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    • 3. 发明申请
    • Levenson type phase shift mask and manufacturing method thereof
    • 莱文森型相移掩模及其制造方法
    • US20070037072A1
    • 2007-02-15
    • US11583797
    • 2006-10-20
    • Yosuke KojimaToshio KonishiKeishi TanakaMasao OtakiJun Sasaki
    • Yosuke KojimaToshio KonishiKeishi TanakaMasao OtakiJun Sasaki
    • G03C5/00G03F1/00
    • G03F1/30G03F1/36
    • A Levenson type phase shift mask has a light shielding portion and openings formed on a transparent substrate. The transparent substrate at the openings is partially dug in or a transparent film is partially disposed on the transparent substrate at the openings to form shifter openings and non-shifter openings. The shifter openings and the non-shifter openings repetitively exist in the mask. The shifter openings invert a phase of transmitted light. The Levenson type phase shift mask has a light shielding portions pattern interposed from both sides between the adjacent openings of the same kind. The light shielding portions pattern is subjected to bias correction which expands the light shielding portions pattern to both sides thereof in a predetermined amount with respect to a predetermined design line width set by a design of the mask.
    • 莱文森型相移掩模具有形成在透明基板上的遮光部分和开口。 开口处的透明基板被部分地挖出,或者透明膜部分地设置在开口处的透明基板上,以形成移位开口和非移位开口。 移位器开口和非移位开口在掩模中重复存在。 移位器开口反转透射光的相位。 莱文森型相移掩模具有从相同类型的相邻开口之间的两侧插入的遮光部图案。 对遮光部图形进行偏光校正,使得遮光部图案的两侧相对于由掩模的设计设定的规定的设计线宽度以规定量进行扩展。
    • 9. 发明授权
    • Display apparatus of an injection molding machine and an injection molding machine
    • 注射成型机的显示装置和注射成型机
    • US06848895B2
    • 2005-02-01
    • US10281220
    • 2002-10-28
    • Toshio KonishiSusumu Moriwaki
    • Toshio KonishiSusumu Moriwaki
    • B29C45/76
    • B29C45/76B29C2037/906B29C2045/7606
    • A display apparatus of an injection molding apparatus has a plurality of display areas on a screen of a display unit so as to perform a profile display of a molding data profile on an individual area basis. A program memory stores a program for defining a plurality of independent display areas on a screen of a display part, a program for arbitrarily relating the molding data to each of the display areas, a program for setting a display start timing to display the molding data profile related to each of the display areas, and a program for displaying the molding data profile related to each of the display areas on an individual area basis. A display control part controls the display part to display the molding data profile independently in the plurality of display areas on an individual area basis.
    • 注射成型装置的显示装置在显示单元的屏幕上具有多个显示区域,以便在单个区域的基础上执行模制数据轮廓的轮廓显示。 程序存储器存储用于在显示部分的屏幕上定义多个独立显示区域的程序,用于将模制数据任意地关联到每个显示区域的程序,用于设置显示开始定时以显示模制数据的程序 与每个显示区域相关的轮廓,以及用于在单个区域基础上显示与每个显示区域相关的模制数据简档的程序。 显示控制部分控制显示部分在单独区域的基础上在多个显示区域中独立地显示模制数据轮廓。