2013173098A
    • 2013-09-05
    • JP2012038783
    • 2012-02-24
    • Yoshiharu Yamamoto義治 山本
    • YAMAMOTO YOSHIHARU
    • B01D21/01B01D21/30B01F15/02
    • PROBLEM TO BE SOLVED: To provide a device for supplying and agitating a flocculant and a method for switching the flocculant which can perform continuous agitation, without using one agitating tank to which the flocculant is supplied and charged by one flocculant unit, by providing the one flocculant unit for two agitating tanks obtained by dividing a receiving side agitating tank into two, providing a hopper on a boundary between the agitating tank A and the agitating tank B, and providing a means for tilting to the agitating tank requiring the flocculant by seesaw movement to perform switch and supply operation.SOLUTION: In a device for supplying and agitating a flocculant and a method for switching the flocculant, an agitating tank is divided into two in order to prepare two agitating tanks, and without waiting completion of discharge of the agitating tank A, agitation of the agitating tank B can be started, and therefore, agitation can be performed without requiring standby time. Further, in the device for supplying and agitating the flocculant and the method for switching the flocculant, the flocculant can be supplied by switching by the seesaw movement of a hopper, and even when one of the agitation tanks is in supplying of the flocculant, agitation can be performed on the other agitation tank side.
    • 要解决的问题:提供一种用于提供和搅拌絮凝剂的装置以及用于切换可以进行连续搅拌的絮凝剂的方法,而不使用由一种絮凝剂单元供应和加入絮凝剂的一个搅拌槽,通过提供一种 通过将接收侧搅拌槽分为两部分获得的两个搅拌槽的絮凝剂单元,在搅拌罐A和搅拌槽B之间的边界处设置料斗,并且提供一种用于通过跷跷板运动向需要絮凝剂的搅拌槽倾斜的装置 进行切换和供应操作。解决方案:在用于提供和搅拌絮凝剂的设备和切换絮凝剂的方法中,将搅拌罐分为两部分,以制备两个搅拌罐,并且不等待完成搅拌的排放 罐A,可以开始搅拌搅拌罐B,因此可以在不需要等待时间的情况下进行搅拌。 此外,在用于提供和搅拌絮凝剂的装置和絮凝剂的切换方法中,可以通过料斗的跷跷板移动切换来提供絮凝剂,并且即使当其中一个搅拌槽供应絮凝剂时,搅拌 可以在另一个搅拌槽侧进行。
    • 4. 发明专利
    • Filtration device for flocculated liquid
    • 絮凝液过滤装置
    • JP2013173097A
    • 2013-09-05
    • JP2012038782
    • 2012-02-24
    • Yoshiharu Yamamoto義治 山本
    • YAMAMOTO YOSHIHARU
    • B01D33/06
    • PROBLEM TO BE SOLVED: To provide a filtration device for flocculated liquid capable of rapidly discharging flocs since in the filtration device for separating the flocculated liquid, water drops from a hole of a net or a punching metal stretched on a truncated cone shape filter 13 part of a truncated cone shape separation drum 12, and the truncated cone shape has a gradient in accordance with a kind of flocs.SOLUTION: Flocculated liquid is charged to the inner side by a pipe 16 in rotation of a truncated cone shape separation drum 12 of a filtration device 10, a net or a punching metal is stretched on a truncated cone shape filter 13 part, and thereby, the flocculated liquid is separated and the inside water is dropped from the hole of a truncated cone shape filter 13, and the flocs are discharged to the front side by the truncated cone shape. The filtration device of the flocculated liquid includes the truncated cone shape filter 13 having the gradient in accordance with the kind of the flocs.
    • 要解决的问题:为了提供一种能够快速排出絮凝物的絮凝液的过滤装置,因为在用于分离絮凝液体的过滤装置中,水分从网孔的孔或冲压金属被拉伸在截头圆锥形过滤器13上 的截头圆锥形分离滚筒12,并且截头圆锥形状具有根据絮状物的种类的梯度。溶液:絮凝液体通过管16被旋转而旋转,该管16在圆锥形分离滚筒12的截头圆锥形分离滚筒12的旋转中 过滤装置10,网状物或冲孔金属在截头圆锥形过滤器13部分上被拉伸,从而分离出絮凝液体,并且内部水从截头圆锥形过滤器13的孔落下,并且絮凝物 通过截头圆锥形状排出到前侧。 絮凝液体的过滤装置包括具有根据絮状物的种类的梯度的截头圆锥形过滤器13。
    • 6. 发明专利
    • Substrate washing device
    • 基板清洗装置
    • JP2006102706A
    • 2006-04-20
    • JP2004295590
    • 2004-10-08
    • Yoshiharu Yamamoto義治 山本
    • YAMAMOTO YOSHIHARU
    • B08B3/02H01L21/304H01L21/683
    • PROBLEM TO BE SOLVED: To provide a washing device capable of simultaneously washing front and rear surfaces of a substrate, and allowing quick attachment and detachment of the substrate to/from a table. SOLUTION: This washing device is provided with a substrate holding means rotatably holding the substrate around an axis in the vertical direction, an upper nozzle 20 spraying a washing liquid onto the front surface of the substrate, and a lower nozzle 16 spraying the washing liquid onto the rear surface of the substrate, and washes the substrate while rotating it. The substrate holding means is provided with a rotatable first table 2; a second table 3 rotatable around the same axis of the first table in relation to the first table; and interlocking chucks 4 disposed at equal spaces in the circumferential direction, each with one end pin-connected to the first table and the other end to the second table, respectively, synchronously rocked due to the phase change of the second table to the first table, and hold or release the side face of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种能够同时洗涤基板的前表面和后表面的洗涤装置,并且允许将基板快速地附接和从桌子上脱离。 解决方案:该洗涤装置设置有:基板保持装置,其可旋转地将基板沿垂直方向保持在轴上;上喷嘴20,其将洗涤液体喷射到基板的前表面;以及喷嘴16, 将洗涤液体洗涤到衬底的后表面上,并在旋转衬底的同时洗涤衬底。 基板保持装置设置有可旋转的第一台2; 相对于第一工作台围绕第一工作台的相同轴线旋转的第二工作台3; 以及在圆周方向上相等间隔设置的互锁卡盘4,每个具有分别与第一工作台连接的一个端部和第二工作台的另一端,由于第二工作台的相位变化到第一工作台而同步摇摆 并且保持或释放衬底的侧面。 版权所有(C)2006,JPO&NCIPI